A PASSION FOR PERFECTION Gas regulating valve EVR 116, motorized, DN 16 ISO-KF Chambers & Components / Valves EVR 116, Gas regulating valve, motorized High gas throughput Very broad regulating range With integrated motor control electronics Dimensions www.pfeiffer-vacuum.com Page 2 Chambers & Components / Valves Technical Data EVR 116, Gas regulating valve, motorized Ambient temperature Bakeout temperature: actuator Bakeout temperature: housing Closing/opening time Control Control voltage Dosing sleeve Flange (in) Flange (out) Gas flow max. controllable Gas flow min. controllable 5-40 °C | 41-104 °F | 278-313 K 60 °C | 140 °F | 333 K 80 °C | 176 °F | 353 K <3/4s RVC 300 or IF 200 0-10 V DC Fluorplastomer DN 16 ISO-KF DN 16 ISO-KF 1,250 hPa l/s | 937.5 Torr l/s | 1,250 mbar l/s 5 · 10-6 hPa l/s | 3.75 · 10-6 Torr l/s | 5 · 10-6 mbar l/s Stainless steel 2500 hPa (abs.) 1 · 10-8 hPa | 7.5 · 10-9 Torr | 1 · 10-8 mbar FKM 12 W 24 V DC 1 · 10-10 Pa m3/s | 7.5 · 10-10 Torr l/s | 1 · 10-9 mbar l/s Gas regulating valve 0.75 kg | 1.65 lb Housing/needle/filter Operating pressure max. Operating pressure min. Seal Supply: Power consumption max. Supply: Voltage Tightness Type Weight Order number Gas regulating valve EVR 116, motorized, DN 16 ISO-KF PF I39 931 Accessories Connection cable RVC-EVR/RME RVC-EVR, connection cable, 10 m RVC-EVR, connection cable, 15 m RVC-EVR, connection cable, 20 m RVC-EVR, connection cable, 3 m RVC-EVR, connection cable, 5 m www.pfeiffer-vacuum.com PT 583 117-T PT 583 118-T PT 583 119-T PT 583 115-T PT 583 116-T Page 3 Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range of products From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. Competence in theory and practice Benefit from our know-how and our portfolio of training opportunities! We support you with your plant layout and provide first-class on-site service worldwide. Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters · Germany T +49 6441 802-0 [email protected] www.pfeiffer-vacuum.com All data subject to change without prior notice. (10/21/2014) Vacuum solutions from a single source