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Introduction HV HR CMOS ATLAS
R&D
A.Rozanov 2.06.2014
Reunion CEA-CPPM
HV HR ATLAS CEA-CPPM 2.06.14
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HV-CMOS
• N-well in the P substrat where CMOS
transistors are implanted (for example first stage of the
amplifier)
CMOS! e.g. 1st
stage amplifier
n-well in p-substrate diode
n-well biasing
depletion zone around
nwell: charge collected
by drift
resist~10Ω.cm
A.Rozanov AUW CMOS session 4.11.13
HV CMOS AMS 180nm HV2FEI4 - CCPD
• 2.2x4.4 mm2, 60 colx24 rows, pixel 33x125 um
• CCPD_V1 - tested, irradiated protons and X-rays, test beam
electrons at DESY, not radhard
• common pixel and strips prototype
• CCPD_V2 - tested, irradiated X-Rays
• CCPD_V3 - received, tested electrically, to be irradiated X-rays
June-August 2014, proton irradiations November 2014
• CCPD_V4 - 2.32x2.76mm2 chip 25 May 2014, rad hard 33x125 um
chess or linear patterns, with amplitude or time coding, new pixels
25x125 um with cross sensor-electronics layout, analog pixels
25x350 um without discriminators
• HR option (few kohms cm) end 2014/begin 2015 ????
HV HR ATLAS CEA-CPPM 2.06.14
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HV2FEI4_V2
• Few pixel flavors with enhanced rad-hardness: guard rings,
circular transistors… (different pixel types lead to different
gains -expected-).
55Fe
spectra, unirradiated
“rad-hard”
different gains
A.Rozanov AUW CMOS session 4.11.13
“normal”
Sr-90 at HV=30V
A.Rozanov AUW CMOS session 4.11.13
HV curent vs Dose
•
•
•
After each 100 Mrad apply 2 hours of 70° C annealing
After 5 days room temp annealing the current I=590 nA
After 6 days and one row selection I=465 nA
A.Rozanov AUW CMOS session 4.11.13
HV2FEI4 V2
• After 862 MRad Xray (annealing of 2h at 70° C each
100MRad), after parameter retuning, amplifier gain loss
recovered to 90% of initial value
Relative preampli amplitude variation as function of dose
Recovery at 862
MRad (NOT
900MRad)
A.Rozanov AUW CMOS session 4.11.13
Threshold measurement with S-curve
• Produce S-curve by vary the injection pulse from zero to 1 V. 50%
point on S-curve defines the threshold point.
•
•
•
•
Pixel col2xrow1
Dose= 0.5 Mrad
Thresh= 324 mV
Noise = 63 mv
•
•
•
•
Pixel col2xrow1
Dose= 862 MRad
Thresh=367 mV
Noise = 81 mv
A.Rozanov AUW CMOS session 4.11.13
Injection 1V signal after 862 MRad
• Both RadHard and Normal pixels works
RadHard pixel col2 row 1
Normal pixel col29 row 1
A.Rozanov AUW CMOS session 4.11.13
Normal pixel after 862 MRad
• pix 29x1 Sr90 signals seen, Fe55 only weak Amp
Sr90 signal
Fe55 signal
A.Rozanov AUW CMOS session 4.11.13
RadHard pixels after 862 MRads.
• Sr90 and Fe55 signals seen !!!
• Enable row 1 only, pix col2xrow1
Sr90 signal
Fe55 signal
A.Rozanov AUW CMOS session 4.11.13
HitMap C09
• after noise suppression and single hit in ref plane
A.Rozanov 03.12.2013
Efficiency corrected versus FEI4 column
Threshold vary from 1150 e in column-2 to 750 e in column 12
A.Rozanov 03.12.2013
Priorities HV2FEI4 AMS
• Test CCPD_V3
• Irradiation CCPD_V3 (Xray+protons)
• CCPD_V2 Low temperature before and after
irradiation – does it reduce the noise ?
• Try to tune V2 and V3 to lowest possible
threshold, ~100 mV , 500 e
• If V2 with 500 e possible try CERN beam
HV HR ATLAS CEA-CPPM 2.06.14
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GF 130nm BCDLite CMOS
• Good radiation tolerance up to 800 Mrads
proved on FE-C4 prototypes
• Interesting prototype GF-HV2FEI4-CCPD
under tests
• Standard commercial offer has too low
resistivity
• Prospects for High Resistivity wafer in
discussions, if yes, submission in 2014
HV HR ATLAS CEA-CPPM 2.06.14
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New technologies and chips
• LFoundry 150nm HR – Submission in May 2014 CPPMBonn-Heidelberg
• AMS 350nm High Resistivity 28 April 2014 , mainly
Strips (radiation hardness for pixels????), submission
done in April 2014, Heidelberg-Geneva
• Tower Jazz – transistor irradiation in preparation,
porting the chip ????
• XFAB XT1018 HV SOI 180nm with 100 ohm cm
substrate , ~40 um depletion, Transistors under
irradiation at Bonn, Heidelberg+Bonn+CPPM????
• Large chip in AMS 350 nm, cheap ????
• Large chip in AMS 180 nm with DEPFET Mu3e
HV HR ATLAS CEA-CPPM 2.06.14
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Pixel and Strip ATLAS CMOS R&D
• Number of Institutes: 15
• Number of Researchers: 73
• 2.5 years (from 08.11.2011) of weekly CMOS
meetings Tuesday 17:00 started by BonnBerkley-CERN-Geneva-Heidelberg-Marseille
https://indico.cern.ch/event/289727/
• Strip task force INDICO:
https://indico.cern.ch/event/310295/
HV HR ATLAS CEA-CPPM 2.06.14
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Two goals for pixels
• Middle term 2014-2015: CMOS sensor capacitive coupled to FEI4-B with sub-pixel pitch (actual 33x125 um, options 25x125 um,
50x50 um). To achieve: 99% efficiency, low noise (less than 1%
masked pixels), 25 ns time-walk, decoding of sub-pixel address on
full area 2x2 cm, at least 300 MRad tolerance. Main goal is to
demonstrate a working system. Explore low cost producers (HV or
HR), glue contact as well as producers with higher costs, bumpbonding (with AC in the chip) instead of glue.
• Long term 2015-2019: CMOS sensor coupled to new digital tier
(FE65 or FEI4-C) (capacitive CCPD or low cost wafer bonding with
TSVs) or integrated MAPS in one tier. Radiation tolerance up to
1000 MRad. Low cost, massive and reliable CMOS production
facilities.
HV HR ATLAS CEA-CPPM 2.06.14
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List of pixel tasks for middle term
2014-2015
•
CMOS Pixel Sensor: Design and fabrication of full FE-I4 size
(or half size) HV-CMOS sensor and HR-CMOS to be coupled to
FE-I4 chips. This includes survey of available processes and
TCAD simulations of the CMOS sensors.
• Coupling: Prototyping of coupling methods. Chip-chip, waferwafer, AC or DC. This includes a survey of available foundry
capabilities and costs. This includes investigation of TSV.
• Irradiation: Measurement and study of radiation hardness,
charge collection efficiency and in-time collection efficiency of
available CMOS prototypes (neutrons, X-rays, protons).
• CMOS Pixel Module: Development of module concept for I/O
and power interconnect and how to include control of the
CMOS part. This includes mechanical aspects of power and
HV HR ATLAS CEA-CPPM 2.06.14
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cooling.
Continuation of list of pixel tasks for
middle term 2014-2015
• Testing: Electrical and source tests in the lab, test-beams DESY, SLAC and
CERN, PCB and test system developments, software DAQ and monitoring
• G4 Simulation: Simulation of benefits of CMOS solution for pixels. What
CMOS pixel size is needed? LoI simulations proved interest of 25x150 um
pitch for inner layers with sensor thickness of 150 um. We need
simulations with reduced charge sharing with different ranges of sensor
thickness 10-100 um with digital clustering without analog charge pixel
weighting. Choice between 33x125 um and 25x125 um (merging some
rare combinations) to be simulated. Option of 50x50 um to be simulated
for applications in disk and very forward tracking. Possible defects in
charge collection efficiency and sub-pixel encoding should be simulated.
For longer term one should investigated does sub-pixel encoding of
25x125 um pixels into 25x25 um bring any benefit with realistic sensor
thickness.
HV HR ATLAS CEA-CPPM 2.06.14
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List of pixel tasks for long term
• Continuation of middle term tasks for low
cost and large scale reliable production.
• Digital input FE: New digital tier chip FE65 or
FEI4-C optimized to CCPD or low cost 3D
wafer integration
• Explore CMOS sensors in 65 nm technology
with small pixel pitch 25x25 um
• Full MAPS: Prototyping of fully monolithic
concepts. First small format, later full size.
HV HR ATLAS CEA-CPPM 2.06.14
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List of strip tasks for middle term
• StripSensor: Design and prototyping of large format stripappropriate structure on 8” wafers. Either using stitching,
post processing, or multi-chip pick and place assembly. Can
be MAPS or diodes on high resistivity substrate.
• G4 SimuStrips: Simulation of benefits of CMOS solution for
strips. Number of hits problem (N 3D hit vs. 2N 2-D hits).
Impact of mass. Z-position measurement precision needed
• Irradiation, Module, Testing tasks similar to Pixel tasks, but
may need specific additional manpower
• PassiveStrips: Should we include in this ATLAS RD passive
CMOS strips ???
HV HR ATLAS CEA-CPPM 2.06.14
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Coupling
Irradiation
Testing
CMOS Pixel Module
CMOS Strip Module
B
B
C
B
A
B
B
Bonn
A
C
A
C
A
-
-
CERN
A
C
B
A
A
B
Geneva
B
A
B
A
A
Heidelberg
A
A
B
B
A
Marseille
A
C
C
A
A
A
-
A
B
-
-
-
B
C
A
C
A
C
-
-
-
A
A
-
A
A
C
HV HR ATLAS CEA-CPPM 2.06.14
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-
G4 Simulation
Full MAPS
CMOS Strip semsor
Berkley
Digital input FE
CMOS PixelSensor
Matrix of Interests
23
CMOS Strip semsor
Coupling
Irradiation
Testing
CMOS Pixel Module
CMOS Strip Module
G4 Simulation
Digital input FE
Full MAPS
Goetingen
CMOS PixelSensor
Matrix of Interests
C
B
A
B
-
Genova
A
Prague
A
C
B
A
Saclay
B
B
A
DESY
A?
Glasgow
A
A
A
-
-
A?
HV HR ATLAS CEA-CPPM 2.06.14
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A?
A?
C
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CMOS Strip semsor
Santa Cruz
A?
A?
Liverpool
A?
A?
Barcelona
A?
Liubliana
B?
A?
A
A?
HV HR ATLAS CEA-CPPM 2.06.14
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Full MAPS
Digital input FE
G4 Simulation
CMOS Strip Module
CMOS Pixel Module
Testing
Irradiation
Coupling
CMOS PixelSensor
Matrix of Interests
A?
B?
A?
B?
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Relations with beyond ATLAS efforts
•
•
•
•
•
•
RD50 can contribute on sensor part of CMOS, complementary to our ATLAS RD
effort on micro electronics. Contribution: sensor simulation, sensor design, sensor
damage mechanisms, HTCT measurements. Example: explain HV current behavior,
recommend solutions. Our chip designers should develop horizontal contacts with
RD50 community.
RD53 can contribute to new digital tier compatible and optimized for CMOS pixel
sensors. For example: multiple capacitive pads receivers of CCPDs. We should take
active part in RD53 CMOS digital input part.
Analogue design of the CMOS tier or integrated MAPS. Design community is
available in RD53, but outside of the approved RD53 scope. If RD structure
outside ATLAS is needed: either increase the scope of RD53, or new RD
AIDA-2 Expression of Interest Bonn-Marseille-Heidelberg-CERN-Geneva and many
other institutes: Genova-Barcelona-Glasgow-Saclay-Liverpool-CERN-LCD-KITMilano-Munich-Oxford-RAL-Sheffield. Working group creation agreed for AIDA-2
proposal with 3 tasks: Simulation, Sensor Development, Hybridization (~.7 MEuros
AIDA-2+50% national matching)
National projects (Germany, France, Suisse, Italy etc)
Other EU 2020 projects ???
HV HR ATLAS CEA-CPPM 2.06.14
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Full MAPS efforts
• IBM 130nm based on Tripple Well (T3)
structure full MAPS by LBNL in 2013
• ESPROS High Resistivity in 2013 by Bonn
• Several other High Resistivity full MAPS proto
in four foundries by Bonn
• To be continued for long term, but difficult to
expect pragmatic solutions in middle term
HV HR ATLAS CEA-CPPM 2.06.14
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Organization
• TWiki site including proposal:
https://twiki.cern.ch/twiki/bin/view/Atlas/HV
HRCMOSUpgrade
• Share point site (very recent):
https://espace.cern.ch/atlas-pixel-upgradeelec/HVHR-CMOS/default.aspx
HV HR ATLAS CEA-CPPM 2.06.14
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