Impedance Standard Substrate (Pitch: 50 – 75 um, Configuration: Ground-Signal-Ground) P/N: 138-356, S/N: 138-356 CASCADE MICROTECH 899-118 2006 Key to the 138-356 Map Substrate specifications: Material: Alumina; Thickness: 10 mils (254 um); Dielectric constant: 9.9 Note: Ensure the bias supply is turned off during calibration. Applying bias to the probe during calibration could cause the resistance of the load to change. Thru Open Load Thru delay: 0.5 ps Length: 135 um DC accuracy: +/- 0.3 % Impedance: 50 Ohm (Nominal) Note: Thru and Verification line lengths are signal conductor edge-toedge dimension. Short Precision 50 Ohm Load Note: For optimum calibration accuracy only the Red marked load standards should be used. Verification Lines ID ps um K1 0.5 135 K2 0.5 135 K3 0.5 135 K4 0.5 135 K5 1.1 215 K6 1.4 250 K7 1.9 315 K8 2.3 365 K9 2.7 420 K10 3.2 485 K11 3.8 570 K12 4.5 655 ID L1 L2 L3 L4 L5 L6 ps 1 3 7 14 27 40 um 200 450 900 1800 3500 5250 65 um Alignment Marks Note: ISS must be mounted on absorber material (such as ISS Holder PN 116-344) during calibration. All of the above specifications are based on an overtravel (downward movement of probe after initial touchdown on the substrate) of 2550 µm for Infinity style probes. This amount of overtravel can be set before calibration on the Impedance Standard Substrate (ISS) using the alignment marks (allows precise setting of probe separation and overtravel). Figure 1 shows that initial contact with the edge of the probe tips should be made at reference plane X. The desired overtravel and thus skate (forward movement of probe tips after initial contact with substrate) is then achieved by adjusting the Z height on the positioner to move the edge of the probe tips to reference plane Y. This can also be seen from the photographic images shown in Figure 2. Initial contact Figure 1: Alignment marks Final contact Figure 2: Images showing correct alignment and placement of probe tips of Infinity style probes. Calibration Coefficients –Depending on the probe style, configuration and pitch, different levels of performance can be expected when using this ISS. Please refer to the probe specifications for performance limits. Infinity Pitch 50 75 WG-GSG C-open L-short Coaxial-GSG L-term Please refer to values shipped with your probe C-open L-short L-term 5.9 16.5 7.8 6.7 17.0 7.7 Note1: Units for C-Open = fF, L-Short = pH, L-Term = pH Document PN: 138-369 rev A Please see the Cascade Microtech web site for further information on this and other ISS: http://www.cmicro.com. Cascade Microtech, Inc., 2430 NW 206th Ave, Beaverton OR 97006, USA Tel: (503) 601-1122; Japan: +81 3 5478 6100; Europe: + 44 1295-812828; Singapore: +65 6873 7482 E-mail: [email protected]; Japan: [email protected]; Europe: [email protected]; Singapore: [email protected]