Chemical Delivery and Wet Process Systems Chemical Delivery and Wet Process Systems FAST Technologies chemical delivery and wet process systems are developed according to our customer’s process requirements. We provide custom solutions for: Ò Chemical Blending & Delivery Systems & Blended Solvent Delivery Systems Ò Manual & Automatic Wet Processing Stations ÒWet Process Filtration, Monitoring & Pumping Systems, Upgrades Ò CMP Slurry Delivery Systems & Carts Ò VMB for Various Chemicals & Solvents Ò Food Sector Pumping & Dosing Systems Ò Biotech Pumping, Recirculation & Dosing Systems Ò Solvent recovery and transport of ultrapure chemicals to your wet processing systems. We design and build tailored systems for semiconductor, MEMS, Solar as well as various other Industrial and Manufacturing applications. Drum, bottle and carboy systems are available, along with custom valve manifold boxes, carts and transport solutions. Chemical Blending and Delivery Systems FAST Technologies Chemical Blending & Delivery Systems are designed for use with manual, semi and fully automated wet processing systems and wet bench systems in a cleanroom environment. Chemical Delivery Systems will reduce waste and lower overall operational costs and FAST Technologies provide custom chemical handling equipment for delivery, distribution, 2 CMP Delivery Systems The FAST MODular CMP Slurry Delivery System has been primarily designed for the distribution and precision blending of various CMP slurries. The FAST CBU and CBU+Blending and Distribution modules can blend CMP slurry, oxidizers and surfactants with DI Water to a precise ratio. With onboard precision controls, the end user has the flexibility of determining their own batch sizes for the CMP application at hand. The systems incorporate state of the art Levitronix pumping technology via closed loop maglev pumping systems to maintain consistent pressure and flow across numerous toolsets. This low shear force pump technology coupled with in-line filtration minimises slurry particulate agglomeration thus reducing micro scratching and improving process yield, while the various onboard metrology options ensure blend accuracy and quality from batch to batch. Chemical Delivery and Wet Process Systems Solvent and Blended Solvent Delivery Solvent and Solvent Blend Delivery Modules are designed with safety in mind and comply with the necessary ATEX regulations. The systems can supply solvent blended accurately to your process requirement - and our custom design capability allow us to deliver systems specifically tailored to your requirements. The use of chemically compatible high quality materials guarantee chemical purity at POU (Point of Use). Custom Manual & Automatic Wet Processing Stations FAST Technologies Wet Bench processing units can be configured to provide a combination of chemical processing and rinse process baths, including various plastics, quartz, stainless steel, static or recirculation baths, ambient or temperature-controlled and with the additional options of ultrasonic or megasonic cleaning. Further options include drying units, chillers or heat exchangers, concentration monitors, hot plate and stirring systems, electrical outlets and perforated work areas. System control options include modular, microprocessor-based controllers, PC/PLC controller with colour touchscreens and full PLC-based recipe and data management capability, with GEM/ SECS options also available. These stations are available in any configuration. Ò Low Food & Beverage The Food and Beverage sectors are setting new standards in terms of hygiene aspects, product quality and consumer safety. Also the suppliers to these industries need to comply with increased technical and ethical standards. FAST Technologies offers a wide range of fluid handling solutions that meet industry demand today and for the future. Life Sciences Biotechnology is becoming increasingly important for future pharmaceutical products. Tomorrow’s blockbusters will be mainly based on biotechnological production where animal or plant cells are cultivated and processed. These cells and their resulting proteins can be very sensitive to external mechanical forces such as shear stress. FAST Technologies as an integrator for Levitronix offers a wide range of fluid handling solutions focusing on low-shear pump systems, mixers and ultrasonic flowmeters complying with the industry demands for today and tomorrow. Cost Ò Customer Configurable Ò Manual, Semi-automatic & Fully Automatic Options Ò Liquid Containment as standard Ò Various Substrate Size Options Ò Various Chemical Tank Options Ò Tool Availability ≥ 98% FAST TECHNOLOGIES 3 www.fasttechnologies.com Skeoge Ind. Estate, T +44 (0)28 7135 7740 Beraghmore Road, Derry, F +44 (0)28 7135 7744 Co.Londonderry, E [email protected] N.Ireland, BT48 8SE
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