EBSD AZtec EBSD Acquisition and Analysis ...the ultimate EBSD System
AZtecHKL EBSD EBSD Acquisition and Analysis ...the ultimate EBSD System AZtecHKL Intelligent design EBSD Acquire and solve at the fastest speeds AZtecHKL AZtec At a glance... AZtecHKL unravels the complexity of EBSD Fast Flexible • An intelligent optimisation process - concentrate on • Work the way you want - AZtec incorporates • Highest speed of acquisition and real-time display Integrated Developed by the market leader with global customer support and over 40 Accurate years experience in nanoanalysis, AZtec meets the ever more challenging • Powerful new AZtecTru-I solver engine gives the • EBSD and EDS integration, combines Tru-Q AZtec® couples Oxford Instruments’ vision and expertise with real customer needs to create the ultimate materials characterisation system. AZtec combines speed and accuracy of results for routine analysis, with the flexibility and power required for applications that push the frontiers of the EBSD technique. requirements of analysis at the nanoscale. AZtec integrates AZtecHKL acquisition and analysis software with the Nordlys EBSD detectors to create a powerful and versatile solution for EBSD. results and not how to collect them best ‘out of the box’ results in real-time • Advanced manual settings for expert use • High hit rates, no compromise in data quality automated features and advanced manual settings Tru-I TM TM and for phase identification, plus combined EDS and EBSD real-time mapping Innovative • Includes many powerful and intuitive tools for solving the most difficult samples 2 AZtec EBSD AZtec EBSD 3 ACCURATE AZtec tec AZtec Tru-l Indexing Tru-I Robust, reliable indexing Intelligent band detection Nordlys EBSD detectors and the Tru-I indexing engine ensure that the best quality patterns are collected and solved accurately, reliably and automatically. AZtec implements an intelligent band detection routine that determines which of the detected bands should be used in the indexing. Collect the high quality patterns which are Dynamic background correction enables pattern essential to obtaining accurate EBSD data. by pattern contrast optimisation. • AZtec has an optimised system design, for the • Excellent quality patterns can be achieved from all collection of excellent patterns, even at high speeds materials or high binning • This includes multiphase materials, where the • The signal strength and noise are quantified and can phases can have significantly different atomic be used as a measure of pattern quality numbers • Raw EBSP • Intelligent band detection uses both the average intensity of the band and its position in the area of interest • Improves the percentage of correctly indexed points, especially for materials exhibiting indistinct bands or where pattern quality is low Patterns from an intermetallic phase in a stainless steel. With a tetragonal structure and so a large lattice parameter, the bands are narrow and are more difficult to detect accurately. AZtec automatically detects the bands correctly. Dynamic background correction automatically masks screen imperfections. Dynamic Background Corrected Magnetic Field Correction for solving distorted patterns A B C D In some applications, high magnetic fields from the SEM lenses distort the electron backscattered diffraction patterns. This distortion curves the Kikuchi bands and shifts the pattern centre, but can be corrected automatically using AZtec. • The correction straightens the bands and corrects the pattern centre so patterns can be correctly solved Raw diffraction patterns have weak diffraction contrast... The dynamic background correction automatically compensates for changes in acquisition conditions. • A dipole correction described in Oxford Instruments’ US patent 7442930B2 is applied 4 AZtec EBSD These patterns illustrate (A) an undistorted pattern from Si, (B) an EBSP distorted by the high field lens, (C) the poor fit between distorted pattern and solution and (D) a corrected pattern and solution. AZtec EBSD 5 ACCURATE AZtec AZ tec Tru-I Tru-I Superior accuracy Distinguish similar crystal structures The EBSD indexing routine is critical in achieving accurate results - AZtec uses a new method, Class Indexing. AZtec’s superior indexing routine achieves excellent resolution at grain boundaries, as shown in the steel map below. AZtec correctly identifies phases with similar crystal structures by comparing band width. This example shows a Pt and Ni weld from the central electrode tip of an automative spark plug. Pt and Ni have the similar crystal structure, and the difference in lattice parameter is only 9%. Class Indexing examines groups of four bands, which then form the foundation of the indexing routine 8 bands Pt Ni Crystal system Cubic High (m3m) Cubic High (m3m) Space group 225 225 Lattice parameter a=b=c=3.924Å a=b=c=3.57Å Ni Map Table shows that Pt and Ni are almost identical in crystal structure. • 25 µm the correct solution can be achieved even if one or more detected band is not included in the list of reference Duplex steel showing four phases, analysed using AZtec. The indexing is robust and delivers a comparable result using either 12 or 8 bands in the indexing routine. 12 bands Pt Map This method is robust and Solve the most difficult samples Ni and Pt X-ray maps, collected simultaneously with as EBSD, show the distribution of Pt and Ni in the sample corresponding to the phase map below. reflectors • The system is less sensitive Traditional Indexing to the operator selecting With Tru-I the number of bands and reflectors Iron fcc 25 µm 100 µm 100 µm Iron bcc sigma Chi 6 AZtec EBSD Traditional indexing cannot distinguish between the two phases. Sorting solutions based on differences in band width to see detail of the two separate phases and the mixed region in the weld. AZtec EBSD 7 FAST AZtec AutoCal Faster, more accurate results... automatically AZtecHKL is intelligent EBSD. Change acquisition conditions and still collect quality EBSD patterns at the click of a button. AZtecHKL corrects for changes in acquisition conditions automatically and in real-time. Collect accurate data routinely under a full range of working distance and detector insertion distance – without recalibrating • AZtecAutoCal is a sophisticated geometric correction which works seamlessly and automatically to calculate calibration parameters based upon changes in geometry • Compensates for changes to the projection parameters resulting from beam movement at low magnification • The system is quick and easy to set up, whatever the user experience level 10 mm WD Tools to optimise the system with ease, while including all the flexibility needed. 15 mm WD Optimising your system for data acquisition is easier and more automated than ever before 20 mm WD Pattern collected from Fe bcc at three different Working Distances (WD). The change in geometry is automatically compensated for, and the patterns quickly solved. • Automatic detector exposure • Intelligent dynamic background • Detector control from within the user interface • Change SEM conditions – kV, probe current, magnification, or stage tilt – without recalibrating, Focus on your results rather than your acquisition and still collect an optimised EBSP which is correctly solved 8 AZtec EBSD AZtec EBSD 9 POWERFUL AZtecSynergy PhaseID Power of integration AZtec AZ tec AZtecSynergy combines AZtecEnergy and AZtecHKL to create the ultimate materials characterisation system with simultaneous EBSD and EDS analysis. Simultaneously collect the EDS spectrum and EBSD pattern from a single point on the sample, for accurate phase identification. • EBSD and EDS are integrated in a single interface with no compromise in functionality or productivity • View EDS and EBSD data simultaneously at up to 870 points per second • View and optimise the acquisition parameters for both detectors from a single window • Unknown phases can be identified from the stored patterns and spectra once an EBSD / EDS data set • Powerful and fast phase search to identify candidate phases based on chemical information • Accurately determine the phase from a list of candidate phases, using Tru-I algorithms • Save spectra and EBSD patterns with reference image is collected An EBSP and X-ray spectrum are collected simultaneously. The X-ray quantification is used to identify candidate phases. Simultaneous EBSD and EDS mapping, data acquired and displayed in real-time and at the fastest speed. The correct phase is identified from the candidate list using the EBSP. The PhaseID navigator combines the EDS and EBSD information in order to identify an unknown phase. 10 AZtec EBSD AZtec EBSD 11 INTEGRATION EDS AZtecSynergy Integrated EBSD and EDS mapping AZtecSynergy provides a true and complete characterisation of the sample in real-time. • Easy to use, with no complex switching between techniques • A single interface is used for data collection • Use EBSD map as a reference image for EDS collection • Stored data can be interrogated offline Powerful integration of EBSD and EDS • Unleash the power of the X-Max • View ALL of the data in real-time N SDD and Nordlys EBSD detectors • EBSD patterns are indexed as acquired to create orientation and phase maps together with element maps • Change EDS parameters or EBSD parameters and see the impact on the results immediately Ni Phase Map AZtecSynergy is optimised so there’s no loss in performance when the EBSD and EDS data are collected simultaneously. • View and report EDS and EBSD maps simultaneously Ni Map W IPF Map W Map EDS and EBSD maps from a Tungsten Alloy. Data were collected simultaneously at 870 Hz and 99% hit rate. The EBSD and X-ray maps were displayed in real-time. 100 µm EBSD detector was a NordlysMax2, the EDS detector was an X-MaxN 80. 12 AZtec EBSD AZtec EBSD 13 FLEXIBLE AZtec AZ tec Re-Analysis Orientation Imaging Process post acquisition and offline Flexible imaging AZtecHKL re-analysis is completely flexible: AZtec, coupled with any Nordlys EBSD detector, is a powerful solution for all EBSD applications. • Optimise solver settings, or add additional phases, and re-analyse the data offline • It is not necessary to know all the phases in the sample before acquiring data In this example, secondary phases in the steel are missed when the data are first collected. • The Nordlys detectors can incorporate up to 6 forescattered detector diodes • AZtec enables independent image acquisition from each diode • Flexibility to customise and mix any combination of these images The data stored with the maps can be interrogated offline and these unknown phases identified. Re-analysing the dataset, including the additional phases, completes the map – without returning to the SEM. 14 AZtec EBSD Orientation contrast image from a polished Gabbro, formed by mixing the two lower forsescattered images. 250 µm The different grain orientations within the rock are visible. In addition, twining can be seen in some of the larger grains. Images from each of the six diodes can be viewed and controlled independently. This maximises the sample detail visible from these images. AZtec EBSD 15 INNOVATION AutoLock AZtec AZ tec AZtecHKL Automated drift correction Operationally transparent AZtecAutoLock is an integrated drift correction tool that corrects EBSD and EDS data simultaneously to deliver the most accurate maps. AZtecHKL includes all of the sophisticated tools required to solve the most challenging EBSD applications and samples. • Unique blend of predictive and reactive drift correction routines • Corrects drift on tilted and untilted samples • Essential for high magnification nanoscale EBSD • A map calculator tool gives complete control of the analysis area and the step size, and shows the predicted time to complete the data acquisition Map calculator tool. Flexibility to set the step size or the resolution for a mapping grid • Ensure the sample microstructure is sufficiently sampled • Important for grain characterisation studies • A calibration refinement tool can verify and optimise the calibration. • AZtec enables the collection of more data, in more detail • up to 4k x 4k EBSD maps • up to 8k x 8k images High resolution inverse pole figure map of a bent steel. A specific area of interest can be defined using the freehand drawing tool. This will save acquisition time and reduce sample drift. Map A Without AutoLock Map B With AutoLock Map A shows an IPF map overlaid onto the electron image. The two images do not overlap exactly because the image was drifting as the map was being collected. Map B was collected from the same sample area, with AZtecAutoLock drift correction switched on. Using AutoLock the electron image and the map are now correctly aligned. AutoLock ensures you collect the most accurate maps every time. 16 AZtec EBSD AZtec EBSD 17 FLEXIBLE USABILITY Power of AZtec Different laboratories have different requirements, and different analysts have different levels of experience... Work the way you want to. Each navigator step is accompanied by Step Notes, incorporating on-screen help and images Detailed analytical conditions can be saved in Multiple reporting options User Profiles and reloaded with ease • Report directly from the AZtec interface • Export your data in the resolution and format • Load the appropriate User Profile to adapt your analytical settings in seconds Step Notes are associated with each stage of the interface. These are easily tailored to include specific instructions or operating procedures. • Link User Profiles to specific sample types or applications you need • Comprehensive list of report templates for specific applications Work efficiently while your data is acquiring • AZtec is truly multi-tasking • Write reports or interrogate data during acquisition Step Notes can be tailored to incorporate specific Standard Operating Procedures (SOPs) into the AZtec interface • Ideal for novice or infrequent users, or those following a procedure • Assist all your users, for all experience levels • Step Notes can also be used to describe other analytical considerations, such as sample preparation or optimum SEM conditions 18 AZtec EBSD Effectively manage multi-user environments with user profiles. Store a range of parameters, including, phase selections, solver and camera settings, and geometry. AZtec EBSD 19 OISERVICE Global Customer Support Accredited, experienced, responsive, dedicated Oxford Instruments recognises that your success requires not just only world-class products, but also world-class service and support. Our global service team is renowned for delivering outstanding service to customers and microscope vendors: • Hands-on and theory classroom training • On-site training tailored to your specific needs • Web-based courses and training videos • Consultancy and application support • Multi-layered maintenance and service contracts help desk remote assist training maintenance consul tanc y hardware upgrades parts & acces sories layered contracts application advice software updati visit www.oxford-instruments.com/EBSD The materials presented here are summary in nature, subject to change, and intended for general information only. Performances are configuration dependent. Additional details are available. Oxford Instruments NanoAnalysis is certified to ISO9001, ISO14001 and OHSAS 18001. AZtec and Tru-I are Registered Trademarks of Oxford Instruments plc, all other trademarks acknowledged. © Oxford Instruments plc, 2013. All rights reserved. Document reference: OINA/AZtecHKL/Jan2013. ng
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