1. technology and computing

Precision
Optics
Coating systems that think for themselves
Coating systems
that think for themselves…
Achieve maximum yields for even the most complex optical stack designs using
“real time re-optimisation software”. The spectrum recorded after each layer of
the stack is deposited is analysed in just a few seconds and in case of significant
deviations new thicknesses and target spectra for the remaining layers are
calculated and adjustments made to the rest of the coating process automatically.
›› Recover wayward processes
›› Achieve enhanced yields
…so you can find time for the next task!
Turn your production vision
into reality using Evatec’s
knowhow in optical thin film
production.
We deliver hardware, processes and the
most advanced control systems ever to
manage development and production of
complex optical coating processes.
Develop your process with ease
Use our integration package to take you all the way from
initial thin film design through layer monitoring strategy and
recipe generation on the coater itself.
Run your process with confidence
Our systems will make “real time” adjustments throughout
the coating process to reduce errors and maximise yields.
Process
Start
1. Layer
deposition
The
reoptimisation
loop
2. Check
spectrum
3. Recalculate remaining
layers or continue
without changes
Optical Thin Film Powerhouse
Process
End
Thin Film
Design
Monitorin
Strategy
A choice of coating technologies
Choose from evaporation, PIAD, sputter or PECVD. You can be confident that we
use all our own platforms, source designs and software systems to ensure perfect
integration of hardware, sources and system operation. Our process specialists
are on hand to help you choose the best technology for your substrate type and
application and run sampling.
Thermal Evaporation
Standard and custom designs for
complex substrate geometries and a
large variety of coating materials
E Guns
From 1 to 64 pocket, single or co-evap,
for dielectrics, metals and TCOs
PIAD
Improved film qualities, lower process
temperatures and shorter process times
Sputter
Metals, dielectrics and TCOs.
Closed loop reactive processes.
Co-sputter for complex materials
ng
y
Recipe
Generator
Coa
Exec
A choice of platform types
With over 1400 systems in production around the world, the BAK evaporator
remains a firm favourite for production of optical coatings, but its now available in
more variants than ever with custom solutions for extended throw, load lock and
split chamber. Sputter is now well established for high quality optical coatings
and we offer the MSP dedicated batch tool with a proven track record in optics
production or the Radiance sputter tool with cassette to cassette handling for the
ultimate in automation.
BAK Evaporators
MSP Sputter
Platform sizes from 0.5 to 1.4m.
Evaporation, PIAD and Ion Plating.
Outstanding optical and mechanical
stabilities, Process repeatabilitiesT50
± <0.2%*.
Radiance (cassette to cassette)
Custom engineering
Integrate sputter, PECVD and plasma
etch processes on a single tool for
precision optics.
From custom “ flip” systems to robot
substrate handling and cassette to
cassette solutions.
*For Fabry Perot filter, T50, falling edge 567nm, 6 non consecutive runs.
oating
ecution
Mass
Production
Fast track from development to production
“Optics Toolbox” integrates all steps from the first thin film design using industry
standard design packages like Filmstar™, Essential Macleod™ and Optilayer™
all the way to the final coating in one seamless series. The choice is yours quartz or broadband optical monitoring, evaporation or sputter.
Optics Toolbox
From theoretical design to final recipe with
ease. Avoid transcribing errors between
design steps & reduce development times
Quartz Monitoring
Single or 6 way quartz with increased
sampling rates for termination accuracy
Optical Monitoring
UV to IR, monochromatic or
broadband, test glasses or direct
substrate measurement
Optical Pyrometry
Outstanding control of temperature
distribution across coating zone for hot
IR coating processes
Hardware | Processes | Advanced Control Systems
The Optical Thin Film Powerhouse
About Evatec
Evatec offers complete solutions for thin film deposition and etch
in the optical and semiconductor markets. Evatec engineers
are able to offer practical production advice from R&D to
prototyping and mass production. We recognize that no single
technique offers the answer to all problems. With a technology
portfolio including standard and enhanced evaporation as well
as sputter, we are ready to offer sampling services and custom
engineering to meet our customers individual needs.
We provide sales and service through our global network
of local offices. For more information visit us online at
www.evatecnet.com or contact our head office.
Evatec Ltd.
Lochrietstrasse 14
CH-8890 Flums
Switzerland
Tel: + 41 81 720 1080
Fax: + 41 81 720 1081
[email protected]
www.evatecnet.com
Product descriptions, photos and data are supplied within the brochure for general information only
and may be superseded by any data contained within Evatec quotations, manuals or specifications.