Chemical Delivery and
Wet Process Systems
Chemical Delivery and
Wet Process Systems
FAST Technologies chemical delivery and wet process
systems are developed according to our customer’s
process requirements.
We provide custom solutions for:
Ò Chemical
Blending & Delivery Systems
& Blended Solvent Delivery Systems
Ò Manual & Automatic Wet
Processing Stations
ÒWet Process Filtration, Monitoring & Pumping
Systems, Upgrades
Ò CMP Slurry Delivery Systems & Carts
Ò VMB for Various Chemicals & Solvents
Ò Food Sector Pumping & Dosing Systems
Ò Biotech Pumping, Recirculation & Dosing Systems
Ò Solvent
recovery and transport of ultrapure chemicals to your
wet processing systems. We design and build tailored
systems for semiconductor, MEMS, Solar as well as
various other Industrial and Manufacturing applications.
Drum, bottle and carboy systems are available, along
with custom valve manifold boxes, carts and transport
solutions.
Chemical Blending and
Delivery Systems
FAST Technologies Chemical Blending & Delivery
Systems are designed for use with manual, semi and
fully automated wet processing systems and wet
bench systems in a cleanroom environment. Chemical
Delivery Systems will reduce waste and lower overall
operational costs and FAST Technologies provide custom
chemical handling equipment for delivery, distribution,
2
CMP Delivery Systems
The FAST MODular CMP Slurry Delivery System has been
primarily designed for the distribution and precision
blending of various CMP slurries. The FAST CBU and
CBU+Blending and Distribution modules can blend
CMP slurry, oxidizers and surfactants with DI Water
to a precise ratio. With onboard precision controls,
the end user has the flexibility of determining their
own batch sizes for the CMP application at hand. The
systems incorporate state of the art Levitronix pumping
technology via closed loop maglev pumping systems to
maintain consistent pressure and flow across numerous
toolsets. This low shear force pump technology coupled
with in-line filtration minimises slurry particulate
agglomeration thus reducing micro scratching and
improving process yield, while the various onboard
metrology options ensure blend accuracy and quality
from batch to batch.
Chemical Delivery and Wet Process Systems
Solvent and Blended
Solvent Delivery
Solvent and Solvent Blend Delivery Modules are
designed with safety in mind and comply with
the necessary ATEX regulations. The systems can
supply solvent blended accurately to your process
requirement - and our custom design capability allow
us to deliver systems specifically tailored to your
requirements. The use of chemically compatible high
quality materials guarantee chemical purity at POU
(Point of Use).
Custom Manual & Automatic
Wet Processing Stations
FAST Technologies Wet Bench processing units can
be configured to provide a combination of chemical
processing and rinse process baths, including various
plastics, quartz, stainless steel, static or recirculation
baths, ambient or temperature-controlled and with
the additional options of ultrasonic or megasonic
cleaning. Further options include drying units, chillers
or heat exchangers, concentration monitors, hot plate
and stirring systems, electrical outlets and perforated
work areas. System control options include modular,
microprocessor-based controllers, PC/PLC controller
with colour touchscreens and full PLC-based recipe
and data management capability, with GEM/
SECS options also available. These stations are
available in any configuration.
Ò Low
Food & Beverage
The Food and Beverage sectors are setting new
standards in terms of hygiene aspects, product
quality and consumer safety. Also the suppliers to
these industries need to comply with increased
technical and ethical standards. FAST Technologies
offers a wide range of fluid handling solutions that
meet industry demand today and for the future.
Life Sciences
Biotechnology is becoming increasingly
important for future pharmaceutical products.
Tomorrow’s blockbusters will be mainly based on
biotechnological production where animal or plant
cells are cultivated and processed. These cells and
their resulting proteins can be very sensitive to
external mechanical forces such as shear stress. FAST
Technologies as an integrator for Levitronix offers a
wide range of fluid handling solutions focusing on
low-shear pump systems, mixers and ultrasonic
flowmeters complying with the industry demands for
today and tomorrow.
Cost
Ò Customer
Configurable
Ò Manual, Semi-automatic & Fully Automatic Options
Ò Liquid Containment as standard
Ò Various Substrate Size Options
Ò Various Chemical Tank Options
Ò Tool
Availability ≥ 98%
FAST TECHNOLOGIES
3
www.fasttechnologies.com
Skeoge Ind. Estate,
T +44 (0)28 7135 7740
Beraghmore Road, Derry,
F +44 (0)28 7135 7744
Co.Londonderry,
E [email protected]
N.Ireland, BT48 8SE