Vacuum System Components (continued)/Vacuum Systems Accessories Deposition Supplies, Gas Control, Ion/Plasma Sources, Plasma/Sputtering/Arc Components, Reclamation Services 11.16 Heat exchangers Deposition Supplies 11.17 Mechanical components - bearings 1.1 Arc cathode materials • 11.18 Pumps - aspiration • 11.19 Pumps - booster • • • • • 11.20 Pumps - cryo, colder than -160C 11.21 Pumps - cryo, warmer than -160C • 11.22 Pumps - diaphragm 11.23 Pumps - diffusion 11.24 Pumps - getter 11.25 Pumps - ion 11.26 Pumps - mechanical, oil-sealed • 11.27 Pumps - mechanical, oil-free • • • • • • • • • • • • • • • • • • • 1.2 Evaporation filaments & crucibles 1.3 Evaporation materials 1.4 Sputtering target materials • • • • • • • 11.30 Traps & baffles - diffusion pumps 11.31 Traps & baffles - mechanical pumps 11.32 Traps & baffles - exhaust 11.33 Tubing, flanges, fittings & seals 11.34 Vacuum chambers 11.35 Valves (<2 inches) 11.36 Valves (>2 inches) • • • • • • • • • • • • 11.37 Valves - soft pump/let-up 11.38 Valves - ultrahigh vacuum 11.39 Valves - variable conductance 11.40 Windows • • • • • • • • • • • • • • • • • • • • • 12.2 Plasma Cleaners XEI Scientific, Inc. www.Evactron.com VAT, Inc. www.vatvalve.com Vacuum Research Corporation www.vacuumresearch.com Televac www.televac.com Teledyne Hastings Instruments www.teledyne-hi.com Rocky Brook Associates, Inc. 800-547-8934 Pfeiffer Vacuum www.pfeiffer-vacuum.com Oerlikon Leybold Vacuum USA Inc. www.oerlikon.com/leyboldvacuum MKS Instruments, Inc. www.mksinst.com • • • Gas Control 2.1 Exhaust conditioning systems 2.2 Gas manifolds • • 2.3 Gas purifiers • • • • • • • • • • • • • • • • • • • • • • • • • • • • 2.4 Gas storage • • • • • • • • • • • • • • • • • • • • • • • • • • • 2.5 Mass flow meters 2.6 Pressure controllers • 2.7 Variable leaks • • • • • • • • Ion/Plasma Sources • • • • • • • • • • • • 3.1 Cold cathode sources 3.2 ECR sources 3.3 End Hall sources • 3.4 Inductive coupled plasma • • • • • 3.5 Kaufman ion guns • 3.6 RF sources • Plasma/Sputtering/Arc Components 4.1 Arc power supplies • 4.2 DC power supplies 4.3 Microwave power supplies • 4.4 RF power supplies Vacuum Systems Accessories 12.1 Decontaminators, Anti-contamination Systems • • • 1.5 Substrate materials 11.28 Pumps - sorption 11.29 Pumps - turbomolecular • • • • Kurt J. Lesker Company www.lesker.com Vacuum System Components (continued) Edwards www.edwardsvacuum.com Products and Services Angstrom Sciences www.angstromsciences.com XEI Scientific, Inc. www.Evactron.com Welch-Ilmvac www.welchvacuum.com VAT, Inc. www.vatvalve.com Vacuum Research Corporation www.vacuumresearch.com UC Components, Inc. www.uccomponents.com Companies Tuthill Vacuum & Blower Systems www.tuthillvacuum.com Pfeiffer Vacuum www.pfeiffer-vacuum.com Osaka Vacuum U.S.A., Inc. www.osakavacuum.co.jp/en/ Oerlikon Leybold Vacuum USA Inc. www.oerlikon.com/leyboldvacuum Nor-Cal Products, Inc. www.n-c.com MKS Instruments, Inc. www.mksinst.com Mass-Vac, Inc. www.massvac.com Kurt J. Lesker Company www.lesker.com GNB Corporation www.gnbvalves.com Edwards www.edwardsvacuum.com Drivac www.drivac.com BellowsTech, LLC www.bellowstech.com Products and Services A&N Corporation www.ancorp.com Companies Sumitomo (SHI) Cryogenics of America, Inc. www.shicryogenics.com Note: Only the companies who sell the products on these two pages are listed. • • Reclamation Services 2014 - 2015 Vacuum Equipment Resource Directory 5.1 Evaporation/sputtering materials 5.2 Vacuum pump oil • • • • • • • 6.2 Used vacuum equipment 6.3 Refurbished equipment 6.4 Repair/maintenance at user’s site • • • • • • • • • • • • • • • • • • • • • • • Supplies/Accessories • 7.1 Adhesives • • • • 7.7 Oil filters • • • • • 7.11 Vacuum pump oils 7.12 Vacuum switches 8.1 Calibrated leaks • 8.3 Gauge calibration services 8.4 Ionization gauges • • 8.5 Leak detectors - halogen 8.6 Leak detectors - helium 8.7 Microprocessor controls 8.8 Plasma characterization 8.9 Residual gas analyzers 8.10 Thermocouple/Pirani gauges 8.11 Optical Spectrometry 8.12 PC-PLC Control of Vacuum Systems • • 9.3 Electron beam power supplies • • • 10.25 Surface analysis equipment • 10.3 Atomic Layer Deposition (ALD) 10.2 Arc melting/vaporization 10.4 Batch (common in & out load lock) 10.5 Batch (one chamber) • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 10.6 Cluster tool • • • • • • • 10.7 Electron beam melting 10.8 Equipment design services • • • • • • • • • • • • UC Components, Inc. www.uccomponents.com Tuthill Vacuum & Blower Systems www.tuthillvacuum.com Televac www.televac.com Pfeiffer Vacuum www.pfeiffer-vacuum.com Omley Industries, Inc. www.omley.com Oerlikon Leybold Vacuum USA Inc. www.oerlikon.com/leyboldvacuum Nor-Cal Products, Inc. www.n-c.com MKS Instruments, Inc. www.mksinst.com Mass-Vac, Inc. www.massvac.com Kurt J. Lesker Company www.lesker.com INFICON www.inficon.com • • • • • • • • • • 10.31 Vacuum - general (no chamber) • • • • • • • • • • • • • • • • 10.32 Vacuum packaging 10.33 Web coating • • • Vacuum System Components 11.1 Bellows Assemblies • • • • • • • • • • • 11.3 Chillers & refrigeration systems 11.4 Cryocoolers for traps & baffles 11.5 Custom fixtures & tooling 10.12 Ion milling/etching 11.7 Feedthrough collars 10.13 Ion plating 11.8 Feedthroughs - electrical • • 11.2 Bellows, Welded 11.6 Electrical components • • • • 10.30 Vacuum furnaces & ovens • • • 10.28 Vacuum evaporation 10.29 Vacuum freeze drying • GNB Corporation www.gnbvalves.com Edwards www.edwardsvacuum.com BellowsTech, LLC www.bellowstech.com 10.26 Ultrahigh vacuum systems 10.11 Ion implantation 10.14 Laboratory coaters • 10.27 Vacuum drying & outgassing 10.9 In-line (separate in & out load lock) 10.10 Ion Beam Assisted Deposition (IBAD) • • • • • • • • • Angstrom Sciences www.anstromsciences.com 10.23 Space simulation 9.6 Resistive evaporation fixtures • • • 10.22 Reactive Plasma Etching (RPE) 10.24 Sputter deposition • • • 10.21 Reactive Ion Etching (RIE) 9.5 Optical property monitors • A&N Corporation www.ancorp.com Tuthill Vacuum & Blower Systems www.tuthillvacuum.com Rocky Brook Associates, Inc. 800-547-8934 Oerlikon Leybold Vacuum USA Inc. www.oerlikon.com/leyboldvacuum MKS Instruments, Inc. www.mksinst.com INFICON www.inficon.com Kurt J. Lesker Company www.lesker.com • • 9.4 Electron beam sources • • System Monitoring and Control 8.2 Capacitance diaphragm gauges • 9.2 Deposition rate monitors/controllers 10.1 Air-to-Air (no load lock) 7.8 Radiant heaters 7.10 Vacuum lubricants 10.20 Plasma Enhanced CVD (PECVD) Vacuum Systems 7.6 Heating mantles 7.9 Sealants 9.1 Arc vaporization fixtures 9.9 Substrate temperature controllers 7.4 Fluid flow switches • Vacuum Systems (continued) 9.8 Substrate heaters 7.3 Exhaust scrubbers 7.5 Gaskets - polymer, metal Vacuum Deposition Components 9.7 Sputtering target fixtures 7.2 Cleaning and handling supplies Products and Services VAT, Inc. www.vatvalve.com • • • • • • • • • 6.1 Replacement parts Note: Only the companies who sell the products on these two pages are listed. Vacuum Research Corporation www.vacuumresearch.com Repair/Rebuild Equipment Products and Services Vacuum Systems (continued), Vacuum System Components Companies GNB Corporation www.gnbvalves.com Welch-Ilmvac www.welchvacuum.com Verity Instruments, Inc. www.verityinst.com VAT, Inc. www.vatvalve.com Vacuum Research Corporation www.vacuumresearch.com UC Components, Inc. www.uccomponents.com Tuthill Vacuum & Blower Systems www.tuthillvacuum.com Televac www.televac.com Companies Teledyne Hastings Instruments www.teledyne-hi.com Pfeiffer Vacuum www.pfeiffer-vacuum.com Osaka Vacuum USA, Inc. www.asakavacuum.co.jp/en/ Oerlikon Leybold Vacuum USA Inc. www.oerlikon.com/leyboldvacuum Nor-Cal Products, Inc. www.n-c.com MKS Instruments, Inc. www.mksinst.com Kurt J. Lesker Company www.lesker.com INFICON www.inficon.com GNB Corporation www.gnbvalves.com Edwards www.edwardsvacuum.com Drivac www.drivac.com BellowsTech, LLC www.bellowstech.com Angstrom Sciences www.anstromsciences.com AMETEK, Inc. www.ametekpi.com A&N Corporation www.ancorp.com Sumitomo (SHI) Cryogenics of America, Inc. www.shicryogenics.com Note: Only the companies who sell the products on these two pages are listed. Companies Products and Services Vacuum Deposition Components, Note: Only the companies who sell the products on this Vacuum Systems pages are listed. Angstrom Sciences www.anstromsciences.com Repair/Rebuild Equipment, Supplies/Accessories, System Monitoring and Control 11.9 Feedthroughs - fluid 10.15 Laser ablation 11.10 Feedthroughs - linear motion 10.16 Low Pressure CVD (LPCVD) 11.11 Feedthroughs - optical 10.17 Low Pressure Plasma Spray (LPPS) 11.12 Feedthroughs - radio frequency 10.18 Metalorganic CVD (MOCVD) 11.13 Feedthroughs - rotary motion 10.19 Molecular Beam Epitaxy (MBE) 11.14 Flanges - blank 11.15 Getter materials • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • •
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