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Plasma Cleaner
Instructions for Use
23-Aug-06
mgbersch
Fischione 1020 Plasma Cleaner
23-Aug-06
mgbersch
General
• Most of the cleaning process with the 1020 are
automatic.
• The process is started by entering a cleaning
time.
• Once the process starts the specimen chamber
will automatically pump and initiate plasma
cleaning. The chamber will remain under
vacuum until vented by the user.
• VENTING TAKES 3 – 4 MINUTES. TURBO
PUMP MUST SPIN DOWN.
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mgbersch
Gas Supply
• Make sure the gas
supply is on and there
is gas.
• Gas is an Argon –
Oxygen mixture.
• NOTE, just check the
gauge. Do NOT
adjust ANY valves.
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mgbersch
Check Control Panel
• Normally the
specimen holder will
be under vacuum.
• First check the control
panel.
• If the “HIGH
VACUUM” light is
illuminated, you must
vent the specimen
chamber.
23-Aug-06
mgbersch
Venting the Specimen Chamber
• Press VENT on the
control panel.
• The VENTING LED
will illuminate.
• It takes 3 – 4 minutes
to vent the chamber.
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mgbersch
Chamber at Atmosphere
• Wait until the ATMOSPHERE LED is illuminated
before opening chamber.
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mgbersch
Remove the plug
• After the chamber is
vented, remove the
plug from the TEM
specimen port.
• Place the plug in the
plastic bag on top of
the plasma cleaner.
• The chamber is now
ready for insertion of
the TEM specimen
holder.
23-Aug-06
mgbersch
Insert TEM Specimen Holder
• Insert the TEM specimen holder into the
chamber.
• The specimen holder may come to a stop but
may not be fully inserted (see image). Do not
push on the specimen holder at this time. WAIT.
23-Aug-06
mgbersch
Set Cleaning Time
• Using the number pad
on the control panel
input the cleaning
time. Cleaning time
for most TEM
specimens is 30 sec
to 5 minutes.
• Press SET to start the
pump down and
cleaning cycle.
23-Aug-06
mgbersch
Check Holder and Clean Cycle
• When the pumping
cycle starts the holder
should then move into
the specimen
chamber. CHECK
THIS.
• When cleaning is
underway, the gas
mixture will
luminesce. This can
be observed through
the window.
23-Aug-06
mgbersch
Clean cycle end and vent
• The timer will count
down as the cleaning
cycle continues. At
zero cleaning will end
but the chamber
remains under
vacuum.
• To Vent, press VENT.
• REMEMBER: 3 to 4
minutes to vent
chamber.
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mgbersch
Shut Down # 1
• Remove the holder
from the specimen
chamber.
• Replace the Plug
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mgbersch
Shut Down # 2
• Press PUMP to pump
down the chamber.
• Chamber is left under
vacuum
• Wait and make sure
the chamber returns
to HIGH VACUUM
23-Aug-06
mgbersch
APPENDIX
• An accessory is
available for inserting
SEM stubs (FEI type).
• A vacuum pumping
station for TEM
holders is also
avaible.
23-Aug-06
mgbersch
Remove the TEM Port
• The TEM port must be
removed before the SEM
specimen holder can be
placed in the cleaning
chamber.
• Unscrew the black
retaining ring and
remove.
• Take out the TEM port
and place on a clean
surface. Be careful of,
and check the large
O-ring
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mgbersch
Insert the SEM specimen holder
• Insert the SEM
specimen holder. Be
careful of the large Oring.
• The holder sits flush
in the opening when
fully inserted.
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mgbersch
High Vacuum Docking Stations
• TEM holders can be
kept under vacuum in
the TEM Docking
station.
• To use:
– Contact CAF
personnel.
23-Aug-06
mgbersch