ZEISS Process Gas Analyzer Inline Contamination Control for Pressures < 10 -5 mbar The ZEISS Process Gas Analyzer is a compact, This way, a high robustness against corrosive highly sensitive ion trap Fourier Transform gases or hydrogen and therefore a significantly mass spectrometer, ideally suited for inline contamination control. longer up-time and life-time than common mass spectrometers is obtained. The data is measured in real time. With detection limits down to the 10-15 mbar The modular structure allows it to be tailored to your needs. It is an ideal tool for inline range or below, every contamination is contamination control in all kinds of processes detectable. The excellent performance where the working pressure is below 10-5 surpasses typical Quadrupole-RGAs by far. mbar. Due to its compact design the PGA can Owing to its robust design and the use of easily be integrated in your UHV process metal electrodes as detector, the analyzer chamber. does not contain any fragile electron multipliers or detectors. Residual gas analysis of water at a background pressure of 10-8 mbar Carl Zeiss SMT GmbH 73447 Oberkochen Germany [email protected] www.zeiss.com/smt Possible Applications Technology The Process Gas Analyzer is a high performance • Fourier-Transform ion trap. Ions can be Semiconductor Processes (Etching, PVD, Implantation, …) selectively accumulated and measured without the use of electron multipliers. It allows selective • Monitoring of outgassing wide mass-range storage and excitation of • Monitoring of cleaning processes independent ion species. The measurement is non-destructive, the same ion population can be measured repeatedly, further increasing sensitivity and dynamic range. There are two possible ionization methods, EI (standard) or Plasma Ionization (optional). Outgassing of hydrocarbon contaminations of teflon parts Parameter Performance Limit of Detection below 10-15 mbar Operation Pressure < 10-5 mbar Measuring Speed 200 ms Mass Resolution m/ m>> 2000 Customer Benefit Down to a few thousand molecules measurable In-line measurements for industrial UHV processes Real time measurement for fast processes High accuracy molecule detection Mass Range Up to 2000 amu Detect analytes from atoms to complex molecules Dimensions < 35x14x25 cm In-line capability, flexible adaptation, modular