High Power and High Efficiency Ka Band Power Amplifier Salah Din, Mike Wojtowicz, Mansoor Siddiqui Northrop Grumman Corporation Abstract — A 36 W Ka-band MMIC power amplifier using 0.2 um gate GaN HEMT technology is presented. The power was measured across 27 to 30 GHz with a minimum 30% PAE. A peak power of 40 W at 27 GHz was demonstrated. The MMIC area is a compact 13.5 mm^2 and uses 10.67 mm device periphery in the output stage. This demonstration is a significant improvement in performance over current Ka-band MMIC amplifiers. (a) Index Terms — Gallium Nitride, MMIC, PAE, Power Density, power amplifiers. I. INTRODUCTION Ka band is in use for many applications including point to point communications, Satellite uplink terminals, and Electronic Warfare. The most demanding requirements in terms of performance and cost of these platforms are imposed on the transmitter MMICs. Good power added efficiency (PAE), output power (Pout), die size (power density) as well as reliability of these MMICs directly impact these requirements. Recent published results citing a steady progress in these parameters at Ka band are cited [1-6]. These use GaN as well as GaAs. Described in this paper is the design and measured results of a 2-stage Power Amplifier using the Northrop Grumman Aerospace Systems (NGAS) 0.2 um GaN HEMT technology that establishes a new standard of performance achieved by a single MMIC. II. GAN PROCESS OVERVIEW The NGAS AlGaN/GaN GAN20 process was used for this design. The AlGaN/GaN HEMT epitaxial layers were grown on 100mm 4H-SiC substrates. Typical 2 dimensional electron gas (2DEG) densities and room temperature mobilities are 1.1x10^13 cm^-2 and 1400 cm^2/V-s respectively. Devices are fabricated with a 0.2 um T-gate, a 2 um source to drain spacing and SiN passivation. Peak transconductance, calculated from the DC transfer curve, and the cutoff frequency (fT) extracted from s-parameters are 300 mS/mm and 65 GHz respectively. Maximum drain current (I max) is 1 A/mm and typical three terminal breakdown is >90 V. Maximum operating drain bias of 28 volts resulting in power densities (Pout/total gate periphery) up to 4 W/mm. Wafers are thinned to 100 um, through substrate vias formed and the (b) 4X 8f660 16X 8f660 Fig. 1. (a) Microphotograph of Ka band PA.(b) Schematic of Ka band PA. backside plated with 3 um Au. The backside metal is designed for compatibility with eutectic bonding. III. CIRCUIT DESIGN AND ANALYSIS The design goals for this amplifier were maximum die area of 14 mm^2, Pout >30 Watts with greater than 28% PAE from 26 to 31 GHz. The die area constraints drove the selection of topology as well as device selection and layout. This circuit’s junction temperature was also allowed to accommodate nonspace use (terrestrial and airborne). The design started with device selection and loadpull analysis. The output loss was 978-1-4799-8275-2/15/$31.00 ©2015 IEEE 30 Small Signal Gain (dB) 25 Gain, IRL, ORL (dB) 20 Stability Factor 15 s21(dB) 10 s11(dB) 5 s22(dB) 0 S11 -5 -10 Output RL (dB) -15 S22 -20 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 Frequency (GHz) Input RL(dB) Pout (dBm) Gain (dB) Fig.3. Simulated large signal performance at 29.5 GHz; Po>45.9 dBm and PAE~38% at 2.5 dB compression. initially estimated to be 0.6 dB loss. With a power density of ~3.4 W/mm (design for PAE), the output stage device periphery was selected to be 10.67 mm. Another constraint to selecting the unit device size was a need to achieve > 9.5 dB gain at 30 GHz. Based on the power and gain, we selected a binary corporate topology combining 16, 8f660 um (8x82.5 um wide gate fingers) devices. The device model was derived by scaling an available 8f600 um model. Next a large signal load pull contour plot confirmed the initial assumptions of Pout ranging from 3.4-4 W/mm with PAE ~48-49% at 30 GHz at the 660um unit cell level. This was with a drain of 28 volts and a class A/B bias Idq of 200 mA/mm. The next task was to determine the stage2 to stage1 drive ratio. PAE was a driving requirement so a 4:1 ratio was adopted. This large ratio usually negatively impacts the AM/PM distortion unless special care is taken in the design. The output matching circuitry also had to accommodate the drain current and so the metallization was increased to insure low conductive loss. Band pass/low pass structures were used to match the output impedance. The inter-stage, as always, Pout (dBm) Fig.2. Simulated Small Signal response of Amplifier 48 47 46 45 44 43 42 41 40 39 38 37 36 35 34 42 41 40 39 38 37 36 35 34 33 32 31 30 29 28 Pout PAE 26 27 28 29 Max PAE% Fig. 4. Small Signal performance measured on-wafer 30 Frequency (GHz) Fig. 5. Max Pout and Max PAE variation over Freq. measured on wafer. was the most difficult part of the design since mutual coupling was extensive in this dense MMIC. Low frequency terminations were implemented at the input and output which aided the suppression provided by the bias networks. ADS was used in the design and Sonnet EM simulation software was used extensively. The final schematic and micro photograph are shown in Figure 1. The resultant simulations are shown in Figure 2, Small signal gain was ~18-20 dB for this 2 stage design, and projected power was >/= 45.9 dBm, PAE>35% at 2.5 dB compression Figure 3. The drain voltage assumed was 24-28 volts. The AM/PM simulation showed 1.5 dB/deg. max. This would insure excellent linearity under drive. This was because all the matching networks selected produced minimum phase shift when terminating them with varying source and load impedances. 978-1-4799-8275-2/15/$31.00 ©2015 IEEE TABLE I RECENT PUBLISHED KA BAND BENCHMARKS Ref # Process Technology # Stages 44 42 40 38 36 34 32 30 28 26 24 22 20 18 16 14 12 10 8 6 4 2 0 Gain (dB) 29 34 29 27 28 30 26-30 24 22 25 13 13 28 19-22 3 3 3 2 2 3 2 GaAs GaAs GaN GaN GaN GaN GaN Power (Watts) 4.27 3.8 5 5 4 6-11 36-40 27 Ghz 30 Ghz PAE% Pout (Watt) [1] [2] [3] [4] [5] [6] This work Freq. (GHz) Freq=26 Freq=27 Freq=28 Freq=29 Freq=30 0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6 1.8 2 2.2 2.4 2.6 Pin (Watt) Fig.6. Pout (Watts) vs. Pin (Watts) of Ka band PA measured on wafer IV. MEASURED RESULTS The circuit, was measured on-wafer. Using pulsed measurement system, a small signal gain of >18 dB from 2630 GHz was measured with an input Return Loss of >7 dB and an output return loss of >6 dB, Figure 4. The MMIC was biased at 28 volts. Pin vs. Pout and PAE measurements were taken on the onwafer pulsed power station. Maximum Pout and max PAE are shown across a wafer in Figure 5. As can be seen, most sites exceed a Pout of 34 Watts and almost all sites exceed 30 % PAE. The results of a typical top performing site are shown in Figure 6 where the different curves represent frequencies from 26-30 GHz. It can be seen that a Pin of 27 dBm achieves greater than 30 watts Pout with about 18 dB gain and PAE of >32% across the band. Plotted another way is Figures 7a,b where Pout and PAE are plotted against power in Watts. Measurements show that Power of > 36 Watts (45.5 dBm, >3.4 W/mm) and PAE of >32 % across the 26-30 GHz band with 31 dBm Pin. This we believe is a new record in Pout and PAE achieved from a single MMIC. The peak powers PAE (%) 32 36 30 20 24 30-34 32 Die Area (mm^2) 16.3 9.9 4.8 14.4 --5.6-11.7 13.53 FOM (Pout/Area) W/mm^2 0.261 0.383 1.04 0.347 --1.07-0.94 2.66-2.95 44 42 40 38 36 34 32 30 28 26 24 22 20 18 16 14 12 10 8 6 4 2 0 Freq=26 Freq=27 Freq=28 Freq=29 Freq=30 0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6 1.8 2 2.2 2.4 2.6 Pin (Watt) Fig.7. PAE (%) vs. Pin (Watts) of Ka Band PA measured on-wafer achieved are 26-29 GHz with >/=40 watts, with the peak deliverance of ~43 watts at 27 GHz. The PAE at that point is still > 30 % and reaches a peak PAE of >36% while still delivering >40 Watts. These numbers represent the state of art from a single MMIC at these frequencies. Accounting for the output matching loss, this represents >4.2 W/mm from 26-29 GHz. The drain bias was set at 28 volts and dialing it down to ~24 volts should increase the PAE by 3-4 % while decreasing the Pout by ~0.3 dB. No optimization of the gate voltages were attempted for this first on wafer measurement. Referring to Table1 where various previous works are noted, a Figure of Merit (FOM) that is employed by users, W/mm of die area, is included. Here, using 36 Watts from 2630 GHz, a FOM of 2.66 was achieved. Using 40 watts, from 26-29 GHz, a FOM of >2.95 was achieved. A preliminary thermal analysis was conducted. The space qualification junction temperature is 200 deg. C which translates to >1e6 Hrs MTTF. The junction temperature with base plate temperature of 50 deg C climbs to 208 degrees, barely reducing the projected lifetime, and 239 degrees at a baseplate of 70 degrees C. This still amounts to >10 year MTTF. This assumes copper diamond heat spreader and eutectic bonding of the MMIC on it. 978-1-4799-8275-2/15/$31.00 ©2015 IEEE V. CONCLUSIONS AND ACKNOWLEDGEMENTS We have presented a state of the art design that highlights the superior capabilities of our GaN process and design techniques. The results of this work should lead to the widespread commercial availability of cost effective Ka Band GaN components with output powers exceeding 25 Watts. We would like to acknowledge Aaron Oki and the whole GaN team in Redondo Beach for their suggestions and expediting this lot. We would also like to thank Alex Zamora and Rich Katz for the figures in this paper. References [1] F. Colomb et al., “2 and 4 watt Ka-Band GaAs PHEMT power amplifier MMICs,” 2003 IEEE Int. Microwave Symp. Dig., pp 843-846. [2] C. Campbell et al., “Design and Performance of a High Efficiency Ka Band Power Amplifier MMIC,” 2010 Compound Semiconductor Integrated Circuits Symp., CSICS. IEEE, pp. 14. [3] C. Campbell et al., “High Efficiency Ka-band Power Amplifier MMICs Fabricated with a 0.15um GaN on SiC HEMT process,” 2012 IEEE Int. Microwave Symp. Dig. [4] K.S. Boutros et al., “5W GaN MMIC for Millimeter-Wave Applications,” 2006 Compound Semiconductor IC Symp. Dig., pp 93-95. [5] M. Micovic et al., “GaN MMIC Technology for Microwave and Millimeter-wave Applications,” 2005 Compound Semiconductor IC Symp. Dig., pp173-176. [6] C. Campbell et al., “High Efficiency Ka-Band Gallium Nitride Power Amplifier MMICs,” 2013 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems. 978-1-4799-8275-2/15/$31.00 ©2015 IEEE
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