Vacuum System Components (continued)/Vacuum Systems Accessories
Deposition Supplies, Gas Control, Ion/Plasma Sources,
Plasma/Sputtering/Arc Components, Reclamation Services
11.16 Heat exchangers
Deposition Supplies
11.17 Mechanical components - bearings
1.1 Arc cathode materials
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11.18 Pumps - aspiration
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11.19 Pumps - booster
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11.20 Pumps - cryo, colder than -160C
11.21 Pumps - cryo, warmer than -160C
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11.22 Pumps - diaphragm
11.23 Pumps - diffusion
11.24 Pumps - getter
11.25 Pumps - ion
11.26 Pumps - mechanical, oil-sealed
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11.27 Pumps - mechanical, oil-free
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1.2 Evaporation filaments & crucibles
1.3 Evaporation materials
1.4 Sputtering target materials
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11.30 Traps & baffles - diffusion pumps
11.31 Traps & baffles - mechanical pumps
11.32 Traps & baffles - exhaust
11.33 Tubing, flanges, fittings & seals
11.34 Vacuum chambers
11.35 Valves (<2 inches)
11.36 Valves (>2 inches)
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11.37 Valves - soft pump/let-up
11.38 Valves - ultrahigh vacuum
11.39 Valves - variable conductance
11.40 Windows
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12.2 Plasma Cleaners
XEI Scientific, Inc.
www.Evactron.com
VAT, Inc.
www.vatvalve.com
Vacuum Research Corporation
www.vacuumresearch.com
Televac
www.televac.com
Teledyne Hastings Instruments
www.teledyne-hi.com
Rocky Brook Associates, Inc.
800-547-8934
Pfeiffer Vacuum
www.pfeiffer-vacuum.com
Oerlikon Leybold Vacuum USA Inc.
www.oerlikon.com/leyboldvacuum
MKS Instruments, Inc.
www.mksinst.com
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Gas Control
2.1 Exhaust conditioning systems
2.2 Gas manifolds
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2.3 Gas purifiers
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2.4 Gas storage
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2.5 Mass flow meters
2.6 Pressure controllers
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2.7 Variable leaks
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Ion/Plasma Sources
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3.1 Cold cathode sources
3.2 ECR sources
3.3 End Hall sources
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3.4 Inductive coupled plasma
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3.5 Kaufman ion guns
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3.6 RF sources
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Plasma/Sputtering/Arc Components
4.1 Arc power supplies
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4.2 DC power supplies
4.3 Microwave power supplies
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4.4 RF power supplies
Vacuum Systems Accessories
12.1 Decontaminators, Anti-contamination
Systems
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1.5 Substrate materials
11.28 Pumps - sorption
11.29 Pumps - turbomolecular
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Kurt J. Lesker Company
www.lesker.com
Vacuum System Components (continued)
Edwards
www.edwardsvacuum.com
Products and
Services
Angstrom Sciences
www.angstromsciences.com
XEI Scientific, Inc.
www.Evactron.com
Welch-Ilmvac
www.welchvacuum.com
VAT, Inc.
www.vatvalve.com
Vacuum Research Corporation
www.vacuumresearch.com
UC Components, Inc.
www.uccomponents.com
Companies
Tuthill Vacuum & Blower Systems
www.tuthillvacuum.com
Pfeiffer Vacuum
www.pfeiffer-vacuum.com
Osaka Vacuum U.S.A., Inc.
www.osakavacuum.co.jp/en/
Oerlikon Leybold Vacuum USA Inc.
www.oerlikon.com/leyboldvacuum
Nor-Cal Products, Inc.
www.n-c.com
MKS Instruments, Inc.
www.mksinst.com
Mass-Vac, Inc.
www.massvac.com
Kurt J. Lesker Company
www.lesker.com
GNB Corporation
www.gnbvalves.com
Edwards
www.edwardsvacuum.com
Drivac
www.drivac.com
BellowsTech, LLC
www.bellowstech.com
Products and
Services
A&N Corporation
www.ancorp.com
Companies
Sumitomo (SHI) Cryogenics of America, Inc.
www.shicryogenics.com
Note: Only the companies who sell the products on these two pages are listed.
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Reclamation Services
2014 - 2015 Vacuum Equipment Resource Directory
5.1 Evaporation/sputtering materials
5.2 Vacuum pump oil
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6.2 Used vacuum equipment
6.3 Refurbished equipment
6.4 Repair/maintenance at user’s site
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Supplies/Accessories
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7.1 Adhesives
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7.7 Oil filters
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7.11 Vacuum pump oils
7.12 Vacuum switches
8.1 Calibrated leaks
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8.3 Gauge calibration services
8.4 Ionization gauges
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8.5 Leak detectors - halogen
8.6 Leak detectors - helium
8.7 Microprocessor controls
8.8 Plasma characterization
8.9 Residual gas analyzers
8.10 Thermocouple/Pirani gauges
8.11 Optical Spectrometry
8.12 PC-PLC Control of Vacuum
Systems
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9.3 Electron beam power supplies
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10.25 Surface analysis equipment
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10.3 Atomic Layer Deposition (ALD)
10.2 Arc melting/vaporization
10.4 Batch (common in & out load lock)
10.5 Batch (one chamber)
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10.6 Cluster tool
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10.7 Electron beam melting
10.8 Equipment design services
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UC Components, Inc.
www.uccomponents.com
Tuthill Vacuum & Blower Systems
www.tuthillvacuum.com
Televac
www.televac.com
Pfeiffer Vacuum
www.pfeiffer-vacuum.com
Omley Industries, Inc.
www.omley.com
Oerlikon Leybold Vacuum USA Inc.
www.oerlikon.com/leyboldvacuum
Nor-Cal Products, Inc.
www.n-c.com
MKS Instruments, Inc.
www.mksinst.com
Mass-Vac, Inc.
www.massvac.com
Kurt J. Lesker Company
www.lesker.com
INFICON
www.inficon.com
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10.31 Vacuum - general (no chamber)
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10.32 Vacuum packaging
10.33 Web coating
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Vacuum System Components
11.1 Bellows Assemblies
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11.3 Chillers & refrigeration systems
11.4 Cryocoolers for traps & baffles
11.5 Custom fixtures & tooling
10.12 Ion milling/etching
11.7 Feedthrough collars
10.13 Ion plating
11.8 Feedthroughs - electrical
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11.2 Bellows, Welded
11.6 Electrical components
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10.30 Vacuum furnaces & ovens
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10.28 Vacuum evaporation
10.29 Vacuum freeze drying
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GNB Corporation
www.gnbvalves.com
Edwards
www.edwardsvacuum.com
BellowsTech, LLC
www.bellowstech.com
10.26 Ultrahigh vacuum systems
10.11 Ion implantation
10.14 Laboratory coaters
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10.27 Vacuum drying & outgassing
10.9 In-line (separate in & out load lock)
10.10 Ion Beam Assisted Deposition (IBAD)
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Angstrom Sciences
www.anstromsciences.com
10.23 Space simulation
9.6 Resistive evaporation fixtures
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10.22 Reactive Plasma Etching (RPE)
10.24 Sputter deposition
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10.21 Reactive Ion Etching (RIE)
9.5 Optical property monitors
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A&N Corporation
www.ancorp.com
Tuthill Vacuum & Blower Systems
www.tuthillvacuum.com
Rocky Brook Associates, Inc.
800-547-8934
Oerlikon Leybold Vacuum USA Inc.
www.oerlikon.com/leyboldvacuum
MKS Instruments, Inc.
www.mksinst.com
INFICON
www.inficon.com
Kurt J. Lesker Company
www.lesker.com
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System Monitoring and Control
8.2 Capacitance diaphragm gauges
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9.2 Deposition rate monitors/controllers
10.1 Air-to-Air (no load lock)
7.8 Radiant heaters
7.10 Vacuum lubricants
10.20 Plasma Enhanced CVD (PECVD)
Vacuum Systems
7.6 Heating mantles
7.9 Sealants
9.1 Arc vaporization fixtures
9.9 Substrate temperature controllers
7.4 Fluid flow switches
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Vacuum Systems (continued)
9.8 Substrate heaters
7.3 Exhaust scrubbers
7.5 Gaskets - polymer, metal
Vacuum Deposition Components
9.7 Sputtering target fixtures
7.2 Cleaning and handling supplies
Products and
Services
VAT, Inc.
www.vatvalve.com
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6.1 Replacement parts
Note: Only the companies who sell the products on these
two pages are listed.
Vacuum Research Corporation
www.vacuumresearch.com
Repair/Rebuild Equipment
Products and
Services
Vacuum Systems (continued), Vacuum System Components
Companies
GNB Corporation
www.gnbvalves.com
Welch-Ilmvac
www.welchvacuum.com
Verity Instruments, Inc.
www.verityinst.com
VAT, Inc.
www.vatvalve.com
Vacuum Research Corporation
www.vacuumresearch.com
UC Components, Inc.
www.uccomponents.com
Tuthill Vacuum & Blower Systems
www.tuthillvacuum.com
Televac
www.televac.com
Companies
Teledyne Hastings Instruments
www.teledyne-hi.com
Pfeiffer Vacuum
www.pfeiffer-vacuum.com
Osaka Vacuum USA, Inc.
www.asakavacuum.co.jp/en/
Oerlikon Leybold Vacuum USA Inc.
www.oerlikon.com/leyboldvacuum
Nor-Cal Products, Inc.
www.n-c.com
MKS Instruments, Inc.
www.mksinst.com
Kurt J. Lesker Company
www.lesker.com
INFICON
www.inficon.com
GNB Corporation
www.gnbvalves.com
Edwards
www.edwardsvacuum.com
Drivac
www.drivac.com
BellowsTech, LLC
www.bellowstech.com
Angstrom Sciences
www.anstromsciences.com
AMETEK, Inc.
www.ametekpi.com
A&N Corporation
www.ancorp.com
Sumitomo (SHI) Cryogenics of America, Inc.
www.shicryogenics.com
Note: Only the companies who sell the products on these
two pages are listed.
Companies
Products and
Services
Vacuum Deposition Components,
Note: Only the companies who sell the products on this
Vacuum Systems
pages are listed.
Angstrom Sciences
www.anstromsciences.com
Repair/Rebuild Equipment, Supplies/Accessories,
System Monitoring and Control
11.9 Feedthroughs - fluid
10.15 Laser ablation
11.10 Feedthroughs - linear motion
10.16 Low Pressure CVD (LPCVD)
11.11 Feedthroughs - optical
10.17 Low Pressure Plasma Spray (LPPS)
11.12 Feedthroughs - radio frequency
10.18 Metalorganic CVD (MOCVD)
11.13 Feedthroughs - rotary motion
10.19 Molecular Beam Epitaxy (MBE)
11.14 Flanges - blank
11.15 Getter materials
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