MST Baden-Württemberg, Stuttgart, 27.04.2015
Mikrosystemtechnik
Mik
t t h ik – Enabler
E bl für
fü das
d Internet-der-Dinge
I t
t d Di
Markus Sonnemann, Robert Bosch GmbH
Automotive Electronics
1
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
B
Bosch
h – the
th MEMS Pi
Pioneer

St t off MEMS production
Start
d ti in
i 1995

More than 5 billion MEMS sensors produced

More than 1,000 MEMS patents

100% in-house from MEMS design to manufacturing
Bosch is #1 MEMS sensor supplier worldwide
Automotive Electronics
2
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
MEMS technology
t h l
– the
th B
Bosch
h process
Thick epitaxy
p
y
“epi-poly”
DRIE
Etching
g of sacrificial layers
y
Deep reactive ion etching
Epi-poly
Epi-Poly
Oxid
Oxid
Silizium
Silicon
APSM
System
y
integration
g
Advanced porous silicon membrane
SMI540
porous Si
ASIC
n+
Gyro
10,3 mm
10,3 mm
Accelerometer
1 axis gyro + 2 axis accelerometer
Automotive Electronics
3
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
W f Fab
Wafer
F b Reutlingen
R tli
Employees
2 758
Production area
34 300 sqm
Minifactories
Wafer fab
fab, sensor frontend
frontend, sensor backend
backend,
test center
Products
IC,, power
p
S/C
/ (chip
( p and packaged),
p
g ), sensors
(packaged, customer specific mold package)
150 mm module
200 mm module
4 100 sqm
1 500 wafer starts/day
Technologies:
h l
BCD1, 2, 3, 3s, 4, 4s
CMOS, Bipolar, PSC bipolar, MOS
Pressure sensors
Inertial sensors
Process: ≥ 0.5 μm
4 600 sqm
1000 wafer starts/day
Technologies:
h l
BCD4, 4s, 6, 6sCu
Advanced CMOS, HVCMOS
Pressure sensors
Inertial sensors
Process ≥ 0.18 μm
Automotive Electronics
4
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
P d t portfolio
Product
tf li MEMS for
f automotive
t
ti
Acceleration
sensors
Angular rate
sensors
Combined
i
inertial
i l sensors
Pressure
sensors
Mass flow
sensors
C
Central/peripheral
t l/
i h l
acceleration sensor
for occupant protection
R
Rollover
ll
sensor
for occupant protection
C
Combined
bi d iinertial
ti l
sensor (3-axis)
(yaw rate and
acceleration sensor)
for VDC and RoSe
L
Low pressure sensor
for engine control
M
Mass
fl
flow sensor
for engine management
Low-g acceleration
sensors
for VDC, RoSe and
active suspension
and 3D for non-safety
Mid-pressure sensor
for transmission
control
Yaw rate sensor
for VDC
and 3D for non-safety
Combined inertial
sensor (6-axis)
(yaw rate and
acceleration sensor)
for navigation and
non-safety applications
Pressure sensor
for occupant
protection
High pressure sensor
for engine and brake
systems
Automotive Electronics
5
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
M
More
th
than 50 MEMS sensors iin one car
1 Mass flow sensor [Combustion]
1 Barometric air pressure sensor [BAP]
1 Pressure sensor [Particle filter]
2 Pressure sensors [Boost pressure, oil]
1 High pressure sensor [Common Rail]
1 Pressure sensor [Tank pressure]
1 Pressure sensor [Start/stop function]
2 Acceleration sensors [Active engine mounting]
1 Acceleration sensor [Onboard diagnosis]
16 Sen
nsors
Comfort
2 Pressure sensors [Automatic transmission]
5 Acceleration sensors [active suspension]
1 Pressure sensor, 1 Humidity sensor,
2 Thermopiles [Air conditioning]
1 Angular rate sensor, 1 Acceleration sensor
[Navigation]
2 microphones [telephone]
1 Bolometer Array [Night vision]
(Seldom: 16 Pressure sensors (up to 8 per seat))
Safety
25 Se
ensors
11 Se
ensors
Engine Management e.g. Diesel
2 High-g acceleration sensors (for airbag), 1 Angular rate
sensor + 1 Low-g acceleration sensor (for roll-over sensing),
1 Acceleration sensor (Structure-borne sound sensor)
[Airbag-ECU]
4 Acceleration sensors, 2 Pressure sensors [Peripheral
airbag sensors]
2 Pressure sensors [Pedestrian safety]
1 Angular rate sensor, 1 Low-g acceleration sensor, 1 High
pressure sensor [ESP (incl. ACC)]
1 Angular rate sensor [Active steering]
1 Acceleration sensor [eCall]
1 Acceleration sensor [Car alarm]
4 Pressure sensors [TPMS]
[
]
1 Pressure sensor [Occupant detection]
1 Pressure sensor [BrakeBooster]
More than 50 MEMS sensors in one car today
y
Automotive Electronics
6
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
Di
Disruptive
ti changes
h
in
i the
th MEMS market…
k t
Digital
g
microphone
Gyroscope
Multi-sensor
package
Magnetic
sensor
Accelerometer
Pressure sensor
Automotive Electronics
7
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
S
Smartphone
t h
tipping-point…
ti i
i t
Rome,, Via Della Conciliazione 2005
Rome,, Via Della Conciliazione 2013
Source: dpa/ap
Worldwide smartphone market 20141): 1.3 bn shipments estimated
 ~7-8 billion sensors2)
Automotive Electronics
8
1) IDC Worldwide Mobile Phone Tracker, 3Q 2014
2) IHS Technology, MEMS Market Tracker Consumer and Mobile 2H 2013
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
MEMS penetrate
t t the
th markets
k t
Internet of Things (IoT)
3rd wave
Consumer Electronics
2nd wave
Automotive
1st wave
1990
2000
2010
2020
Automotive Electronics
9
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
M
More
use cases th
than portrait
t it / landscape…
l d
Navigation
a gat o
Outdoor
 GPS
Indoor
 Step
St countt +
heading
 Localization

Improve with
pressure
Context
Co
te t
User s context
User’s
 In a meeting
 Outside
 Sitting and eating
 Watching
W t hi TV

Activity recognition
Fitness
t ess



Step counter
Fitness level
Calorie monitoring
Sports
S
t ttrainer
i
 Swimming
 Running
 Snowboarding
 Climbing
Wellness/stress
e ess/st ess
Wellbeing
 Sleep monitoring
 Activity
 Socializing
Stress monitoring
 Speaker Assistant
 Stress level
Automotive Electronics
10
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
…
MST – Enabler für das Internet-der-Dinge
MEMS sensors – a multitude
ltit d off markets
k t
Automotive
Safety Systems
Motor Management
g
Consumer Electronics
Mobile
Home Appliances
Imaging
Health & Fitness
Industrial & Logistics
Smart Systems
Internet of Things
Automotive Electronics
11
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
S
Smart
t systems
t
require
i new competences
t
μC firmware design
SW algorithms*
algorithms
(gesture, well-being, …)
low power
p
μC
μ core design
g
FPGA as tool77
wireless connectivity
(for 2nd generation)
ASIC design,
g , SystemC
y
models
advanced packaging (SiP | WLCSP)
MEMS design/technology
(SiP | WLCSP)
Software and advanced packaging are gaining weight, “SW is the new ASIC”
Automotive Electronics
12
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
E
Example
l iindoor
d
navigation
i ti – Inertial
I ti l sensor
Sensors & Functions
Low power consumption
Acceleration
Gyroscope
Geomagnetic sensor
Applications
• Step counter & dynamic orientation
sensor indoor
• Path integration
• Pedestrian dead reckoning
Benefits
• Navigation in shopping malls, public
areas, parking decks, etc.
Automotive Electronics
13
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
BMI160 iinertial
ti l measurementt unit
it

The 6-axis sensor integrates
g
a 3-axis accelerometer and an ultra-low
power 3-axis gyroscope into a single package
&

=
Developed specifically to support the demands of next generation
applications such as indoor navigation, augmented reality and immersive
gaming
BMI160 with <1mA in full-operation mode for true always-on applications
Automotive Electronics
14
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
BNO055 intelligent
i t lli
t absolute
b l t orientation
i t ti sensor
Ab l t Orientation
Absolute
O i t ti
Sensor
S
System in Package (SiP) approach
• 3-axis accelerometer
3-axis
axis gyroscope
•3
• 3-axis geomagnetic sensor
• 32 bit μC running BSX3.0 FusionLib
software
• 5.2 x 3.8 mm² footprint
Augmented
g
Reality
Gaming
g
Activity
y
monitoring
Navigation
g
Context
awareness
Power
management
Home
automation
Logistics
g
BNO055 plus a RF interface (WiFi, BT, etc.) is a key block of IoT based sensing
Automotive Electronics
15
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
C
Connected
t d smartt home
h
Automotive Electronics
16
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
E
Example
l smartt home
h
– Intrusion
I t i sensor
Sensors & Functions
Acceleration
Battery life time: up to
two years (10.000 closing
cycles
l assumed)
d)
Gyroscope
Geomagnetic sensor
Wireless data
transmission
Buzzer
Applications
• Home safety monitoring
• Energy efficiency management
• Ambient Assisted Living
Benefits
•
•
•
•
Easy and fast installation
Multiple event detection
Flexible usage for doors and windows
Extendibility to many different use cases
Automotive Electronics
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Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
N
New:
G
Gas Sensor
S
BME680
BMP280
Sensing our world
Quantify yourself

Well-being recommendations

Personalized environment

Sport & fitness monitoring
BME280
Personalized control

Environmental monitoring

Personal weather forecast

Home automation
+
BME680
BME680
+
Environmental measurement

Pressure

Humidity

Temperature

Gas (VOC, CO2 alcohol)
World´s first environmental sensor combining pressure, humidity,
temperature & indoor air quality
Automotive Electronics
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Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
N
New:
G
Gas Sensor
S
BME680
Use cases

Home automation control for personalized HVAC management

M
Manual
l ventilation
til ti  window
i d
open/close
/ l

VOC detection (Volatile Organic Compounds)

Indoor/outdoor detection to trigger GPS

Leakage detection, e.g. gas supply in stoves

Smoke detection

H
Human
recognition
iti iindoor
d
3.0 mm
3 0 mm
3.0
Equips mobile devices and wearables with indoor air quality measurement
Automotive Electronics
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Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
P d t portfolio
Product
tf li MEMS ffor C
Consumer El
Electronics
t i
3-axis sensors



Accelerometer
Gyroscope
Magnetometer
6-axis sensors


eCompass
IMU
9-axis sensors


Absolute
Orientation
Sensor
Application
Specific Sensor
Nodes (ASSNs,
incl. μC)
environmental


Barometric
Pressure
Sensor
Integrated
Environmental
Unit
microphones


Analog and
digital MEMS
microphones
(Akustica)
High quality
voice input for
mobile devices
Sensor data-fusion software ties everything together
Automotive Electronics
20
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
Th
Three
pillars
ill
off MEMS @ Bosch
B
h
Bosch:
B
h
No. 1 global supplier of MEMS sensors
A MEMS pioneer
i
with
ith

More than 20 years of experience
p

More than 5 billion MEMS sensors produced

More than 1.000 patents in the MEMS sensor area
Automotive Electronics
21
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST – Enabler für das Internet-der-Dinge
B
h – ffrom MEMS tto smartt sensors & solutions
l ti
Bosch
Bosch: One source for MEMS,
MEMS sensors,
sensors actuators and solutions
Automotive Electronics
Bosch Sensortec
Bosch Connected
Devices & Solutions
Akustica
CE & Industrial

Acceleration

Accelerometers

Angular
g
rate

Geomagnetic
g
sensors

Pressure

Gyroscopes

Mass flow sensors

Pressure sensors

Humidity sensors

Combo sensors

ASSNs

MEMS microphones
Automotive Electronics
22
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.

Smart sensor /
actuator nodes

Embedded SW &
Algorithms

Customized IoT
sensors & actuators
solutions
MST – Enabler für das Internet-der-Dinge
E bl ffor IIoT
Enabler
T – MEMS technology
t h l
innovation
i
ti
Size / power
Integration / μC + SW
New measurants
Continuing
C
ti i
shrinking
h i ki
off
sensor footprint / size
and power consumption
(e.g. accelerometer)
IIntegration
t
ti
off multi-axis
lti i
sensors + μC + SW
in combo package
(e.g. motion / orientation)
Ri / emergence off novell
Rise
sensor clusters
(e.g. environmental
cluster  T, p, H, …)
MEMS technology is “ready” for IoT
Automotive Electronics
23
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.
MST Baden-Württemberg, Stuttgart, 27.04.2015
Danke!
Mikrosystemtechnik – Enabler für das Internet-der-Dinge
Automotive Electronics
24
Markus Sonnemann, AE/EAC | 27.04.2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation,
reproduction, editing, distribution, as well as in the event of applications for industrial property rights.