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CyberOptics ReticleSense® APSRQ Wireless
Particle Sensor for Use in ASML, Nikon and Canon
Scanners
Allyn Jackson, Sr. Field Application Engineer,
[email protected]
1.503.734.8463
© 2015 CyberOptics, All Rights Reserved - Confidential
Introduction
Introduction
•
Maximizing both yield and tool uptimes in the photo-lithography environments
requires best-in-class practices for a contamination-free process environment.
•
Quickly identifying when and where airborne particles originate and the source of
the contamination is challenging with traditional methods.
•
With methods that lack real-time feedback often “unexpected’ particle sources go
undetected or take a long time to finally identify.
•
Legacy methods are not real time, may cause long delays for results and are costly
with downtime required to tear down the fab tool or run a series of test reticles.
•
This presentation will review the advantages of using the wireless reticle-like realtime particle counter method to locate and troubleshoot airborne particles with
the ReticleSense® Airborne Particle Sensor (APSRQ) in Photo-lithography
environments.
© 2015 CyberOptics, All Rights Reserved - Confidential
Ideal for use in FAB scanners and steppers that read barcodes
and alignment in transmission
•
The ReticleSense® APSRQ is an airborne particle sensor in the reticle format and
in a quartz housing for particle detection in ASML, Nikon and Canon scanners.
•
APSRQ utilizes wireless particle sensing technology packaged in a actual reticle
Quartz housing for easy use inside of ASML, Nikon and Canon scanners.
•
APSRQ travels through scanners just like a quartz reticle to detect particle
sources when and where they occur.
© 2015 CyberOptics, All Rights Reserved - Confidential
APSRQ is the Established Mask Shop Airborne Particle Sensor in a
Quartz Housing
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Wireless Particle Reticle Concept
1. Some partial pressure of air or inert gas carries particles to the airborne particle
sensor with active airflow across detector region
2. Laser based particle detector is inside the airborne particle sensor
3. Uses light scattering to detect particles in gas stream
4. Wireless communication of particle data in “real-time” to PC
5. Travels like a reticle via tool automation and fab transport systems
6. Bins particles into two bins: 0.15um and 0.5um Records data for analysis and
permanent maintenance records
© 2015 CyberOptics, All Rights Reserved - Confidential
Traditional Scanner Particle Detection Methods
•
Particle detection methods most widely used:
- Monitor reticles
- Bench-top and hand-held airborne particle counters
- In-situ particle scanners
•
These methods have drawbacks
Surface Scan Reticles
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Hand held
Bench top
In-Situ Scanners
Drawbacks of Particle Counting with
Bench Top or Handle held Particle Counters
•
•
•
•
•
Surface Scan NOT REAL TIME!
Bench top counters require long hoses to reach into the tool
Bench top counters cannot follow the Reticle path
Difficult or impossible to reach all locations of interest
Equipment Engineers sometimes must crawl through and/or climb up
to make measurements
Bench top
Hand held
© 2015 CyberOptics, All Rights Reserved - Confidential
Drawbacks of Particle Qualification with Monitor Reticles
• Monitor reticle scanning is time consuming; sometimes long delays waiting for
results
• Surface scanning is not “real time”; so difficult to know “when” and “where”
monitor wafers became contaminated
Queue for Check
Takes time / manpower
© 2015 CyberOptics, All Rights Reserved - Confidential
Using Monitor Reticle or In-Situ Scanner
1. A particular photolithography tool routinely had excessive particles
2. The in-situ particle scanner would scan monitor reticles going in clean but would
intermittently exit with significant amounts of particles of unknown origin
3. The particle contamination was a constant source of frustration and traditional
methods of particle detection (build-in, monitor reticles and bench-top particle
counters) were unsuccessful in identifying the particle source.
© 2015 CyberOptics, All Rights Reserved - Confidential
Particle Per Reticle Pass Test Procedure
1. Pre-measure test reticles
2. Stage test reticles
3. Load test reticles
4. Cycle test reticles
5. Take reticles out
© 2015 CyberOptics, All Rights Reserved - Confidential
6. Wait for post-measure inspection tool availability
7. Post-measure reticles
8. Analyze results
9. If problems found, repeat and/or partition areas of
concern until problem identified and resolve
Case Study:
Using the APSRQ Particle Reticle is Quick and Easy
1. Fan pulls air into sensor
2. Airstream passes detectors and particles counted using light scattering technology
3. Sensor travels like a reticle through the entire path of the reticle and to all
process, handling and storage locations.
4. Particle data transmitted via Bluetooth in real-time to laptop application for
display data stored in data file
© 2015 CyberOptics, All Rights Reserved - Confidential
Case Study:
APSRQ Find Particle Source in Just Minutes
1. APSR loaded into tool. Most all sections found clean (zero particles)
2. Particle spike occurred when built-in particle scanner actually over reticle
3. After particle source suspected, corrective action was taken for all associated
moving parts.
4. Bonus ROI: With APSRQ, individual problem components can be replaced rather
than entire kits
© 2015 CyberOptics, All Rights Reserved - Confidential
APSRQ vs. Reticle Monitor Wafer
Time Comparison: 10X Time Savings
Particle Investigative
Procedure
Monitor Reticle Time
Estimated
Pre-measure test reticles
N/A
1 hour**
APSRQ ready immediately
Load test reticles
5 minutes
5 minutes
APSRQ handles just like normal reticle
Cycle test reticles
10 minutes or until
problem found
10 minutes
No waiting for APSRQ results
Take reticles out
5 minutes
5 minutes
Wait for post-measure reticle
inspection tool availability
2 hours**
Results immediate
Post-measure reticles
1 hour**
N/A
Analyze results
2 hours**
Results immediate
If problem found, repeat
and/or partition areas of
concern until problem
identified and resolved
8-16 hours**
Sometimes days until
problem found with
Reticle Monitor
1-2 hours
Troubleshooting and
resolution begins
immediately
Summary
**Times listed = past user
experience estimates
12-20 hours**
1-3 hours
10x time savings using
APSRQ vs. monitor
methods
© 2015 CyberOptics, All Rights Reserved - Confidential
APSRQ Time Estimate
Comment
Trouble-shooting begins immediately once
APSRQ identifies the problem area
With APSRQ, once problem area is found, all
possible particle source are investigated in
real-time
APSRQ also requires significantly less
resources such as manpower and inspection
tool resources not considered
Conclusion
•
•
APSRQ is proven ideal for Scanner predictive/preventative maintenance,
contamination control and process monitoring in atmospheric condition
Results in more tool uptime
© 2015 CyberOptics, All Rights Reserved - Confidential
ReticleSense® APSRQ Scanner Compatibility
Quartz Frame – Plot shown chrome side down
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ReticleSense® APSRQ – Dimensions
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ReticleSense®APSRQ Specifications
© 2015 CyberOptics, All Rights Reserved - Confidential
Save Time. Save Expense. Improve Yields.
Semiconductor fabs and OEMs worldwide value the accuracy, precision and
versatility of the ReticleSense APSRQ
The most efficient and effective wireless measurement device
for airborne particles.
© 2015 CyberOptics, All Rights Reserved - Confidential
ReticleSense Technology Based on WaferSense® Technology
10 Years in FABs WW
APS Airborne Particle Sensor
Counts particles >0.15um
ALS2V Leveling Wafer
ATS Teaching Wafer
AVS Vibration Wafer
AGS Gapping Wafer
Horizontal and Vertical
leveling to 0.03 and 0.05
degrees
Camera wafer with handoff
teaching accurate to 100um
Measures x, y, z
accelerations
Gapping accuracy to 0.001”
© 2015 CyberOptics, All Rights Reserved - Confidential
Allyn Jackson
Technical Account Manager &
Field Applications Engineer
Toll Free: 1(800) 366-9131
Direct : +1 (763) 542.5827
Email : [email protected]
Website www.CyberOpticsSemi.com
Send questions to: [email protected]
Ferris Chen
Director of Sales/ Semiconductor Division
CyberOptics Corporation
Email: [email protected]
Mobile(TW): +886.912.543323
Mobile(US): +1.763.222.4494
© 2015 CyberOptics, All Rights Reserved - Confidential
© 2015 CyberOptics, All Rights Reserved - Confidential