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Linköping University
SE-581 83 Linköping, Sweden
www.liu.se
Thin Film and Plasma Characterization of PVD Oxides
Linköping Studies in Science and Technology, Licentiate Thesis No. 1769
Department of Physics, Chemistry, and Biology (IFM)
Ludvig Landälv FACULTY OF SCIENCE AND ENGINEERING
Linköping Studies in Science and Technology
Licentiate Thesis No. 1769
Thin Film and Plasma
Characterization of
PVD Oxides
Ludvig Landälv
2017