1. technology and computing

TECHNICAL PROGRAM DATES APRIL 27-30, 2015
TECHCON
FINAL PROGRAM
SANTA CLARA
INSIDE
Technical Program Schedule
Symposium and Traditional Technical Sessions
Spotlight Sessions: HEURÉKA! Recent Developments,
Poster Presentations, Vendor Innovators Showcase
Networking
Interactive Forums • Meet the Experts Corner • Technology Forum
Breakfasts • Student, Young Members and Young Professional
Networking Events • SVC Foundation 5K Run • Poolside Networking Mixer
• Awards Ceremony and Welcome Reception
Technology Exhibit . April 28-29
The Largest Exhibit Dedicated to Vacuum Coating Technologies –
Delivering Innovative Services and Equipment Solutions
Education Program .
April 25-30
Problem-Solving Tutorial Courses
Calendar of TechCon Events
Explore the
Technical Program Schedule
with TechCon Mobile
SOCIETY OF VACUUM COATERS
58th Annual Technical Conference, Santa Clara Convention Center, CA, USA
TECHCON 2015
The Exhibit and all Technical Sessions
take place in the Santa Clara Convention Center
Events and Meetings taking place in the Hyatt Regency Santa Clara:
Companions Meeting – Central
Young Members Group Happy Hour – Magnolia
Poolside Networking Mixer – Terra Courtyard
TAC Breakfast Meetings – 2nd Floor Meeting Rooms
See outside back cover for all room assignments.
On-Site Registration
Main Lobby of the Santa Clara Convention Center
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Saturday, April 25 Sunday, April 26 Monday, April 27 Tuesday, April 28 Wednesday, April 29 Thursday, April 30 7:15 a.m. - 10:00 a.m.
7:15 a.m. - 6:00 p.m.
7:15 a.m. - 6:00 p.m.
7:15 a.m. - 6:00 p.m.
7:15 a.m. - 5:00 p.m.
7:30 a.m. - 3:00 p.m.
Registration Desk Phone Number
505-379-2861
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Society of Vacuum Coaters 2015 TECHCON Final Program
Welcome
SVC Board of Directors
President
Wolfgang Diehl
Fraunhofer IST, Germany
[email protected]
Vice President
Message from the President
I wish to welcome you to our 58th TechCon to be held in Santa Clara in the heart of “Silicon Valley”. The regional
presence of high–tech industries, electronics, biotech and vacuum coating, research and development are ideal
for our conference. The greater San Francisco Bay Area region has world-class educational institutions that are
advancing the science of coating technology. This excellent and very exciting location is ready for you to come
and appreciate SVC’s outstanding technical program, vibrant exhibition, rich educational program, as well as
numerous networking events, and educational tutorials. This TechCon will focus on investigation of coatings for
the internet-of-things. This includes progress and outlook of coatings and films that will be used in mobile, control,
display and data collection technologies. Also, our traditional subjects for the broader application of coatings
will be covered. All those interested in the most recent developments in vacuum coatings, surface engineering,
equipment and allied technologies are expected to be at the TechCon.
Thanks to the vigilant work of the SVC organization team, this year’s TechCon offers numerous exciting and
stimulating activities. We welcome participants from industry, manufacturers, suppliers and end users, researchers,
managers, educators, development engineers, students, and all those who are interested in this technological field.
The program scope spans from fundamental aspects and innovative ideas all the way to consumer applications.
Concerning publications, we offer several including the SVC Bulletin and the SVC Digital Library that allows one to
access the technical contributions published in the SVC Annual Technical Conference Proceedings over the past
years. Also some of the best TechCon papers will be published in a special issue of the refereed, archival journal,
Surface and Coatings Technology.
The organizers have invested considerable effort and time to make the 58th TechCon a great success. They all share
a vision and desire to serve the vacuum coating and surface engineering community, to document recent progress
in this field, inspire new developments and look to the future. We are looking forward to an outstanding meeting
and with your help we can make it even better. We would very much appreciate your feedback, your new ideas
and suggestions that you believe would further improve the impact of the SVC’s most important annual event. We
invite you to become actively involved in the SVC activities and thus contribute to this fast developing field. Do not
hesitate to contact any of the SVC officers.
I wish you all a very successful, enjoyable and fruitful meeting, and look forward to seeing you in Santa Clara.
Wolfgang Diehl, Fraunhofer Institute for Surface Engineering and Thin Films IST, Germany ([email protected]), SVC President
Welcome from the Program Chairs
This year’s TechCon again demonstrates how The Society of Vacuum Coaters connects research with production
and innovation with business in a unique way. Across all technical sessions, you will find a mix of basic and
applied research alongside ideas and tools focused on transitioning research results into production. This will be
complemented by a topical symposium, a variety of business-related topics, a dedicated product session, and
numerous technology forums. The technical program is enhanced by our unique networking opportunities, a
multi-faceted education program, and the largest technology exhibit of its kind, creating the ideal environment
for learning about the latest research, industry trends, and making the right connections to develop your business.
Silicon Valley, the home of many of the world’s largest high-tech corporations and thousands of startup companies,
is the ideal location for this year’s Symposium on Coating Technologies for the Interconnected Age. The Symposium
will highlight how capabilities within the SVC community relate to advancing mobility, durability and performance
of mobile electronics. Importantly, this broad topic encompasses almost all of the core technology areas within the
SVC and so, in addition to a daily Keynote Presentation, nearly every session will highlight a Symposium-related
talk, and the subject will be covered in focus sessions, tutorials, and forums.
In addition to symposium-related presentations, our traditional sessions are filled with the latest developments
in areas of vital importance to the vacuum coating industry. For the industrial practitioner, we offer a number of
sessions focused on business topics and products, including the Vendor Innovators Showcase, along with Meet
the Experts Forums and Technology Breakfast round-table discussions. As always, our Heuréka! Session focuses
on recent developments that warrant public discussion, in a relaxed evening environment with refreshments
provided by our TechCon Gold Sponsors. Our Poster Session will be jump-started with a series of brief, oral
“executive summaries” to enhance the dialogue with the poster authors.
Whether you are contributing to the program with a presentation, attending the conference to see the latest
products and developments in coating technology, or networking with technology and industry experts, we look
forward to “connecting with you” at the 2015 SVC TechCon. Welcome to Santa Clara!
Chris Stoessel, Eastman Chemical Company ([email protected]) is the Program Chair.
Ralf Bandorf, Fraunhofer IST ([email protected]) is the Assistant Program Chair.
Scott Walton, U.S. Naval Research Laboratory ([email protected]) is the Past Program Chair.
Gary Vergason
Vergason Technology, Inc.
[email protected]
Immediate Past President
Ludvik Martinu
École Polytechnique de Montréal, Canada
[email protected]
Secretary
Hana Baránková
Uppsala University, Sweden
[email protected]
Treasurer
Michael Andreasen
Vacuum Edge
[email protected]
Directors
Brent Boyce
Guardian Industries, Inc.
[email protected]
David Christie
Advanced Energy Industries, Inc.
[email protected]
Adriana Creatore
Eindhoven University of Technology,
The Netherlands
[email protected]
Bryant Hichwa
Sonoma State University (retired)
[email protected]
Carl Lampert
Star Science
[email protected]
John Madocks
General Plasma, Inc.
[email protected]
David Sanchez
Materion Advanced Chemicals
[email protected]
Robert Sargent
JDSU
[email protected]
Chris Stoessel
Eastman Chemical Company
[email protected]
Technical Director
Carl Lampert
Star Science
[email protected]
SVC Administrative Offices
71 Pinon Hill Place NE
Albuquerque, NM 87122-1914
Telephone 505/856-7188
Fax 505/856-6716
E-mail [email protected] Web Site www.svc.org
Executive Director
Vivienne Harwood Mattox
[email protected]
SVC Bulletin and Proceedings Editor
Donald M. Mattox
[email protected]
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
3
TECHCON 2015 Award Recipients
2015 Award Recipients
The Nathaniel H. Sugerman Award
The Nathaniel H. Sugerman Memorial Award was established in 1992
to commemorate the enduring efforts of Nat Sugerman (1922-1991) in
founding, nurturing, and supporting the Society of Vacuum Coaters.
2015 Nathaniel Sugerman Award Recipient
Award Citation: For his leadership in the optical coatings industry, for
championing connections between research and manufacturing, and
his dedicated service to both the SVC and the SVC Foundation.
James W. (Jim) Seeser was born in the Missouri Ozarks,
where he worked his way through school as a newspaper
carrier. He attended Drury College in Springfield, MO, and
received a PhD in Nuclear Physics from the University of
Missouri in Columbia, MO. He and his wife Judy have one
son and two granddaughters, all now living in St. Louis, MO.
Being incurably curious and a life-long student, Jim was unable to
transition immediately into the real world, so he first taught physics
and computer science at Hope College in Holland, MI. There he helped
establish an undergraduate research laboratory using a kit-built 2 MeV
Van de Graaff accelerator. Finding living on a professor’s salary difficult,
he began consulting for several area companies in topics as diverse
as the optical properties of draperies, statistical process control of
manufacturing processes, thermal properties of home cooking ovens,
computer modeling of automotive rear vision systems, optical properties
of automotive convex mirrors, and finally, computer modeling and
production of optical coatings, where he got his start in vacuum coating.
Clearly, focus wasn’t his thing.
He joined the Research Department at Donnelly Mirrors, Inc., of
Holland, MI and spent 4 years developing and scaling up processes for
the manufacture of Indium-Tin-Oxide coatings using the newly invented
planar magnetron reactive sputtering process. It was here in 1976 that
Mike Hansen introduced him to the SVC. His family, tiring of intense
winters, moved to Tennessee to
join start-up Advanced Coating
Table of Contents
Technology, Inc., which produced
architectural solar-control
coatings with a proprietary
Conference Center Map _____________ 2
sputtering technology from
Welcome to the Conference _________ 3
Battelle. In 1983 Jim joined
Optical Coating Laboratory, Inc.,
2015 Award Recipients ______________ 4
(OCLI) in Santa Rosa, CA.
Student Sponsorship Program_______ 5
Working with many talented
people, OCLI enabled Jim to
Tutorial Schedule____________________ 6
reinforce his evident gadfly
propensity by pursing the
Special Events • Highlights___________ 7
application of multilayer
Technical Program________________ 8-22
coatings to many markets
including aerospace, data
SVC New Directors _________________22
storage, automotive, medical,
defense, display, lighting, antiCareer Opportunities _______________22
counterfeiting, and fiber optic
Digital Library ______________________23
markets; covering the wavelength
span from radar to x-ray; and
SVC Corporate Sponsors____________23
using evaporation, sputtering and
Webinar Program __________________24
CVD processes. That was fun! He is
proud of helping OCLI’s transition
SVC LinkedIn ______________________24
from being almost wholly
dependent on evaporation
Notes______________________________25
processes to sputtering some of
On-Location Education Program_____26
the best optical coatings in the
world. It was this later capability
TechCon Sponsors__________________27
that ultimately precipitated OCLI’s
Schedule of Events_________________28
acquisition by JDS Uniphase in
1999.
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Society of Vacuum Coaters 2015 TECHCON Final Program
Jim, who held several committee and officer positions within the SVC,
feels his main contributions were facilitating the growth of the Education
Program and the SVC Foundation.
He is very appreciative of the people who helped an Ozark hillbilly be
the first in his family to graduate from high school and those who later
provided him with mentoring and collaboration through all stages of
his career, especially the wonderful support from Judy. These mentors
include many in the SVC, but he wishes to highlight Don McClure,
Vivienne Mattox, and John Felts for their help and guidance. Thank you all.
Today he volunteers for FIRST® Robotics, which provides robotics
training and competitions to K-12 students, and is also active in activities
centered on deaf education. Judy and Jim enjoy watching and helping
their grandchildren grow into fine adults.
The SVC Mentor Awards
The SVC Mentor Award program was established to recognize people
who have made or are making significant contributions to the SVC and/
or the industry by their example or guidance, including one-on-one and
one-on-many interactions. Award may be posthumous.
2015 SVC Mentor Award Recipients
Joe Greene, University of Illinois, Urbana-Champagne;
Linköping University; National Taiwan University of Science
and Technology
Award Citation: For his seminal scientific and educational
contributions to the evolving technologies of vacuum
deposited coatings and thin film materials.
Joe Greene is the D.B. Willett Professor of Materials Science and Physics
at UIUC, Tage Erlander Professor of Physics at Linköping University,
and a Chaired Professor at the National Taiwan University of Science
and Technology. His research focuses on atomic-level understanding
of adatom/surface interactions during vapor-phase crystal growth for
controllably manipulating nanochemistry, nanostructure, and, hence,
physical properties. He uses hyperthermal condensing species and UV
photochemistry for probing, as well as stimulating, surface reactions that
do not proceed thermally. Joe has published over 580 papers and review
articles, 28 book chapters, and co-edited 4 books, while presenting more
than 525 invited talks and 115 Plenary Lectures. He is a Fellow of APS, AVS,
and MRS, Editor-in-Chief of Thin Solid Films, and has taught SVC short
courses for more than 25 years.
Allan Matthews, University of Sheffield, United Kingdom
Award Citation: For his contributions and broad
technical leadership in the field of vacuum coatings, for
strengthening the quality of the SVC technical program
especially focusing on peer reviewed contributions, and
his efforts in bringing academia and industry together.
Allan Matthews is Professor of Surface Engineering
at the University of Sheffield, Department of Materials Science and
Engineering. He spent his early career in the aerospace industry and
carried out research into ion plating processes at the University of Salford
before moving to the University of Hull, where he built up the Research
Centre in Surface Engineering as Director for over 20 years. He moved
the Centre to the University of Sheffield in 2003. His group researches
plasma assisted processes, mostly for tribological coatings and diffusion
treatments. He is also Director of the Leonardo Centre for Tribology and
Surface Technology. He is Editor-in-Chief of the Elsevier journal Surface
and Coatings Technology, a former member of the SVC Board of Directors
and a former Chair of the AVS Advanced Surface Engineering Division
Executive Committee.
SVC + SVC Foundation Student Sponsorship Program Partnership
The SVC Student Sponsorship Program provides travel support and conference registration fee waivers to selected full-time
students to present their work at TechCon. The Student Sponsorship Committee evaluates applications from students worldwide and
makes selections based on the quality and relevance of the student’s project to the interests and mission of the SVC. Once again, the SVC
Foundation has collaborated with the SVC Student Sponsorship Committee to provide student travel sponsorship awards to promising
students.
In 2015 this collaboration resulted in the selection of the following individuals whom SVC and the SVCF are pleased to introduce to the SVC
Technical Conference in Santa Clara.
Juan Manuel Gonzalez, Universidad del Valle, Colombia
Tribological Properties of Titanium Doped Tungsten
Disulphide/Titanium Multilayers Applied as
Superficial Protection during Limit Layer Lubrication
(T-23) Thursday, April 30, 2:40 p.m.
Ekaterina Makhenva, Masaryk University, Czech Republic
Development of Effective QCM Biosensors by
Cyclopropylamine Plasma Polymerization and
Antibody Immobilization using Cross-Linking
Reactions
(MED-5) Tuesday, April 28, 11:20 a.m.
SVC acknowledges the SVC Foundation for providing travel
sponsorships to the following sponsored students.
Felipe de Campos Carreri, Fraunhofer Institute for Surface
Engineering and Thin Films IST, Germany
HIPIMS ITO Films from a Rotating Cylindrical Cathode
(HP-4) Monday, April 27, 2:20 p.m.
Yishu Foo, City University of Hong Kong, China
Finite-Difference Time-Domain Method for Data
Analysis of Spectroscopic Ellipsometry
(O-6) Wednesday, April 29, 12:00 p.m.
Paranjayee Mandal, Sheffield Hallam University,
United Kingdom
Wear Mechanism of Mo−W Doped Carbon-Based
Coating during Boundary Lubricated Sliding
(T-12) Thursday, April 30, 9:20 a.m.
Frederik Nehm, TU Dresden, Germany
Ultra-High Moisture Barriers from PVD and ALD at a
Wide Range of Climate Conditions
(W-3) Thursday, April 30, 11:00 a.m.
Eigor Renato Petry, Universidade de Caxias do Sul, Brazil
On the Physicochemical Structure of the SiliconContaining Adhesion Interlayer in DLC Deposited on
AISI 4140
(T-24) Thursday, April 30, 3:00 p.m.
Young Members and
Mentors Happy Hour
Hyatt Regency Santa Clara - Magnolia
Monday, April 27, 5:30 – 6:45 p.m.
Young Members, Students and Young
Professionals (age 35 and younger) are
welcome to attend this informal gettogether, designed to allow participants
the opportunity to engage in one-on-one
discussions with volunteer mentors from
industry and academia. This mentoring
program serves as a “bridge” between
those just entering the vacuum coating
community and SVC Mentors, representing
various sectors of vacuum coating and
related technologies. Focused discussions
explore technical issues, employment
opportunities in vacuum coating and offer
useful knowledge on how to successfully
navigate the TechCon event.
Jacques Lengaigne, École Polytechnique de Montréal,
Canada
Nano-Grained Hard Protective Titanium Carbide
Coatings Prepared by PECVD
(T-9) Tuesday, April 28, 12:50 p.m.
Cindy Steiner, Fraunhofer Institute for Electron Beam and
Plasma Technology FEP, Germany
Nanostructuring of Ethylene Tetrafluoroethylene
Films by a Low Pressure Plasma Treatment Process
(W-8) Thursday, April 30, 2:20 p.m.
Become a Young Member
The Young Members Group is open to
young people with an interest in vacuum
coating and related technologies.
Members of the group may be SVC Young
Members Group and Mentors Program
students, young professionals or technical
staff in industry; the common feature is
that they should meet the age requirement
(35 years of age or under at any time in
2015) and have a keen interest in any of
the topics that fit under the umbrella of
the SVC.
Young Members receive the
following benefits:
• Discounted Membership Fee of $40
• Discounted Conference Registration
Fee of $250
For more information on the Young
Members Group and Mentors Program,
visit www.svc.org and explore the Students
and Young Members button.
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
5
SVC TECHCON 2015
Tutorial Schedule
Saturday, April 25
C-103 C-311 C-216 An Introduction to Physical Vapor Deposition (PVD) Processes
Thin Film Growth and Microstructure Evolution Joe Greene
Practical Design of Optical Thin Films Ron Willey
David Glocker
Sunday, April 26
C-203 C-217 C-323 C-336 C-337 Sputter Deposition 2-Day Tutorial (Sunday and Monday) Joe Greene
Practical Production of Optical Thin Films Ron Willey
High Power Impulse Magnetron Sputtering Arutuin Ehiasarian & André Anders
Transparent Gas Permeation Barriers on Flexible Substrates PM John Fahlteich
ITO and Alternative TCO: From Fundamentals to Controlling Properties Clark Bright
Monday, April 27
Characterization of Thin Films Tom Christensen
V-207 Practical Aspects of Vacuum Technology: Operation and Maintenance of Production Vacuum Systems Tim Gessert
C-309 NEW! Cathodic Arc Deposition PM André Anders
C-322 Tuesday, April 28
C-315 C-333 M-102 C-210 C-340 Reactive Sputter Deposition Joe Greene
Practice and Applications of HIPIMS AM Ralf Bandorf & Arutiun Ehiasarian
Introduction to Ellipsometry AM James Hilfiker
Introduction to Plasma Processing Technology PM Hana Baránková & Ladislav Bárdos
NEW! Plastic Optics - Coatings and Anti-Reflective Structures PM Ulrike Schulz
Wednesday, April 29
C-208 C-212 Sputter Deposition in Manufacturing David Glocker
Troubleshooting for Thin Film Deposition Processes
Gary Ash
Diamond Like Carbon Coatings – from Basics to Industrial Realization
AM
Thomas Schuelke, George Savva, & Martin Keunecke
Atmospheric Plasma Technologies AM Hana Baránková & Ladislav Bárdos C-316 Introduction to Atomic Layer Deposition (ALD) Processes, Chemistries,
and Applications AM Brian Willis
C-324 All tutorial courses are full-day 8:30 a.m. - 4:30 p.m. unless specified
AM – 8:30 a.m. - noon or | PM – 1:00 p.m. - 4:30 p.m.
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Society of Vacuum Coaters 2015 TECHCON Final Program
TechCon Education Solves
Vacuum Coating Problems
The TechCon Tutorial Program,
offering full-day and half-day
problem-solving tutorial courses,
increases your practical knowledge
of vacuum coatings and processes.
Return to work with solutions to
your everyday vacuum coating
troubles.
You do not have to register for the
TechCon or be a member of SVC
to attend the Tutorial Courses.
Tutorial fees are the same for SVC
Members and Non-Members.
Tutorial course fees include
entrance to the Exhibit Hall.
SVC is offering a 25% discount on
each Tutorial registration for the
second or more employee in a
company who enrolls in the same
tutorial as the first employee. The
discount does not apply to the
Student rate.
A topical outline, detailed syllabus
and instructor bio for all tutorial
courses in the 2015 TechCon roster
is available online at
www.svc.org/TechConEducation
Thursday, April 30
C-320 2015
TECHCON
2015 Tutorial Schedule
Individual tutorial course fees
increase by $100 after March
25, 2015 (this does not apply to
students or the Young Members
Group).
Tutorial cancellations received on
or before March 25, 2015, will be
refunded. Refunds will be made
upon receipt of a written notice,
less a $25 service fee for each
individual tutorial. No refunds
will be made for cancellations
received after March 25, 2015.
Special Events + Programs Exhibit Highlights
Sunday, April 26
SVC Awards Ceremony and Welcome Reception
All are Invited to Attend.
SVC Awards Ceremony
Santa Clara Convention Center | Grand Ballroom E
6:30 p.m. – 7:30 p.m.
The Awards Ceremony will introduce and recognize the Nathaniel
Sugerman Memorial Award Recipient and SVC Mentor Award
Recipients for 2015. Plus, Sponsored Student Award recipients will be
featured during the ceremony.
Welcome Reception
Santa Clara Convention Center | Mission City Ballroom B5-B4
7:30 p.m. – 10:00 p.m.
The Welcome Reception includes a dinner buffet and live music and
will immediately follow the Awards Ceremony.
Young Members Group + SVC Mentors Happy Hour
Hyatt Regency | Magnolia
Monday, April 27, 5:30 p.m. – 6:45 p.m.
Young members, students and young professionals (age 35 and younger)
are welcome to attend this informal get-together designed to allow
participants the opportunity to engage in one-on-one discussions with
volunteer mentors from industry and academia.
For more details see page 5.
Poolside Networking Mixer
Hyatt Regency | Terra Courtyard
Tuesday, April 28, 6:00 p.m.
After the Exhibit Reception ends on Tuesday in the Exhibit Hall, everyone
is invited to attend a poolside Networking Mixer at the Terra Courtyard
at the Hyatt Regency Santa Clara. Join friends, colleagues, and make
new connections in a relaxed atmosphere with light refreshments
provided by SVC.
SVC Foundation Fundraising Event
5K Fun Run and Walk
Tuesday, April 28 at 6:00 a.m.
Meet in the Hyatt Regency Lobby at 5:45 a.m.
Cost: $25 per person (includes a T-shirt)
Register for this special event at the Information Center. TEAM
CHALLENGE Sponsored by Sputtering Components. Register four
members for your team, and the first team to cross the finish line will win
the traveling championship plaque, plus each member of the winning
team will take home an iPod Shuffle. ALL 5K runners will be entered into
a drawing to win a runner’s watch. Team members may be from the same
company or consist of a collection of friends and colleagues.
All activities take place in the Exhibit Hall, unless indicated otherwise.
Free Wireless Internet Sponsored by Gold Sponsors
Soleras Advanced Coatings and Vergason Technology, Inc.
Tuesday Exhibit Hours 12:00 Noon – 6:00 p.m.
Lunch for Sale 12:00 Noon
Specialty Coffee Cart
12:30 p.m. - 4:30 p.m.
Sponsored by Plansee USA, LLC
Oral Poster Session
2:30 p.m. - 3:30 p.m. Grand Ballroom G
Poster Session
3:30 p.m. - 6:00 p.m.
Exhibit Hall Reception
4:45 p.m. - 6:00 p.m.
Poolside Networking Mixer
6:00 p.m. Terra Courtyard, Hyatt Regency Santa Clara
All are Invited
Sponsored by Intlvac Thin Film
Wednesday Exhibit Hours 10:00 a.m. – 5:00 p.m.
SVC Sponsored Lunch
Tickets Distributed to Full Conference Registrants and Exhibitors
12:00 Noon - 1:30 p.m.
SVC Foundation Presentations
Golf Tournament and 5K Run Winners
12:30 p.m.
Vendor Innovators Showcase
Grand Ballroom G
Morning Session - Begins at 11:20 a.m.
Afternoon Session - Begins at 1:50 p.m.
Frozen Treat Stations
2:00 p.m.
Sponsored by Vacuum Research Corporation
Beer Blast
3:30 p.m. - 5:00 p.m.
Sponsored by VON ARDENNE GmbH
Best Poster Award Presentation
4:00 p.m.
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
7
TECHCON 2015
Technical Program
Monday AM . April 27
in automobile industry, biocompatible coatings for implantable prostheses,
wear resistant protective coatings for optical components, ultra-smooth
protective coatings for magnetic recording media and numerous others.
Technology Forum Breakfast
Coatings and Surface Engineering for Medical Applications
Hana Baránková, Uppsala University, Sweden and Aryasomayajula
Subrahmanyam, Indian Institute of Technology Madras, Chennai, India
Presently, the coatings industry in bio-medical applications has crossed
the six billion dollar mark and still increasing. There is a vast scope for
several emerging and new concepts. Among the emerging concepts that
are proposed to be discussed are, for example (i) developing methods of
assessing the potential longer term stability (ageing) issues associated
with coated devices prior to clinical trials (ii) smart systems and sensors for
regular health monitoring and (iii) development of early warning systems in
mechanical heart valves.
7:00 a.m. – 8:15 a.m. Great America Ballroom (Lobby, J, KX)
In these facilitator-led forums, experts are available to answer your
questions and discuss your concerns in an informal environment. This
morning’s topics include:
Coatings for Thin Film Photovoltaics
Wolfgang Diehl and Volker Sittinger, Fraunhofer Institute for Surface Engineering
and Thin Films IST, Germany
In 2013 the PV industry still faced a huge overcapacity of 40%. Because of
this glut on the market, the prices have continued to decline. Due to the
cost reduction, solar electricity has reached net parity in countries located
in the sun-belt regions. Therefore, the worldwide installed PV capacities are
steadily increasing towards 40 GW/a. Regarding its lower efficiency, thin
film technology is facing ambitious targets concerning efficiency and price.
In the next three years, the efficiency should reach 16% in modules while
further reducing the manufacturing costs. Only CdTe and CIGS seem to
show the potential to reach this target, thin film silicon at this point is not
able to demonstrate this efficiency potential. Cheap and reliable coatings
like TCOs, AR coatings, back contact technology and mature absorbers
for thin film photovoltaics are the key issue for the breakthrough of this
technology.
High-Power Impulse Magnetron Sputtering (HIPIMS)
Arutiun Ehiasarian, Sheffield Hallam University, United Kingdom and Ralf Bandorf,
Fraunhofer Institute for Surface Engineering and Thin Films IST, Germany
HIPIMS is the newest industrialized PVD process offering the possibility of
engineering the interface and film microstructure to provide high adhesion
strength, high film density, excellent coverage of complex shapes, high
resistance to harsh environments, and improved optical properties. Come
learn about the new challenges facing this new technology and discuss the
status and technological barriers broken by this process.
Gas/Moisture Permeation Barrier Layers
Adriana Creatore, Eindhoven University of Technology, The Netherlands
Amongst the challenges and emerging technologies in the field of
electronic displays/ lighting, flexible electronics and solar cells, the research
on the “ultimate gas/vapor barrier performance” which allows long term
stability devices involves also the search for new deposition techniques,
next to the more traditional sputtering and low pressure plasma deposition.
During this Technology Breakfast Program we will review the deposition
techniques, compare them, also in terms of barrier performances and
compatibility with large area and roll-to-roll production. Furthermore, we
will analyze the recent developments in the field at industrial/production
level as well as at laboratory scale.
Fabrication and Performance of Optical Coatings
Ludvik Martinu, École Polytechnique de Montréal, Canada, and Bryant Hichwa,
Sonoma State University (retired)
In a friendly atmosphere of the Breakfast Forum, we will discuss
advances in the area of optical films and optical filters with respect
to the recent progress in optics, optoelectronics, photonics, optical
microelectromechanical systems and others. Please bring your questions,
solutions and discussion points related to the fabrication methods, optical
coating materials, optical film metrology, mechanical properties of coated
systems including plastics, as well as scale-up and other subjects related to
the interests of the optical coating community.
Diamond-Like Carbon (DLC) Coatings
George Savva, IHI Ionbond, Inc., Martin Keunecke, Fraunhofer Institute for Surface
Engineering and Thin Films IST, Germany; and Thomas Schuelke, Fraunhofer USA, Inc.
The unique microstructure of DLC films formed by appropriate proportions
of sp3 and sp2 hybridizations of carbon in combination with the chemical
inertness, low friction, biocompatibility and other advantageous properties
has made this material extremely attractive for a large number of
applications. This includes low friction coatings for the engine components
8
Society of Vacuum Coaters 2015 TECHCON Final Program
Quartz Crystal Monitors
C. Larry Lu, C. Lu Laboratory and Ric Shimshock, MLD Technologies, LLC
Real-time, in situ control of deposition processes remains a challenge both
in the lab and on the production floor. This Tech Forum Breakfast will focus
on reviewing choices for implementing a robust process control approach.
Potential discussion topics include weighing the various strengths
and limitations of these control approaches, including Quartz Crystal
Monitoring (QCM) and other optical based monitoring techniques, such
as Atomic Absorption Spectroscopy (AAS), Optical Emission Spectroscopy
(OES) and Optical Thickness Monitoring. Bring your questions for a chance
to interact with one of the major contributors to the development of QCM
technology, Dr. C. Larry Lu.
Annual Business Meeting
8:30 a.m. – 9:00 a.m. Theater
All are invited!
Keynote Presentation
Symposium on Coating Technologies for the Interconnected Age
9:00 a.m. Theater
Moderator: Chris Stoessel, Eastman Chemical Company
Oxide Based Electronics: A Coming Technology
Elvira Fortunato, Departamento de Ciência dos Materiais,
Universidade Nova de Lisboa and CEMOP/Uninova, Caparica,
Portugal
Transparent electronics are now a reality and are
adding new electronic functionalities onto surfaces.
High-performance n- and p-type Thin Film Transistors (TFTs), prepared
by physical vapor deposition (PVD) techniques have already been
developed. PVD processes like rf magnetron sputtering can be
performed near room temperature, which makes them compatible
with the use of temperature sensitive, low-cost flexible substrates
(polymers, cellulose paper, among others). Besides that, tremendous
advances are coming through liquid solution-based technologies,
which is very exciting for ink-jet printing, where the theoretical
limitations are becoming practical limitations. In this presentation,
some of the most promising new technologies for n- and p-type thin
film transistors based on oxide semiconductors and their current and
future applications will be reviewed. Some of the most promising new
technologies for n- and p-type thin film transistors are in the form of
nano-films or nanoparticles. Special emphasis will be given to solutionprocesses. A summary of the major milestones already achieved with
this emerging and very promising technology will be presented.
Monday . April 27
Symposium on Coating Technologies for the Interconnected Age
11:10 a.m. P-3 High Transparent Barrier Coatings for Electronic
Encapsulation
Chris Stoessel, Eastman Chemical Company and Ralf Bandorf, Fraunhofer Institute for Surface
Engineering and Thin Films IST, Germany
N. Kaabeche1, P. Kelly1, L. Harland2
1
Manchester Metropolitan University, Manchester, United Kingdom
2
BOBST Manchester Ltd., Heywood, United Kingdom
Theater
9:50 a.m. IA-1 Dropped Your Phone Down the Toilet? No Worries! Improving the Reliability of Electronic Devices
Invited Talk S. Coulson P2i Ltd., Abingdon, United Kingdom
10:30 a.m. IA-2 Doped Molybdenum Oxides for Low-Reflectance Thin Films
in Touch Sensor Applications
H. Köstenbauer, D. Lorenz, J. Winkler PLANSEE, Reutte, Austria
10:50 a.m. – 11:10 a.m. – Break
11:10 a.m. IA-3 Improved Mechanical and Optical Functionality on
Transparent Substrates by High Deposition Rate PECVD Coatings
F. Schwarz, S. Kastl, A. Uhl, D. Hrunski, C. Schmidt, R. Bock, A. Rack
Manz AG, Karlstein, Germany
11:30 a.m. IA-4 Roll-to-Roll Vacuum Coating and Device Fabrication Using
Flexible Glass Web
Invited Talk S. Garner Corning Incorporated, Corning, NY
Emerging Technologies
Grand Ballroom E
Moderators: Jacob Bertrand, Maxima Sciences LLC and Clark Bright, Bright Thin Film Solutions
9:50 a.m. E-1 Parylene Coatings for Organic Field Effect Transistors
J. Ulański1, I. Tszydel1, T. Marszałek1, A. Nosal2, M. Gazicki-Lipman2
1
Molecular Physics, Technical University of Lodz, Lodz, Poland
2
Institute for Materials Science and Engineering, Technical University of Lodz, Lodz, Poland
11:30 a.m. P-4 Thin Film Vacuum Polymerization Applications
I. Fernandez1, A. Wennberg1, V. Bellido-Gonzalez2, B. Daniel2, J. Brindley2,
H. Li2, D. Monaghan2, F. Papa3
1
Nano4Energy SL, Madrid, Spain
2
Gencoa Ltd, Liverpool, United Kingdom
3
Gencoa Ltd., Davis, CA
11:50 a.m. P-5 Thin Film Coatings for Particle Accelerators
S. Calatroni, P. Chiggiato, P. Costa Pinto, H. Neupert, A. Sublet, M. Taborelli, W. Vollenberg
CERN-European Organization for Nuclear Research, Meyrin, Switzerland
Monday PM . April 27
11:00 a.m. – 1:30 p.m.
“Grab and Go” Cash Lunches for Sale in the Hyatt Foyer
Bring your lunch to the Donald M. Mattox Tutorial.
The Donald M. Mattox Tutorial Presentation
12:50 p.m. Theater
Moderator: Wolfgang Diehl, Fraunhofer Institute for Surface Engineering and Thin Films
IST, Germany
About the Possibility for a Holistic Toolbox for
the Next Generation of Surface and Coating
Optimization - Taking the Example of TCOs in Touch
Screens
Norbert Schwarzer, Saxonian Institute of Surface Mechanics
10:10 a.m. IA-8 ALD Coatings for Enhanced Durability of Electronic Devices
Symposium on Coating Technologies for the Interconnected Age
Invited Talk S. Graham Georgia Institute of Technology, Atlanta, GA
10:50 a.m. – 11:10 a.m. – break
11:10 a.m. E-2 Perspectives of Development of TCO and TOS Thin Films
Based on TiO2 Composites
J. Domaradzki Wroclaw University of Technology, Wroclaw, Poland
11:30 a.m. E-3 Structural Electronics and Structural Super Capacitors in
Early Warning Systems in Mechanical Heart Valves: New Concept with
Emerging Technologies
A. Subrahmanyam Department of Physics, IIT Madras, Chennai, India
11:50 a.m. E-4 Laser Induced Transfer of PVD Coatings from a PET Carrier
onto Product Surfaces for Decorative and Functional Purposes
R. Domnick ARA-Coatings GmbH & Co. KG, Erlangen, Germany
Plasma Processing
Grand Ballroom F
Moderator: Mariadriana Creatore, Eindhoven University of Technology, The Netherlands
9:50 a.m. P-1 A New Frontier of Plasma Patterning: Atomic Layer Etch
Invited Talk Y. Zhang Applied Materials, Sunnyvale, CA
10:30 a.m. P-2 Application-Oriented Numerical Modeling of Plasma
Processes for Material and Biological Applications
A. Obrusnik1,2, P. Synek1, Z. Bonaventura2, J.Vorac2, L. Zajickova2
1
Department of Physical Electronics at the Faculty of Science, Masaryk University, Brno, Czech Republic
2
Plasma Technologies at CEITEC, Masaryk University, Brno, Czech Republic
10:50 a.m. – 11:10 a.m. – Break
SIO, Ummanz, Germany
The next technological revolution, or “Internet of Things,” will demand
innovative and sophisticated concepts for products allowing the
seamless interaction of a human being with the internet. The author
is convinced that without thin film technology, no satisfying interface
solutions are possible. In order to succeed however, much more
knowledge base and holistic development strategies are necessary.
In many applications of thin films, a multitude of physical effects are
influencing the lifetime and reliability of the coated parts. Proper
characterization and optimization of thin films requires invertible
mathematical tools of sufficient holistic character. It is shown within
tribological applications that there are ways for some completely
analytical tools not only allowing a much better invertibility compared
to discrete models but also an extreme (up to 1000 and more)
acceleration of forward evaluations even for complex layered systems.
This talk will feature the use of these applications and how they can be
applied for the development of optimized coating structures. Thereby,
we will concentrate on the practical side of the new tools application.
Symposium on Coating Technologies for the Interconnected Age
Theater
Moderator: Chris Stoessel, Eastman Chemical Company
1:40 p.m. IA-5 The Emergence of Flexible Electronics: Opportunities for
Vacuum Deposition Technologies
Invited Talk H. Zervos IDTechEx Inc., Cambridge, MA
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
9
TECHCON 2015
2:20 p.m. IA-7 µm Coatings for nm Precision
Invited Talk M.L.H. ter Heerdt ASML Netherlands B.V., Veldhoven, The Netherlands
Technical Program
5:00 p.m. L-8 Tuning of ITO Coating Properties in the Display Industry:
Selected Topics
P. Lippens, C. Frei Umicore Thin Film Products AG, Balzers, Liechtenstein
3:40 p.m. – 4:00 p.m. - Break
Coatings for Energy Conversion and Related Processes
Theater
Moderators: Volker Sittinger, Fraunhofer Institute for Surface Engineering and Thin Films IST,
Germany and David Sanchez, Materion Advanced Chemicals
4:00 p.m. EC-1 Constitution, Microstructure and Electrochemical Behaviour
of Magnetron Sputtered Li-Ni-Mn-Co-O Thin Film Cathodes for Lithium-Ion
Batteries
S. Ulrich, M. Strafela, J. Fischer, H. Leiste, M. Rinke, T. Bergfeldt, H.J. Seifert
Karlsruhe Institute of Technology (KIT), Institute for Applied Materials (IAM), EggensteinLeopoldshafen, Germany
4:20 p.m. EC-2 Thin Film Battery Manufacturing
D. Mount Ulvac Technologies, Inc., Methuen, MA
4:40 p.m. EC-3 Designed Nanoparticle Synthesis by Hollow Cathode
Sputtering for Surface Treatments
Invited Talk U. Helmersson Department of Physics, Linköping University, Sweden
5:20 p.m. EC-4 Fabrication of Rechargeable All-Solid-State Thin-Film
Lithium Batteries on Flexible Polymer Substrates
M. Chen, Y. Yan, W.-M. Liu, C. Zhou, Z.-Q. Guo, X.-F. Zhang, Y.-L. Wang, L. Li, G.-L. Zhang
Beijing Institute of Aeronautical Materials, Aviation Industry Corporation of China, Beijing,
China
E. Sarhammar, T. Nyberg, S. Berg Solid State Electronics, Uppsala University, Uppsala, Sweden
High Power Impulse Magnetron Sputtering (HIPIMS)
Grand Ballroom F
Moderators: Jolanta Klemberg-Sapieha, École Polytechnique de Montréal, Canada and Arutiun
Ehiasarian, Sheffield Hallam University, United Kingdom
1:40 p.m. HP-2 Excellent Adhesion on Plastics using HIPIMS
R. Bandorf1, S. Waschke2, G. Grundmeier2, G. Bräuer1
1
Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany,
2
Technische und Makromolekulare Chemie, Universität Paderborn, Paderborn, Germany
2:00 p.m. HP-3 Mechanical Bending of the Indium Tin Oxide Films on
Polyethylene Terephthalate Deposited by High Power Impulse Magnetron
Sputtering
Y.-H. Chen, Y.-C. Chen, J.-L. He Department of Materials Science and Engineering, Feng
Chia University, Taichung City, Taiwan
2:20 p.m. HP-4 HIPIMS ITO Films from a Rotating Cylindrical Cathode
Sponsored Student Presentation F.C. Carreri, A. Sabelfeld, H. Gerdes, R. Bandorf, G. Bräuer
Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany
2:40 p.m. HP-5 Adjustment of Plasma Properties in Magnetron Sputtering
by Pulsed Powering in Mixed Unipolar and Bipolar Mode
Large Area Coatings
Grand Ballroom E
Moderator: Michael Andreasen, Vacuum Edge
1:40 p.m. L-1 Direct Fabrication of Graphene on SiO2 via Thin Film Stress
Engineering
Invited Talk V. Veerasamy Guardian Industries, Carelton, MI
2:20 p.m. L-2 Effects of Ion Bombardment Pretreatment on Glass Coating
Processes and Post Tempering
J.M. Marco1, R. Alonso2, A. Cueva2, V. Bellido-Gonzalez3, H. Li3, A. Azzopardi3
1
Ariño-Duglass, Zaragoza, Spain
2
Universidad de Zaragoza, Zaragoza, Spain
3
Gencoa Ltd, Liverpool, United Kingdom
2:40 p.m. L-3 Substrate Cooling and Tempering during High-Rate Vacuum
Coating
J.-P. Heinss, P. Lang, P. Ruppelt, D. Weiske
Fraunhofer Institute for Electron Beam and Plasma Technology FEP, Dresden, Germany
3:00 p.m. L-4 Process Perfection for Large Area Multi-Layer Coatings
L. Schwab1, J. Ellrich2
1
dr. schwab Inspection Technology, Aichach, Germany
2
Grenzebach Maschinenbau GmbH, Asbach-Baeumenheim, Germany
3:20 p.m. L-5 Large Area Coating - Achieving Superior Layer Uniformity
R. Rank, T. Niederhausen, G. Haasemann, J. Loehnert
VON ARDENNE GmbH, Dresden, Germany
S. Barth, H. Bartzsch, D. Glöss, P. Frach, M. Gittner, R. Labitzke
Fraunhofer Institute for Electron Beam and Plasma Technology FEP, Dresden, Germany
3:00 p.m. HP-1 Thin Films Deposited by Reactive HIPIMS: From Plasma
Diagnostics to Improvement of the Solar Cells Efficiency
Invited Talk P.-Y. Jouan Institut des Matériaux Jean Rouxel, Nantes, France
3:40 p.m. – 4:00 p.m. – Break
4:00 p.m. HP-6 Controlled Reactive High-Power Impulse Magnetron
Sputtering of Dielectric Oxide Films
J. Rezek, J. Vlcek, A. Belosludtsev
Department of Physics and NTIS - European Centre of Excellence, University of West
Bohemia, Plzen, Czech Republic
4:20 p.m. HP-7 Different Approaches for Controlling a Reactive Sputter
Process with MF Superimposed HIPIMS
H. Gerdes1, R. Bandorf1, M. Mark2, T. Schütte3, G. Bräuer1
1
Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany
2
MELEC GmbH, Baden, Germany
3
PLASUS, Kissing, Germany
4:40 p.m. HP-8 Plasma Pretreatment of Tungsten Carbide and Steels by
High Power Impulse Magnetron Sputtering
A.P. Ehiasarian1, A. Oniszczuk1, T.J. Morton1, C.-F. Carlstrom2, M. Ahlgren2
1
HIPIMS Technology Centre, Sheffield Hallam University, Sheffield, United Kingdom
2
Sandvik Coromant, Stockholm, Sweden
5:00 p.m. HP-9 Higher Ionization and Deposition Rate of High Power Impulse
Magnetron Sputtering Assisted by External Magnetic and Electric Field
3:40 p.m. – 4:00 p.m. - Break
4:00 p.m. L-6 40 Years of Industrial Magnetron Sputtering in Europe
Invited Talk U. Seyfert1, J. Struempfel2, U. Heisig3, J. Hartung1
1
VON ARDENNE GmbH, Dresden, Germany
2
Senior Consultant PVD, Dresden, Germany
3
Research Institute Manfred von Ardenne (retired), Dresden, Germany
4:40 p.m. L-20 Optical and Mechanical Properties of Ti-, Si-, and Zr-Based
Top Layers
J. Oberste-Berghaus, R. Van Nuffel, K. De Jaeger, A. Das, W. De Bosscher
Soleras Advanced Coatings, Deinze, Belgium
10 Society of Vacuum Coaters
5:20 p.m. L-9 Applying the “Upgraded Berg Model” to Predict Hysteresis
Free Reactive Sputtering
2015 TECHCON Final Program
X. Tian1, J. Hu1, R. Kou1, C. Gong1, P.K. Chu2
1
State Key Lab of Advanced Welding and Joining, Harbin Institute of Technology, Harbin, China
2
Department of Physics and Materials Science, City University of Hong Kong, Hong Kong, China
Monday - Tuesday . April 27 - 28
Monday Evening . April 27
systems; Energy Control and Surface Functionality: including smart
windows, low-e coatings, photocatalysis, hydrophobicity, oleophobicity,
anti-icing, and light and energy transformation.
Young Members Group/Mentors Happy Hour
Magnetron Sputtering
David Glocker, Isoflux Incorporated
The Technology Forum Breakfast on magnetron sputtering always proves
to be extremely informative and entertaining. The large number of
participants means a lively exchange on a wide variety of topics including
anything from arcing to zone models. We encourage you to ask questions
about issues you’ve encountered and engage in productive discussions
with others in the group who frequently have the answers. Often, responses
include insights into which technical presentations and presenters
specialize in your topic of interest. So get the most out of your attendance
at the TechCon and take this opportunity to build your network.
5:30 p.m. – 6:45 p.m. Hyatt Regency - Magnolia
All Young Members, Students and Young Professionals (age 35 and
younger) are welcome to attend.
HEURÉKA! Post Deadline Recent Developments Session
Theater
Moderators: Hana Baránková and Ladislav Bárdos, Uppsala University, Sweden
7:00 p.m. H-1 A Newly Developed Spectroscopic Plasma Monitoring Tool
T. Schütte PLASUS GmbH, Kissing, Germany
7:20 p.m. H-2 Magnetized Hollow Cathode Activated Magnetron
L. Bardos1,2, H. Barankova1,2, A. Bardos1, M. Bernick3, R. Newcomb3
BB Plasma Design AB, Uppsala, Sweden
Uppsala University, Uppsala, Sweden
3
Angstrom Sciences, Inc., Duquesne, PA
1
2
7:40 p.m. H-3 High Energy Plasma Beam Source for Flexible Application in
Thin Film Technology
W. Decker1, K. Schafsteck2, R. Hilberg2
Iacten Consulting, Beaver Falls, PA
HS-PlasmaTec, Hainburg, Germany
1
2
8:00 p.m. H-4 Performance of a Linear Open Drift Path Magnetron Cathode
D. Glocker, J.S. Busch Isoflux Incorporated, Rochester, NY
8:20 p.m. H-5 Advanced Mid-Frequency Power Supply with Unique Output
Feature for Arc- and Defect Free Reactive Processes
M. Glück1, F. de Campos Carreri2,3, G. Moser1, H. Müller1
J. Schneider Elektrotechnik GmbH, Offenburg, Germany
CAPES Foundation, Ministry of Education of Brazil, Brasília, Brazil
Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany
1
2
3
8:40 p.m. H-6 Rotary Cathode Sputter Zone Hardware and Process
Optimization Using Advanced Finite Element Analysis
P. Morse Sputtering Components, Owatonna, MN
Tuesday AM . April 28
Technology Forum Breakfast
7:00 a.m. – 8:15 a.m. Great America Ballroom Lobby J, KX
In these facilitator-led forums, experts are available to answer your
questions and discuss your concerns in an informal environment. This
morning’s topics include:
Atmospheric Plasma Technologies
Hana Baránková and Ladislav Bárdos, Uppsala University, Sweden
Atmospheric plasma technology is a rapidly growing area in plasmaassisted technologies. Technologies using the atmospheric pressure plasma
sources bring about fast processes, but it is important to be aware of
limitations given by atmospheric plasma properties and plasma chemical
reactions.
Energy Conversion and Storage
Carl M. Lampert, Star Science, and Ric Shimshock, MLD Technologies, LLC
Energy conversion and storage is a group of technologies that address
global needs of clean energy, air, water, and environment. At our breakfast
we will have an open discussion on coatings, films and devices on the
following topics: Energy Conversion: including fuel cells, and photothermal
conversion; Energy Storage: including batteries, hydrogen and hybrid
Transparent Conductive Oxides (TCO) for Thin Film Photovoltaics,
Displays, Transparent Electronics and More
Clark Bright, Bright Thin Film Solutions (3M, retired)
TCO have many applications, with only a few listed above. All aspects of
producing, characterizing, and using TCO coatings in applications as well as
TCO fundamentals and physics, will be open for discussion. While ITO is still
King, there is considerable progress toward finding TCO and other types of
alternative Transparent Conductive Coatings (TCC). Zinc oxide-based TCO,
e.g., AZO, GZO and ZO with other dopants, are receiving much attention
and some commercial application. IZO is also in commercial use. Research
is continuing on TiO2 (TiOx) with various dopants. Optically enhanced thin
film metals, i.e., dielectric/metal/dielectric, deposited on flexible plastic film,
with superior performance to ITO, are also in production.
Tribological Coatings
Allan Matthews, University of Sheffield, United Kingdom and Bill Sproul, Reactive
Sputtering, Inc. and Gencoa Ltd.
Tribological coatings are applied to surfaces by PVD processes to improve
wear resistance and reduce friction. Recent developments in multilayered
and nanostructured coatings are advancing this technology. Using these
structures, it is possible to combine high hardness and relatively low elastic
modulus. These developments will be discussed along with individual
applications of tribological coatings.
Optical Coating Design
H. Angus Macleod, Thin Film Center Inc.
It is difficult to imagine an optical system that would not need optical
coatings. The shape of an optical surface is designed to manipulate the
direction of the light but virtually every other optical property, even
including some directional ones, is assured by the thin-film coating
carried by the surface. The constant proliferation of optical applications
continuously creates new and more demanding requirements for optical
coating performance. To complicate matters, the coating is frequently
required also to support other properties like environmental resistance.
Of course there are advanced computer programs for thin-film design but
optical coating design still involves skill, experience, and understanding.
MATERION NETWORKING LOUNGE
Santa Clara Convention Center 2nd Floor
At the top of the main lobby escalators
Monday, April 27 - Thursday, April 30
The Materion Networking Lounge allows attendees to conduct
business and make connections in a bright, comfortable atmosphere
during the TechCon Event.
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
11
Technical Program
TECHCON 2015
Keynote Presentation
Symposium on Coating Technologies for the Interconnected Age
8:30 a.m. Theater
Moderator: Volker Sittinger, Fraunhofer Institute of Surface Engineering and Thin Films IST,
Germany
Sensor Technology: From Automotive to Mobile
(Phone) Applications
Carsten Herweg, Robert Bosch GmbH, Stuttgart, Germany
Sensors are a key element of a modern car. Since
1998 yaw rate sensors produced by silicon micro
machining have been used in the Electronic
Stabilization Program - ESP®. The technological basis for this was
created by the development of the deep reactive ion etching process
for silicon wafers. The consequent progress in the field of MEMS based
sensors led to flexible and cost-effective Inertial Sensor Cluster, now
found in automobiles, mobile phones, tablets, and control units of
video game consoles. Reducing the emission of a combustion engine
car is a challenging task. The first steps were taken nearly 40 years ago,
when the lambda sensor was introduced to control the fuel-air-mixture
in the engine. Today, several connected sensors measure and control
the emission of CO, CO2, NOx and particles. Whereas silicon based
sensors typically utilize vacuum based processes (sputtering, PECVD,
PVD and ALD) the modern exhaust sensors need a combination of
adjacent techniques like thermal spraying without plasma, printing and
casting technologies. With the continued connection of these sensors,
interconnection will drive the technology development and the market
in the next years.
11:20 a.m. MED-5 Development of Effective QCM Biosensors by
Cyclopropylamine Plasma Polymerization and Antibody Immobilization
using Cross-Linking Reactions
Sponsored Student Presentation E. Makhneva1,2, A. Manakhov1, L. Zajíčková1,2, P. Skládal3
European Institute of Technology (CEITEC), Masaryk University, Brno, Czech Republic
2
Faculty of Science, Masaryk University, Brno, Czech Republic,
3
RG Nanobiotechnology, Masaryk University, Brno, Czech Republic
1
11:40 a.m. MED-6 Evaluating True Coating Properties from an Indentation
Measurement Series – A New Combination of Calotte Grinding and
Indentation Tests
N. Bierwisch, N. Schwarzer
Saxonian Institute of Surface Mechanics SIO, Ummanz/Rügen, Germany
Large Area Coatings
Grand Ballroom E
Moderator: Harald Hagenström, VON ARDENNE GmbH, Germany
9:20 a.m. L-10 From Lab to Production, Examples for Technology Transfer
of PVD-, CVD- and Atmospheric Pressure Plasma Processes
Invited Talk V. Sittinger, L. Schäfer, M. Armgardt, M. Höfer, M. Thomas, M. Eichler, A. Laukart, M. Vergöhl, S. Bruns, T. Zickenrott, A. Pflug, C.-P. Klages, G. Bräuer
Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany
10:00 a.m. L-11 Silver - One of the Last Frontiers for Rotatable Targets: Cold
Spray Technology and Economic Considerations
A. Seapan1, T. Bruha2
1
SAFINA Materials Inc, Conroe, TX
2
SAFINA a.s., Vestec, Czech Republic
10:20 a.m. – 10:40 a.m. – Break
10:40 a.m. L-12 On-line Adjustable Magnetics in Rotatables for Improved
Layer Uniformity
Coatings and Processes for Biomedical and
Environmental Applications
N. De Wilde, I. Van de Putte, W. De Bosscher Soleras Advanced Coatings, Deinze, Belgium
Moderator: David Glocker, Isoflux Incorporated
D. Christie, J. Pankratz, B. Kowal, H. Walde Advanced Energy Industries, Inc., Fort Collins, CO
Grand Ballroom G
11:00 a.m. L-13 Large Area Coating: Solutions and Opportunities from
High Power Pulsing
9:20 a.m. MED-1 3D Electrospun Scaffolds for Vascular Graft Applications:
Fine Tuning of Properties by Plasma-Assisted Etching and Coating
11:20 a.m. L-14 Ensure High Deposition Rate and Excellent Film Quality
with Mid-Frequency Power Supplies
SVC Foundation Scholarship Recipient H. Savoji1,2,4, M. Maire4, A. Hadjizadeh3, A. Ajji1,3, S.
Lerouge4,5, M.R. Wertheimer1,2
1
École Polytechnique de Montréal, Institute of Biomedical Engineering, Montreal, Canada
2
École Polytechnique de Montréal, Department of Engineering Physics, Montreal, Canada
3
École Polytechnique de Montréal, Department of Chemical Engineering, Montreal, Canada
4
Centre Hospitalier de l’Université de Montréal, Laboratory of Endovascular Biomaterials, Research Centre, Montreal, Canada
5
École de Technologie Supérieure, Montreal, Canada
U. Richter TRUMPF HUETTINGER GmbH + Co. KG, Freiburg, Germany
11:40 a.m. L-15 Raising the Bar for Oxide Deposition Rates
D. Pelleymounter Advanced Energy Industries, Northfield, MN
12:00 p.m. L-16 Achievements with Bipolar Power Supplies in Dual
Magnetron Processes
K. Ruda, P. Ozimek, P. Lesiuk, A. Klimczak TRUMPF Huettinger Sp. z o.o., Zielonka, Poland
9:40 a.m. MED-2 Characterization of Titanium Nitride Thin Films Deposited
on Nylon 6 Nanofibers Substrates by High Vacuum Magnetron Sputtering
and Titanium Nitride Nanotubes Manufacture
Emerging Technologies
D.M. Mihut1, K. Lozano2, C. Hilario2
1
Mechanical Engineering Department, Mercer University, Macon, GA
2
Department of Mechanical Engineering,University of Texas Pan American, Edinburg, TX
Moderators: Chris Stoessel, Eastman Chemical Company and Manuela Junghähnel, Fraunhofer
Institute for Electron Beam and Plasma Technology FEP, Germany
10:00 a.m. MED-3 Development of Nanostructured CrN/NbN Coatings for
Medical Prosthesis Using HIPIMS
9:20 a.m. E-5 Thin Film Process Control and Optimization through
Predictive Modeling
P.Eh. Hovsepian1, A.P. Ehiasarian1, Y. Purandare1, A. Sugumaran1, I. Khan2
Materials and Engineering Research Institute, Sheffield Hallam University, Sheffield, United
Kingdom
2
Biomet Europe, Swindon, United Kingdom
1
10:20 a.m. – 10:40 a.m. – Break
Moderator: Hana Baránková, Uppsala University, Sweden
10:40 a.m. MED-4 PVD for Medical Device Applications
Invited Talk R. Radhakrishnan Medtronic, Inc., Santa Clara, CA
12 Society of Vacuum Coaters
2015 TECHCON Final Program
Grand Ballroom F
G. Atanasoff, C. Metting AccuStrata, Inc., College Park , MD
9:40 a.m. E-6 Thin Film Coating Process Calibration by Index Dispersion
Enhanced Monitoring
W.E. Rodgers, L.S. Ring Eddy Company, Apple Valley, CA
10:00 a.m. E-7 Improvement of Optical Coating Properties Deposited by
Reactive Electron Beam Evaporation Processes with Closed Loop Reactive
Gas Control
F. Papa1, V. Bellido-Gonzalez2, D. Mongahan2
1
Gencoa Ltd., Davis, CA
2
Gencoa Ltd. Liverpool, United Kingdom
Tuesday . April 28
10:20 a.m. – 10:40 a.m. – Break
10:40 a.m. E-8 Operation of a Combined Sputter Deposition and Ion
Source
D. Glocker1 and R. Belan2
1
Isoflux Incorporated, Rochester, NY
2
Kurt J. Lesker Company, Jefferson Hills, PA
11:00 a.m. E-9 Circular Ion Sources for Plasma Enhanced Atomic Layer
Deposition Applications
V. Bellido-Gonzalez1, D. Monaghan1, H. Li1, F. Papa2, H.D. Ngo3,4, P. Mackowiak5
1
Gencoa Ltd., Liverpool, United Kingdom
2
Gencoa Ltd., Davis, CA
3
University of Applied Sciences Berlin, Berlin, Germany
4
Fraunhofer Institut IZM, Berlin, Germany
5
TU Berlin, Berlin, Germany
11:20 a.m. E-10 Characterization of a High-Throughput Batch Fixture for
Atomic Layer Deposition
C.A. Outten, J.R. Abiva, D.W. Konopka Denton Vacuum, Inc., Moorestown, NJ
11:40 a.m. E-11 A New Auto Frequency Tuning Algorithm
C.H. Bock, H. Windisch, F. Freiburger
TRUMPF Huettinger GmbH + Co. KG, Freiburg, Germany
Tuesday PM . April 28
SVC Exhibit Opens!
12:00 p.m. – 6:00 p.m. Exhibit Hall
“Grab and Go” Lunch for Sale
12:00 p.m. - 1:30 p.m. Exhibit Hall
Specialty Coffee Station
12:30 p.m. - 4:30 p.m. Exhibit Hall
Sponsored by Plansee, USA, LLC.
Protective, Tribological and Decorative Coatings
Theater
Moderator: Martin Keunecke, Fraunhofer Institute of Surface Engineering and Thin Films IST, Germany
12:30 p.m. T-8 Multilayer PVD Coatings with High Corrosion Resistance at
High Temperatures
J.A. García1, S. Mato2, I. Ciarsolo1, F.J. Pérer Trujillo2, J. Barriga1
1
IK4-TEKNIKER, Eibar, Spain
2
Complutense University of Madrid, Madrid, Spain
Protective, Tribological and Decorative Coatings
12:50 p.m. T-9 Nano-Grained Hard Protective Titanium Carbide Coatings
Prepared by PECVD
Moderators: Ronghua Wei, Southwest Research Institute and Tobias Brögelmann, RWTH Aachen
University, Germany
Sponsored Student Presentation J. Lengaigne1, E. Herrera1, A. Raveh1,2, E. Bousser1,
L. Martinu1, J.E. Klemberg-Sapieha1
1
École Polytechnique de Montréal, Department of Engineering Physics, Montréal, Canada
2
Rotem Industries Ltd., Advanced Coatings Center, Arava, Israel
Theater
9:20 a.m. T-1 From 3D to 2D in MAX Phases as the Natural Ternary
Nanolaminates
Invited Talk V. Vishnyakov
University of Huddersfield, Huddersfield, United Kingdom
10:00 a.m. T-2 Effects of Surface Treatments and Coatings on Tribological
Performance of Ti-6Al-4V in the Mixed Fretting and Gross Slip Regimes
D. Cressman, B. Tury, G.L. Doll
Timken Engineered Surfaces Laboratories, The University of Akron, Akron, OH
10:20 a.m. – 10:40 a.m. – Break
10:40 a.m. T-3 Protective Hard ZrN-TiN Multilayer and Nanolaminate
Coatings
A. Raveh1,2, Z. Rożek1,3, T. Poirié1, E. Herrera1, E. Bousser1, L. Martinu1, J.E. Klemberg-Sapieha1
1
Department of Engineering Physics, École Polytechnique Montréal, Montreal, Canada
2
Advanced Coatings Center, Rotem Industries Ltd., Arava, Israel
3
Institute for Nanomaterials, Advanced Technologies and Innovation, Technical University of Liberec, Liberec, Czech Republic
11:00 a.m. T-4 Modified Diamond-Like Carbon Coatings (a-C:H:X) for
Anti-Fouling Applications
M. Keunecke1, I. Bialuch1, M. Weber1, C. Stein1, K. Bewilogua1, G. Bräuer 2
1
Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany
2
Institut für Oberflächentechnik, Technische Universität Braunschweig, Braunschweig, Germany
11:20 a.m. T-5 Influence of Precursor Ratio on the Tribological and
Tribochemical Performance of Microwave PECVD Hydrogenated Diamondlike Carbon Films
H. Zhao1, C. Wang1, D. Scurrb2, T. Liskiewicz1, I. Kolev3, A. Neville1
1
University of Leeds, Institute of Functional Surfaces (iFS), School of Mechanical Engineering, Leeds, United Kingdom
2
University of Nottingham, School of Pharmacy, Nottingham, United Kingdom
3
IHI Hauzer Techno Coatings, Venlo, Netherlands
11:40 a.m. T-6 Industrial Microwave Carbon-Based Coatings on Plastic and
Metal Substrates
I. Kolev1, D. Doerwald1, H. Zhao2, A. Nevile2, R. Tietema1, J. Landsbergen1
1
IHI Hauzer Techno Coating, Venlo, The Netherlands
2
School of Mechanical Engineering, University of Leeds, Leeds, United Kingdom
1:10 p.m. T-10 The Influence of TiC Buffer Layers on the Structure and
Mechanical Performance of Diamond Films on Cemented Carbide
M. Liu1, T. Zhu1, Y. Chen1, J. DiBattista2, E. Chan2, Y. Yang2
1
Department of Electronic Information Materials, Shanghai University, Shanghai, China,
2
Darly Photonics Composite Materials (Shanghai) Corp., Shanghai, China
Symposium Forum: A View to the Future - Coatings and
Materials in the Interconnected Age
12:40 p.m. – 2:00 p.m. Grand Ballroom E
Forum Moderators: Carl Lampert, Star Science; Ric Shimshock, MLD Technologies LLC; Chris
Stoessel, Eastman Chemical Company; Michael Andreasen, Vacuum Edge; David Sanchez, Materion
Advanced Chemicals
This panel will give us a view of new coating materials and challenges the
electronics industry expects to face. The role of coating processes is huge
with developments being made in pulse and ion deposition, spatial ALD, 3D
fabrication, and printed electronics. Equally big are the new materials including:
2D materials such as graphene, oxide and organic electronics, energy
harvesters, flexible polymers and glass. Key Industries are touch displays,
electronics, mobile computing, cell phones, smart cards, batteries and portable
power sources. The Forum will be open to questions from the audience.
Bettina Weiss, Vice President, Product Management &
Business Development, SEMI
Ms. Weiss will provide a broad semiconductor market outlook
with a brief excursion into the relationship between 200mm
and the IoT.
Harry Zervos, Principal Analyst & Business Development
Manager, North America, IDTechEx
Harry Zervos will explore vacuum deposition on new
substrates for flexible electronics, and preview new markets
that will define device trends in the next decade.
Paul Kallmes, Chief IP Officer, LUXeXceL Inc., The Netherlands
Paul Kallmes will present the ways that the development and
manufacturing of lenses has been disrupted by hybrid 3D
printing processes.
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
13
12
12
:1
:1
0
0P
M
PM
AM
11
11
:3
:5
0
0
AM
AM
:1
10
11
:5
0
AM
0
AM
:3
E-3
E-2
Domaradzki
Subrahmanyam
E-4
Domnick
P-3
Kaabeche
P-4
Fernandez
P-5
Costa Pinto
Grand
Ballroom F
0
PM
0
12
11
:1
12
T-3
Raveh
T-4
Keunecke
T-5
Zhao
T-6
Kolev
L-12
De Bosscher
L-13
Christie
L-14
Richter
Pelleymounter
L-10
Sittinger Invited
L-11
Seapan
Break
10:20-10:40
a.m.
Emerging Technologies
Carsten Herweg
E-8
Glocker
E-9
BellidoGonzalez
E-10
Outten
E-11
Bock
MED-5
Makhneva*
MED-6
Bierwisch
Robert Bosch GmbH
E-5
Atanasoff
8:30 - 9:10 a.m.
Theater
E-6
Rodgers
E-7
Papa
Grand
Ballroom G
PM
0
:0
12
:4
11
11
Grand
Ballroom E
Exhibit Hall
AM
0
AM
:2
:0
0
0
AM
0
10
11
:0
10
9:
:4
AM
0
AM
40
AM
9:
10
9:
20
AM
AM
30
8:
MED-4
Radhakrishnan Invited
AM
MED-3
Hovsepian
AM
MED-2
Mihut
0
MED-1
Savoji
TAC Breakfast
Meeting
7:00-8:15 AM
L-16
Ruda
L-15
Coatings and Processes for Biomedical
and Environmental Applications
Grand
Ballroom G
:2
Grand
Ballroom F
Theater
Large Area Coatings
Symposium on Coating
Technologies for the
Interconnected Age
Grand
Ballroom E
T-2
Doll
Tuesday Afternoon
T-1
Vishnyakov Invited
Keynote Presentation
11
:0
0
:4
:2
Gra
Grand
Ballroom E
PM
AM
AM
0
AM
:0
11
10
11
:4
:0
10
0
AM
0
0
AM
0
AM
40
9:
9:
20
10
9:
AM
AM
AM
30
P-2
Zajickova
AM
P-1
Zhang Invited
10
Tuesday Morning
10:50 - 11:10
a.m.
IA-8
Graham Invited
Theater
Protective, Tribological and
Decorative Coatings
Theater
Hyatt 2nd Floor
Meeting Rooms
Break
Plasma Processing
9:00 - 9:40 a.m.
Theater
8:
Great America
(Lobby, J, KX)
10
E-1
Gazicki-Lipman
IA-4
Garner Invited
Monday Afternoon
Elvira Fortunato
Technology Forum
Breakfast
7:00-8:15 AM
0
AM
:1
10
Emerging Technologies
Universidade Nova de Lisboa
and CEMOP/Uninova
Grand
Ballroom F
IA-3
Schwarz
IA-2
Winkler
:2
Theater
0
AM
50
9:
40
9:
9:
Annual Business
Meeting
8:30-9:00 a.m.
IA-1
Coulson Invited
Symposium on Coating
Technologies for the
Interconnected Age
10
Grand
Ballroom E
CONFERENCE SCHEDULE AT A GLANCE
Coating Technologies for
the Interconnected Age
Keynote Presentation
Theater
Monday Morning
AM
AM
00
30
8:
Great America
(Lobby, J, KX)
AM
7:00-8:15 AM
2015
TECHCON
Technology Forum
Breakfast
P-8
Siemers
Lommatzsch
Exhibitor Meeting
V-1
V-2
V-3
V-4
V-5
V-6
11:20 11:30 11:40 11:50 12:00 12:10
0
:0
12
P-12
Walton
P-10
J.S. Lee
Vendor Innovators Showcase
12
:
20
:0
0
PM
PM
AM
12
10
10
:4
0
AM
:2
0
AM
10
:
Grand
Ballroom G
Exhibit Hall
The Exhibit is Open! 10:00 a.m. -5:00 p.m.
00
AM
40
AM
9:
10
9:
20
AM
AM
30
P-11
Polak
L-7
Köckert
L-19
9:00 a.m. -10:00 a.m. Grand Ballroom D
8:
EC-11
J. Liu
11
L-18
Jarvis
AM
L-17
Melzig
EC-9
Granqvist
P-9
Zajickova
Large Area Coatings
8:30 - 9:10 a.m.
Theater
EC-8
Kailasam Invited
Wednesday Afternoon
10:20-10:40
a.m.
AM
P-7
Morse
Break
O-6
Foo*
0
P-6
Weichsel
EC-7
Tinkham
O-5
Beck
AM
Plasma Processing
EC-6
Creatore
O-4
Tompkins Invited
:0
0
Commonwealth
Scientific and Industrial
Research Organization
and Queensland
University of Technology
Exhibit
Hall
O-3
Martinu
11
EC-5
Woodhouse Invited
Kostya Ostrikov
Grand
Ballroom G
O-2
Alajlani
Coatings for Energy Conversion and Related Processes
:4
0
Grand
Ballroom E
Grand
Ballroom F
O-1
Bruns
Symposium on Coating
Technologies for the
Interconnected Age
11
:2
Keynote Presentation
9:
Wednesday Morning
Theater
PM
Optical Coatings
Keynote Presentation
Symposium on Coating
Technologies for the
Grand
Ballroom F
Interconnected Age
Neil Morrison
Applied Materials
Grand
Ballroom G
O-7
Macleod
O-8
Theiss
O-9
Zoeller
Protective, Tribological and Decorative Coatings
T-12
Mandal*
T-13
Madocks
IA-11
Geldhauser Invited
O-10
Barney
T-7
Biasoli de Mello Invited
O-11
Neubert
O-12
Dickey
T-16
Break
10:40 - 11:00
a.m.
T-14
Wang
T-15
Wei
Brögelmann
T-17
Fuchs
W-3
Nehm*
W-4
Creatore
W-5
DiBattista
W-6
Fayet
WebTech Roll-to-Roll Coatings for High End Applications
8:30 - 9:10 a.m.
Grand Ballroom E
14 Society of Vacuum Coaters
IA-9
van Mol Invited
W-1
Fahlteich
2015 TECHCON Final Program
W-2
Tamagaki
Thursday Afternoon
Thursday Morning
Optical Coatings
Grand
Ballroom E
Grand
Ballroom E
SV
Grand
Ballroom F
For E
Conf
1
Grand
Ballroom G
L-1
Veerasamy Invited
Saxonian Institute
of Surface Mechanics SIO
HP-4
Carreri*
HP-5
Barth
L-4
Schwab
3:40 - 4:00
p.m.
L-5
Rank
HP-6
Rezek
HP-7
Gerdes
PM
PM
PM
20
5:
5:
00
PM
4:
4:
20
40
PM
PM
00
PM
40
Exhibit Reception
T-10
DiBattista
All TechCon Conference Registrants and
Visit the Exhibit!
Open until 6:00 p.m.
Exhibitors Receive a Complimentary Drink Ticket
Meet the Experts Corner
Deposition Equipment and
Process Problem Solving
3:30 p.m. - 4:30 p.m. Room 210
12:00 p.m. - 1:30 p.m.
Exhibit Hall
Poolside Networking Mixer
Poster Session Oral Presentations
6:00 p.m. - 9:00 p.m.
Hyatt Regency Terra Courtyard
2:30 p.m. - 3:30 p.m. Grand Ballroom G
Donald M. Mattox
Tutorial
SVC Hosted Lunch
V-7
1:50
V-8
2:00
V-9
2:10
V-10
2:20
V-11
2:30
12:40 - 1:20 p.m.
Grand Ballroom E
PM
4:
40
PM
4:
20
PM
PM
3:
Heuréka! Session
O-14
Willey
O-15
Fulton
O-16
Luca
O-17
Müller
T-21
Vergason
T-23
Gonzalez*
Protective, Tribological and Decorative Coatings
T-18
Kavanagh
3:30 p.m. - 5:00 p.m. Exhibit Hall
20
PM
0
3:
0
40
2:
2:
2:
PM
PM
20
PM
00
1:
40
1:
20
PM
PM
PM
:4
0
12
Beer Blast
Optical Coatings
JDSU
00
Best Poster Award
Presentation
4:00 p.m. Exhibit Hall
V-12
2:40
The Exhibit is Open! 10:00 a.m. - 5:00 p.m.
Fred Van Milligen
4:
Vendor Innovators Showcase
Theater
Special Lunchtime
Presentation
PM
40
Meet the Experts Corner
1:00 - 1:40 p.m.
O-13
Schulz
26 - Brown
28 - Vetushka
29 - Weng
30 - C.H. Chang
Transparent Conductive Materials (TCM)
from ITO to Alternatives
2:00 p.m. - 3:00 p.m. Room 210
Lawrence Berkeley
National Laboratory
Tickets provided to Exhibitors
and Full Conference Registrants
22 - Mihut
23 - B. Dong
24 - K.H. Nam
25 - Cramer
Visit the Exhibit!
Open until 5:00 p.m.
André Anders
12:00 - 1:30 p.m.
Exhibit Hall
18 - Linss
19 - Kudriavtsev
20 - J. Xie
21 - Figueroa
3:
20
3:
3:
2:
00
40
PM
PM
14 - Elhadj
15 - Khvostikova
16 - Y. Chen
17 - Felmetsger
PM
10 - Ratova
11 - Potts
12 - Kumbies
13 - Kelly
PM
00
2:
1:
1:
00
40
PM
PM
6 - J.S. Lee
7 - Heintze
8 - Carley
9 - Indeir
PM
2 - Bierwisch
3 - Fuchs
4 - Grobelny
5 - Kalisz
Exhibit Hall
3:30-6:00 p.m.
Poster - Name
3:30 p.m. - 6:00 p.m. in the Exhibit Hall (see details below)
20
Poster Session
Poster Session
12:00 p.m. -6:00 p.m.
2:
The Exhibit is Open!
M
20
HP-9
Tian
L-9
Berg
4:45 p.m. - 6:00 p.m. Exhibit Hall
T-9
Lengaigne*
M
5:
HP-8
Ehiasarian
Grab and Go CashLunch
12:20 - 12:40 p.m.
Grand Ballroom E
PM
L-8
Lippens
7:00 p.m. Theater, see details below.
3:
3:
3:
20
00
20
2:
PM
PM
PM
PM
Monday, April 27
5:30-6:45 p.m. Hyatt Regency | Magnolia See page 5 for details.
12:40 p.m. - 2:00 p.m. Grand Ballroom E
Exhibitors and Full
ference Registrants
EC-4
M. Chen
Heuréka! Session Monday, April 27
Young Members Group Happy Hour
00
PM
1:
HP-1
Jouan Invited
Forum: A View to the Future Coatings and Materials in the Interconnected Age
VC Hosted Lunch
5:
40
4:
Oberste-Berghaus
Protective, Tribological
and Decorative Coatings
T-8
Garcia
00
PM
PM
L-20
L-6
Seyfert Invited
4:
HP-3
Y.H. Chen
2:
50
PM
1:
1:
10
:5
12
30
PM
PM
0
PM
0
L-3
Heinss
PM
HP-2
Bandorf
Monday Evening
:3
EC-3
Helmersson Invited
Break
L-2
BellidoGonzalez
40
Theater
12
EC-2
Mount
HIPIMS
12:50 -1:30 p.m.
M
EC-1
Ulrich
Large Area Coatings
Norbert
Schwarzer
1:00 a.m. - 1:30 p.m.
Hyatt Foyer
IA-7
ter Heerdt Invited
2:
ab and Go Cash
Lunch
IA-5
Zervos Invited
4:
00
4:
3:
Coatings for Energy Conversion and Related Processes
Coating Technologies for the Interconnected Age
Donald M. Mattox
Tutorial
20
PM
PM
40
PM
3:
3:
00
20
PM
PM
40
2:
2:
2:
00
20
PM
PM
1:
30
1:
40
PM
PM
12
:5
0
M
PM
Awards Ceremony 6:30 p.m. Grand Ballroom E
Welcome Reception 7:30 p.m. Mission City Ballroom B5-B4
Sunday Evening
T-19
Banerji
T-20
Oje
T-24
Petry*
WebTech Roll-to-Roll Coatings for High End Applications
IA-10
Berland Invited
W-7
Barrow
W-8
Steiner*
W-9
W-10
Wickens505-856-7188
Kozlov
Monday, April 27
Theater
7:00 p.m. H-1 Schütte
7:20 p.m. H-2 Bernick
7:40 p.m. H-3 Decker
8:00 p.m. H-4 Glocker
8:20 p.m. H-5 Glück
8:40 p.m. H-6 Morse
*Sponsored Student Presentation
» Fax 505-856-6716 » [email protected] » www.svc.org
15
Technical Program
TECHCON 2015
Poster Presentations
2:30 p.m. - 3:30 p.m. Grand Ballroom G
Moderators: Claes Granqvist, Uppsala University, Sweden; Ralf Bandorf, Fraunhofer Institute for
Surface Engineering and Thin Films IST, Germany; Ric Shimshock, MLD Technologies, LLC
Oral Presentation Session: There will be a series of short presentations by
poster authors who wish to present their work.
Poster-12 Consequences of Roll-Barrier Contact in Roll-to-Roll Processing
of a Permeation Barrier
H. Klumbies1, S. Kreher1, J. Fahlteich2, F. Nehm3, L. Mueller-Meskamp3, P. Schlott1,
S. Van Eek1, T. Winkler1
1
FHR Anlagenbau GmbH, Ottendorf-Okrilla, Germany
2
Fraunhofer Institute for Electron Beam and Plasma Technology FEP, Dresden, Germany
3
Institut fuer Angewandte Photophysik, TU Dresden, Dresden, Germany
Poster-13 Aluminium Oxide Barrier Layers and their Conversion for
Packaging Applications
Poster Session
3:30 p.m. – 6:00 p.m. in the Exhibit Hall
Poster-2 How to Design Contact Experiments Properly to Test the
Adhesion Performance of a Coating Substrate System
N. Bierwisch, N. Schwarzer
Saxonian Institute of Surface Mechanics SIO, Ummanz, Germany
Poster-3 Quantifying Time-Dependent Mechanical Behavior of ViscoElastic Materials or Materials at Elevated Temperatures
M. Fuchs, N. Bierwisch, N. Schwarzer
Saxonian Institute of Surface Mechanics, Ummanz, Germany
Poster-4 Nanocoatings for Corrosion Protection of Titanium Alloy in
Aggressive Environment Containing Fluoride Ions
M. Grobelny1, M. Kalisz1, M. Sochacki2, J. Szmidt2
1
Motor Transport Institute, Warsaw, Poland
2
Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Warsaw, Poland
Poster-5 Comparison of Structural, Mechanical and Corrosion Properties of
Thin Graphene/TiO2 Hybrid Systems Formed on Ti-Al-V Alloy in Biomedical
Applications
M. Kalisz1, M. Grobelny1, M. Mazur2, D. Wojcieszak2, M. Dominik1,4, M. Świniarski3,
J. Domaradzki2, D. Kaczmarek2
1
Motor Transport Institute, Centre for Material Testing and Mechatronics, Warsaw, Poland,
2
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wroclaw, Poland
3
Faculty of Physics, Warsaw University of Technology, Warsaw, Poland
4
Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Warsaw, Poland
Poster-6 Characterization and Study of Gas Barrier Property Using
PECVD of Silicon Nitride Film by Radio Frequency (40MHz) Plasmas at Low
Temperature
J.S. Lee, K.S. Shin, S.B. Jin, J.G. Han
Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Korea
Poster-7 Square Wave or Sine Wave: Choice of Power Supply in MF
Sputtering
C. Struller1,2, P. Kelly1, N. Copeland2, V. Tobin3, H. Assender3, C. Holliday4, S. Read4
Surface Engineering Group, Manchester Metropolitan University, Manchester, United Kingdom
2
Bobst Manchester Ltd., Heywood, United Kingdom
3
Department of Materials, University of Oxford, Oxford, United Kingdom
4
Innovia Films Ltd., Wigton, United Kingdom
1
Poster-14 Optical Damage Performance of Widegap Semiconductor
Transparent Electrodes
S. Elhadj1, J. Bude1, J. Adams1, M. Menor2, J.H. Yoo1, T. Olson1, J. Lee1, A. Samanta3, C. Stolz2
1
Materials Science Division, Lawrence Livermore National Laboratory, Livermore, CA
2
Laser Systems Engineering, Lawrence Livermore National Laboratory, Livermore, CA
3
Lawrence Livermore National Laboratory, Physics Division, Livermore, CA
Poster-15 Flash Lamp Annealing of Large Area Substrates via Stitching of
Exposure Fields
H. Gross, G. Haasemann, O. Khvostikova, VON ARDENNE GmbH, Dresden, Germany
Poster-16 Influence of Sputtering Atmosphere on Crystal Quality and
Electrical Properties of Zirconium Aluminum Nitride Thin Films
G. Ke1, Y. Tao1, Z. He1, Y. Bian1, Y. Chen1, J. DiBattista2, E. Chan2 and Y. Yang2
Department of Electronic Information Materials, School of Materials Science and Engineering, Shanghai University, Shanghai, China
2
Darly Photonics Composite Materials (Shanghai) Corp., Shanghai, China
1
Poster-17 PVD Modules for Predeposition RF Plasma Etch and AC Reactive
Sputtering of Piezoelectric AlN Thin Films for Electroacoustic Devices
V. V. Felmetsger OEM Group Inc., Gilbert, AZ
Poster-18 Comparison of the Large-Area Reactive Sputter Processes of
ZnO:Al and ITO Using Industrial Size Rotatable Targets
V. Linss VON ARDENNE GmbH, Dresden, Germany
Poster-19 Linear Scanning Magnetron Array – Providing Deposition
Uniformity with Improved Efficiency
A. Riposan, D. Brown, V. Kudriavtsev, C. Smith, T. Bluck, Intevac, Santa Clara, CA
Poster-20 Fast Digital-Controlled Multi-Step Process of Ultra-Smooth
Diamond-Like Carbon Thin Films
J. Xie, J. Cho, P. Leahey, T. Bluck, A. Zanetto, Intevac Inc., Santa Clara, CA
M. Heintze1, S. Ulrich2
1
TRUMPF Hüttinger GmbH + Co. KG, Freiburg, Germany
2
Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany
Poster-21 TiCxNy Thin Films for Decorative Applications Produced by
Cathodic Arc Deposition
Poster-8 Design and Testing of a Coating System to Extend the Use of
Commodity Plastics in Engineering Applications
1
S. Carley, A. Neville, H. Zhao
Institute of Functional Surfaces (iFS), University of Leeds, Leeds, United Kingdom
Poster-9 Evaluating the Corrosion Behaviour of PVD Al-Based Coatings by
Characterising the Relaxation Time of the Open Circuit Potential in (AC)DC/
AC Cyclic Tests
F. Indeir, A. Matthews and A. Leyland
Department of Materials Science and Engineering, University of Sheffield, Sheffield, United
Kingdom
Poster-10 Co-Sputtered Bismuth Tungstate Coatings with Visible-Light
Photocatalytic Activity
M. Ratova, G.T. West, P.J. Kelly
Surface Engineering Group, School of Engineering, Manchester Metropolitan University,
Manchester, United Kingdom
Poster-11 High Speed, High Resolution Coating Inspection
T.A Potts Dark Field Technologies Inc., Orange, CT
16 Society of Vacuum Coaters
2015 TECHCON Final Program
L. Milschi1, I. Belahsen1,3, G. C. Lain2, E.R. Petry1, F. Cemin1, J. Catafesta1, C.A. Figueroa1,2
Centro de Ciências Exatas e Tecnologia, Universidade de Caxias do Sul, Caxias do Sul-RS, Brazil
2
Plasmar Tecnologia Ltda., Caxias do Sul-RS, Brazil
3
Ecole Européenne d’Ingénieurs en Génie des Matériaux, Nancy, France
Poster-22 Antibacterial Response of Structures Consisting of Silver
Nanoparticle Coated and Ampicillin Incorporated Polymer Nanofibers
H. Cortez1, R. Reyna1, D. Mihut2, K. Lozano1, L. Materon3
Mechanical Engineering Department, The University of Texas Pan American, Edinburg, TX
2
Mechanical Engineering Department, Mercer University, Macon, GA
3
Biology Department, The University of Texas Pan American, Edinburg, TX
1
Poster-23 PECVD Fabricated Novel Boron Carbide/Aromatic Composite
Materials for Neutron Voltaic and Device Applications
SVC Foundation Scholarship Recipient B. Dong1, R. James1, E. Echeverria2, M.S. Driver1,
P.A. Dowben2 and J.A. Kelber1
1
Department of Chemistry, University of North Texas, Denton, TX
2
Department of Physics and Astronomy, The Nebraska Center for Materials and Nanoscience, University of Nebraska, Lincoln, NE
Poster-24 The New Evaporation System for Steel Strip Coating
K.H. Nam, T.Y. Kim, Y.H. Jung
POSCO Technical Research Laboratories, Gwangyang-si, South Korea
Tuesday - Wednesday . April 28-29
Poster-25 Thermoelectric Properties and Film Morphology of Si/SiC ThinFilm Amorphous Multilayers Grown By Ion Beam Sputtering
SVC Foundation Scholarship Recipient C. Cramer , C. Farnell , C. Farnell , R. Geiss , and
J.D. Williams1
Department of Mechanical Engineering, Colorado State University, Fort Collins, CO
2
Department of Chemistry, Colorado State University, Fort Collins, CO
1
1
1
Wednesday AM . April 29
2
1
Poster-26 Sputter Deposition of High Density Diamond-Like-Carbon for
Scratch Protection of Touch Panel Cover Glass
Keynote Presentation
Symposium on Coating Technologies for the Interconnected Age
8:30 a.m. Theater
Moderator: Mariadriana Creatore, Eindhoven University of Technology, The Netherlands
D.W. Brown Intevac, Inc., Santa Clara, CA
Graphene Micro-Webs and Other Things: 3D
Nanoscale Connectivity for an Interconnected
World
Kostya Ostrikov, Commonwealth Scientific and Industrial
Poster-28 Full Face Erosion Planar Cathodes as a Low Cost “Cylindrical
Rotatable” R&D Tool
A. Vetushka1, D. Monaghan1, V. Bellido-Gonzalez1, R. Brown1, A. Azzopardi1, H. Li1, F. Papa2
1
Gencoa Ltd., Liverpool, United Kingdom
2
Gencoa in USA, Davis, CA
Poster-29 Comparison of Aluminum Zinc Oxide and Indium Tin Oxide for
Transparent Conductive Oxide Layer in Liquid Crystal Display Devices
L. Weng1, A. Varanytsia1, T.-C. Lin1, J. Yang2, D. Rooney2, R. McGinnis2, L. Shunk2, L.-C. Chien1
1
Liquid Crystal Institute, Chemical Physics Interdisciplinary Program, Kent State University, Kent, OH
2
SCI Engineered Materials, Columbus, OH
Poster-30 Hydrophobic Coating of the Cover-Glass Surface by Using a
Rotating Plasma Module
C.-H. Chang, K.-Y. Lin, K.-F. Lee, S.-C. Lin
Advance Machinery Technology Division, Industrial Technology Research Institute,
Hsinchu, Taiwan
Meet the Experts Corner
3:30 p.m. - 4:30 p.m. Room 210
Deposition Equipment and Process Problem Solving
Panel Leader: David Glocker, Isoflux Incorporated
Panel members include: Donald M. Mattox, Management Plus, Inc., Ralf Bandorf, FraunhoferInstitute for Surface Engineering and Thin Films IST, Germany, and Frank Papa, Gencoa Ltd.
Successful thin film coatings often depend on complex combinations of
mechanical, electrical, physical and chemical processes. This interactive
session will focus on how to sort through the situation when something
goes wrong.
Exhibit Reception
4:45 p.m. – 6:00 p.m. Exhibit Hall
All TechCon Conference Registrants and Exhibitors Receive a
Complimentary Drink Ticket
Research Organization, Lindfield, Australia and Queensland
University of Technology, Brisbane, Australia
Essential electronic, optical, and magneto-optical components of
functional elements that will enable the “Internet of Things” are
expected to have several highly-unusual properties and features
that will meet several requirements, including excellent connectivity,
ultra-fast responses, unprecedented data storage and processing
capacity, controlled energy harvesting, generation, storage and
release, and several others. Here we consider thin films made of
graphene micro-webs and other plasma-produced nanomaterials
and explore their unique three-dimensional webs and other
arrangements that enable nanoscale connectivity, energy storage,
sensing and other functionalities. Unique physical and chemical
properties of thesenanomaterials are discussed and related to the
specifics of vacuum coating technologies used to fabricate them. The
various “things” enabled by the plasma-specific effects represent very
interesting networked microscopic systems both for fundamental
studies and advanced applications in the Interconnected Age.
Coatings for Energy Conversion and Related Processes
Grand Ballroom E
Moderators: Carl Lampert, Star Science and Claes Granqvist, Uppsala University, Sweden
9:20 a.m. EC-5 An Economic Analysis of Photovoltaics versus Traditional
Energy Sources: Where are we Now and Where Might we be in the Near
Future?
Invited Talk M. Woodhouse National Renewable Energy Laboratory, Golden, CO
10:00 a.m. EC-6 Atomic Layer Deposition for Interface Engineering in Dye
Sensitized and Perovskite Solar Cells
Tuesday Evening . April 28
V. Zardetto1, F. Di Giacomo2, T.M. Brown2, A. Di Carlo2, A. D’Epifanio3, S. Licoccia3,
E. Kessels1, M. Creatore1
1
Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands
2
Centre for Hybrid and Organic Solar Energy (CHOSE), University of Rome - Tor Vergata, Rome, Italy
3
Department of Chemical Science and Technologies, University of Rome - Tor Vergata, Rome, Italy
Poolside Networking Mixer
10:20 a.m. EC-7 Enhancement of Electrical and Optical Properties of
Reactively Sputtered ITO Films by Flash Lamp Annealing
6:00 p.m. Terra Courtyard in the Hyatt Regency Santa Clara
All are welcome. Sponsored by Intlvac Thin Film.
C. David1, Y. Zhang1, P. Prunici1, B. Tinkham1, A. Panckow1, A. Kastner2, C. Simons2
1
Solayer GmbH, Kesselsdorf, Germany
2
Heraeus Materials Technology GmbH, Hanau, Germany
10:40 a.m. – 11:00 a.m. – Break Visit the Exhibit - Open 10:00 a.m. - 5:00 p.m.
11:00 a.m. EC-8 Commercialization of Large Area Dynamic Glazing
Invited Talk S. Kailasam View, Inc., Milpitas, CA
11:40 a.m. EC-9 Electrochromics and Thermochromics: Towards a New
Paradigm for Energy Efficient Buildings
C.G. Granqvist The Ångström Laboratory, Uppsala University, Uppsala, Sweden
12:00 p.m. EC-11 Investigation of the Effects of AR Stacks on the Structure,
Optical and Mechanical Properties of Transparent Conductive Oxide Thin Films
J. Liu, H. Wang
State Key Laboratory of Green Building Materials and National Research Center for Glass
Processing, China Building Materials Academy, Beijing, China
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
17
TECHCON 2015
SVC Exhibit Opens!
10:00 a.m. – 5:00 p.m. Exhibit Hall
Technical Program
10:20 a.m. – 11:00 a.m. – Break Visit the Exhibit!
11:00 a.m. O-4 Infrared Spectroscopic Analysis of Thin Films
Invited Talk H. Tompkins1,2,3
1
Consultant, Chandler, AZ
2
Physics Department, New Mexico State University, Las Cruces, NM
3
Physics Department, University of Missouri, Columbia, MO
Plasma Processing
Grand Ballroom F
Moderator: Lenka Zajickova, Masaryk University, Czech Republic
9:20 a.m. P-6 A Novel Magnetron Sputtering ECR Ion Source - An Emerging
Tool for the Production of High Current Metal Ion Beams and Large Area
Surface Processing
T. Weichsel1, U. Hartung1, T. Kopte1, M. Kreller2, A. Silze2, G. Zschornack3,4
1
Fraunhofer Institute for Electron Beam and Plasma Technology FEP, Dresden, Germany
2
DREEBIT GmbH, Grossroehrsdorf, Germany
3
Institute of Solid State Physics, Dresden University of Technology, Dresden, Germany
4
Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-
Rossendorf e.V., Dresden, Germany
11:40 a.m. O-5 Imaging of Impurities and Imperfections, Micro- and
Nanoscaled Pattern on Surfaces and in Films: Microscopic Techniques vs.
Ellipsometry
U. Beck, A. Hertwig, M. Sahre, M. Weise, J.M. Stockmann BAM, Berlin, Germany
12:00 p.m. O-6 Finite-Difference Time-Domain Method for Data Analysis of
Spectroscopic Ellipsometry
Sponsored Student Presentation Y. Foo, J.A. Zapien
Center of Super Diamond and Advance Films (COSDAF) and Department of Physics and
Material Science, City University of Hong Kong, Hong Kong SAR, China
9:40 a.m. P-7 Aspects of RF Power on Rotary Cathodes
P. Morse, R. Lovro, T. Strait Sputtering Components, Inc., Owatonna, MN
Large Area Coatings
10:00 a.m. P-8 Drift Waves in Magnetron Sputtering Plasmas
Grand Ballroom G
10:20 a.m. – 11:00 a.m. – Break Visit the Exhibit!
9:20 a.m. L-17 Holistic Approach of Plasma, Transport and Film Growth
Simulation
M. Siemers, A. Pflug, T. Melzig
Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany
Moderator: Mariadriana Creatore, Eindhoven University of Technology, The Netherlands
11:00 a.m. P-9 Carboxyl-Rich Films Prepared by Maleic Anhydride –
Acetylene Copolymerization Using Atmospheric Pressure Dielectric Barrier
Discharge
L. Zajickova1, A. Manakhov1, M. Michlicek1, M. Elias1, E. Makhneva1, J. Cechal2, D. Pavlinak1
1
Masaryk University, Brno, Czech Republic
2
Brno University of Technology, Brno, Czech Republic
11:20 a.m. P-10 Crystalline AZO Film Synthesis of High Conductivity at
Low Temperature by Particle Energy Control with Diagnostics in Remote
Magnetron Sputtering
Moderator: Brent Boyce, Guardian Industries Corp.
T. Melzig1, A. Pflug1, M. Siemers1, S. Lucas2, P. Moskovkin2, A. Daniel3, M. Jupé4, M. Turowski4
1
Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany
2
Université de Namur, Namur, Belgium
3
Centre de Recherches Métallurgiques (CRM), Liège, Belgium
4
Laser Zentrum Hannover e.V. (LZH), Hannover, Germany
9:40 a.m. L-18 Multi-Scale Mechanical Behaviour of Plasma Electrolytic
Oxide (PEO) Coatings on Aluminium Alloys
A. Jarvis1, A. Yerokhin1, N. Schwarzer2
1
Department of Materials Science and Engineering, University of Sheffield, Sheffield, United Kingdom
2
Saxonian Institute of Surface Mechanics, Ummanz, Germany
J.S. Lee, S.B. Jin, B.B. Sahu, J.B. Kim, M. Kumar, J.G. Han
Department of Advanced Materials Science and Engineering, Sungkyunkwan University,
Suwon, Korea
10:00 a.m. L-19 Deposition of a Release Coatings via an RF Low Pressure
Plasma Process and Comparison to the Plasma Deposition at Atmospheric
Pressure
11:40 a.m. P-11 Hydrogen Radical Generation and Optimization in a
Remote Plasma Source
K. Vissing, M. Ott, P. Bitomsky, U. Lommatzsch
Fraunhofer Institute for Manufacturing Technology and Advanced Materials IFAM, Bremen,
Germany
S. Polak1, D. Carter1, A. Bhoj2, A. Roy2
1
Advanced Energy Industries, Fort Collins, CO
2
ESI US R&D Inc., Huntsville, AL
12:00 p.m. P-12 Controlling the Flux of Reactive Species in Electron Beam
Generated Plasmas
S.G. Walton, D.R. Boris, S.C. Hernández, Tz.B. Petrova, G.M. Petrov
Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC
10:20 a.m. L-7 Layer Stack Diversity for Different Substrates and
Applications
C. Köckert, M. Berendt, VON ARDENNE GmbH, Dresden, Germany
10:40 p.m. – 11:20 p.m. - Break Visit the Exhibit!
Vendor Innovators Showcase
Grand Ballroom G
Optical Coatings
Moderator: Jason Hrebik, Kurt J. Lesker Company
Moderators: Angus Macleod, Thin Film Center Inc. and Robert Sargent, JDSU
11:20 a.m. V-1 Remotely Adjustable Magnet Bar (RAM -Bar™) for In Situ
Uniformity Adjustment
Theater
9:20 a.m. O-1 Mixed Oxides for Optical Functional Coatings Prepared by
Magnetron Sputtering
S. Bruns, T. Zickenrott, M. Vergöhl
Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany
9:40 a.m. O-2 Nanostructured ZNO Films Prepared by Hydro-Thermal
Chemical Deposition and Microwave-Activated Reactive Sputtering
J. Schmeling, R. Lovro, P. Morse, M. Gallentine, T. Strait
Sputtering Components Inc., Owatonna, MN
11:30 a.m. V-2 Advancements in Sputtering Technology
D. Bingaman Kurt J. Lesker Company, Jefferson Hills, PA
Y. Alajlani1,2, C. Zhao1, S. Moh1, D. Gibson1, Y.Q. Fu1, F. Placido1
1
Thin Film Centre, Scottish Universities Physics Alliance (SUPA), University of the West of Scotland, Paisley, United Kingdom
2
Department of Physics, Jazan University, Jazan, Saudi Arabia
11:40 a.m. V-3 Ultrafast Arc Management for High Deposition Rates in
Reactive Magnetron Sputtering
10:00 a.m. O-3 Metrology of Optical Coatings: The R&T Direct Absorption
Method for the Determination of Low Absorption Levels in Dielectric Films
11:50 a.m. V-4 Superimposed Pulse Power-Technology
R. Vernhes and L. Martinu
Department of Engineering Physics, École Polytechnique de Montréal, Montréal, Canada
18 Society of Vacuum Coaters
2015 TECHCON Final Program
P. Wiedemuth, M. Heintze HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany
G. Mark, M. Mark MELEC GmbH, Baden, Germany
Wednesday . April 29
2:30 p.m. V-11 Elastic and Plastic Property Measurement for Thin Films
Using Nanoindentation
12:00 p.m. V-5 New Compact External Mount Rotary End Block for Small
Systems and Higher Packing Density
D. Yang Ebatco, Eden Prairie, MN
S. Williams, D. Crowley, P. Morse, M. Rost, T. Strait Sputtering Components Inc, Owatonna, MN
12:10 p.m. V-6 HS-Group – Your Source for High End Vacuum Coating
Equipment and Service
2:40 p.m. V-12 Minimizing the Influence of External Factors that Affect
Coating Hardness Measured by Nanoindentation
R. Nair Fischer Technology, Inc., Windsor, CT
W. Decker1, R. Hilberg2, K. Schafsteck2
1
Iacten Consulting, Beaver Falls, PA
2
HS-PlasmaTec, Hainburg, Germany
Meet the Experts Corner
2:00 p.m. – 3:00 p.m. Room 210
Transparent Conductive Materials (TCM) from ITO to Alternatives
SVC Sponsored Lunch in the Exhibit Hall
12:00 p.m. – 1:30 p.m.
Lunch tickets provided to Exhibitors and Full Conference Registrants.
Panel Leader: Clark Bright, Bright Thin Film Solutions - 3M Corporate Research Laboratory, retired
Panel members include: Claes Granqvist, Uppsala University Sweden, Elvira Fortunato CENIMATI3N FCT-UNL, Portugal, and Volker Sittinger, Fraunhofer-Institute for Surface Engineering and
Thin Films IST, Germany
Wednesday PM . April 29
Transparent conductive materials (TCM) from ITO to alternatives enable
nearly every electronic device with a display. Plus there are many other
applications for TCM. This interactive session welcomes all questions on TCM.
The Donald M. Mattox Tutorial Program
Frozen Treat Stations
1:00 p.m. Theater
2:00 p.m. Exhibit Hall
sponsored by Vacuum Research Corporation.
Moderator: Chris Stoessel, Eastman Chemical Company
Magnetron Sputtering: An Unfinished Journey,
André Anders, Lawrence Berkeley National Laboratory,
SVC Exhibit Beer Blast!
Berkeley, CA.
Vendor Innovators Showcase
Grand Ballroom G
Moderators: Steve Chiavaroli, Dynavac and Marcel Anaya, DHF Technical Products
1:50 p.m. V-7 CODE Software Generation 4 – Easy, Enhanced and Elegant
Optical Thin Film Analysis and Design
W. Theiss W.Theiss Hard- and Software, Aachen, Germany
2:00 p.m. V-8 Banded Wavelength Ellipsometry for Thin Film
Characterization
B. Johs Film Sense, Lincoln, NE
2:10 p.m. V-9 Increasing Vacuum Tool Throughput and Process Yield: The
Importance of Thermal Performance when Selecting a Cryochiller for
Optimal High-Speed Water Vapor Pumping
C. Rebecchi Brooks Automation, Inc., Fremont, CA
3:30 p.m. – 5:00 p.m. Exhibit Hall
Sponsored by VON ARDENNE GmbH
Best Poster Award Presentation
4:00 p.m. Exhibit Hall
THANKS
Cathode disintegration, as sputtering was originally
called, has its humble beginnings in the 19th
century with ingenious inventions closely related to
generating electrical power and establishing “empty
space,” vacuum. This historical presentation celebrates the incredible
success story that affects everybody’s life today, as magnetron sputter
deposition enablesa wide range of product developments. Covering
developments from as far back as Geissler and his glass chambers, to
recent observations of traveling ionization zones or “spokes”, which
have profound influence on magnetron operation and particle fluxes
to the substrate, this journey in the world of magnetron sputter
deposition is far from finished, which becomes abundantly clear when
looking at its history in a time-lapse format.
2:20 p.m. V-10 LOOKING FOR: Film Thickness, Color, Sheet Resistance, or R/T
Characteristics? Use an omtsYs TFA
N. Hecker-Denschlag, M. Eberhardt, B. Keil m-u-t GmbH, Neu-Ulm, Germany
to these Companies
SVC thanks the following companies that assisted the Society in
promoting this year’s TechCon Exhibit by distributing electronic
postcards to its customers.
Advanced Energy Industries, Inc.
DHF Technical Products
Gencoa Ltd.
Hiden Analytical, Inc.
INFICON
m-u-t GmbH
PLASUS GmbH
Sputtering Components, Inc.
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
19
TECHCON 2015
Thursday AM . April 30
Technical Program
12:00 p.m. T-17 New and Most Recent Ultra-Hardness Findings – Real or
Nonsense?
M. Fuchs, N. Schwarzer Saxonian Institute of Surface Mechanics, Ummanz, Germany
Keynote Presentation
Symposium on Coating Technologies for the Interconnected Age
8:30 a.m. Grand Ballroom E
Moderator: Alberto Argoitia, JDSU Flex Products Group
Roll-to-Roll Processing for Flexible Devices and
Components Utilized in Wearable and Mobile
Electronics
Neil Morrison, Applied Materials, Alzenau, Germany
Roll-to-Roll (R2R) production of flexible electronic
devices combines the advantages of the use of
inexpensive, lightweight and flexible substrates with high throughput
production to enable new form factor products with exceptional
robustness and mechanical stability. Significant cost reduction
opportunities can also be found in terms of processing tool capital
cost, utilized substrate area and process gas flow when compared
with batch processing systems. Recently, significant advances have
been made in device patterning enabling the mass production of a
variety of flexible electronic devices. Significant challenges also exist
in terms of the layer deposition technologies used in R2R manufacture
of these devices. A variety of different web handling and coating
technologies to enable high volume R2R manufacture of both active
and passive components utilized in display have been developed. This
talk describes the principal challenges inherent in moving from lab/
pilot scale manufacturing to high volume manufacturing. Results will
be presented for both amorphous silicon and IGZO TFT backplanes,
ITO based touch panel devices in addition to high barrier performance
layers and stacks for both substrate encapsulation and barrier film for
final device encapsulation.
Protective, Tribological and Decorative Coatings
Ballroom F
Moderators: Avi Raveh, Rotem Industries Ltd., Israel and Gary Doll, University of Akron
9:20 a.m. T-12 Wear Mechanism of Mo-W Doped Carbon-Based Coating
during Boundary Lubricated Sliding
Sponsored Student Presentation P. Mandal, A.P. Ehiasarian, P.Eh. Hovsepian
Nanotechnology Centre for PVD Research, Sheffield Hallam University, Sheffield, United
Kingdom
WebTech Roll-to-Roll Coatings for High-End Applications
Grand Ballroom G
Moderator: Alberto Argoitia, JDSU
9:20 a.m. IA-9 Flexible OLEDs for Display and Lighting Applications
Symposium on Coating Technologies for the Interconnected Age
Invited Talk T. van Mol Holst Centre, TNO, Eindhoven, The Netherlands
10:00 a.m. W-1 Ultra-High Multi-Layer Barriers on Weathering Stable
Substrates for Outdoor Application
J. Fahlteich1, C. Steiner1, O. Miesbauer2, S. Amberg-Schwab3, K. Noller2, N. Schiller1
1
Fraunhofer Institute for Electron Beam and Plasma Technology and COMEDD - FEP
Dresden, Germany
2
Fraunhofer Institute for Process Engineering and Packaging IVV, Freising, Germany
3
Fraunhofer Institute for Silicate Research ISC, Würzburg, Germany
10:20 a.m. W-2 Roll-to-Roll Vacuum Coating System for Development of
Flexible Substrates for OLED Lighting
H. Tamagaki1, K. Tanaka1, A. Oishi1, T. Furukawa2
1
Kobe Steel, Ltd., Takasago, Japan
2
Innovation Center for Organic Electronics, Yamagata University, Yonezawa, Japan
10:40 a.m. – 11:00 a.m. - Break
11:00 a.m. W-3 Ultra-High Moisture Barriers from PVD and ALD at a Wide
Range of Climate Conditions
Sponsored Student Presentation F. Nehm1, H. Klumbies1, J. Fahlteich2, L. Müller-Meskamp1, K. Leo1
1
Institut für Angewandte Photophysik, TU Dresden, Dresden, Germany 2
Fraunhofer Institute for Electron Beam and Plasma Technology FEP, Dresden, Germany
11:20 a.m. W-4 Low Temperature Plasma-Assisted Atomic Layer Deposition
of Silicon Nitride Moisture Permeation Barriers
A.-M. Andringa, A.Perrotta, K. de Peuter, H. Knoops, E. Kessels, M. Creatore
Department of Applied Physics, Eindhoven University of Technology, Eindhoven,
The Netherlands
11:40 a.m. W-5 Recent Advances in Vacuum Deposited Hard Coats on PET Film
J. DiBattista, E. Chan, Y. Yang Darly Custom Technology, Inc. Windsor, CT
12:00 p.m. W-6 Mechanical Properties of Thin Barrier Coatings Deposited
by PE-ALD on Polymer Films
P. Fayet1, E.R. Dickey2
1
Tetra Pak (Suisse) SA, Romont, Switzerland
2
Lotus Applied Technology, Hillsboro, OR
9:40 a.m. T-13 DLC Films on Glass and Plastic by In-Line PECVD
J. Madocks, P. Ngo General Plasma, Inc., Tucson, AZ
10:00 a.m. T-7 Carbon Based Multifunctional Coatings for Oil-Less
Hermetic Compressor Applications
Invited Talk J.D. Biasoli de Mello1, 2
1
Laboratório de Tribologia e Materiais, Universidade Federal de Uberlândia, Uberlândia, Brazil
2
Laboratório de Materiais, Florianópolis, Universidade Federal de Santa Catarina, Brazil
Optical Coatings
Grand Ballroom E
Moderators: James Hilfiker, J.A. Woollam Co. Inc. and Ulrike Schulz, Fraunhofer Institute for
Applied Optics and Precision Engineering IOF, Germany
9:20 a.m. O-7 The Reversed Admittance Locus
A. Macleod, C. Clark Thin Film Center Inc., Tucson, AZ
10:40 a.m. – 11:00 a.m. - Break
11:00 a.m. T-14 Studies of Porosity in Ceramic Titanium Nitride Oxide PVD
Coatings
Z. Wang, J. Crowshaw, M. Akkaoui Tanury Industries, Lincoln, RI
11:20 a.m. T-15 Plasma Immersion Ion Deposition (PIID) of Diamond-Like
Carbon (DLC) Coatings for Automotive and Petroleum Applications
R. Wei, C. Ellis-Terrell, C. Rincon, and J. Lin Southwest Research Institute, San Antonio, TX
11:40 a.m. T-16 Minimizing Mechanical Losses of Rolling-Sliding Contacts
in Automobile Power Train by Diamond-Like Carbon Coatings under ElastoHydrodynamic Lubrication
K. Bobzin1, T. Brögelmann1, K. Stahl2, K. Michaelis2, J. Mayer2, M. Hinterstoisser2
1
Surface Engineering Institute, RWTH Aachen University, Aachen, Germany
2
Institute for Machine Elements, TU Munich, Garching, Germany
20 Society of Vacuum Coaters
2015 TECHCON Final Program
9:40 a.m. O-8 Do it Yourself – Automated Thin Film Design using Genetic
Algorithms
W. Theiss W. Theiss Hard- and Software, Aachen, Germany
10:00 a.m. O-9 From Design through Manufacture with Direct
Monochromatic Monitoring
A. Zoeller, M. Boos, D. Arhilger, H. Hagedorn Leybold Optics GmbH, Alzenau, Germany
10:20 a.m. O-10 A New Generation of Optical Monitoring Techniques for
Optical Thin Films
B. Barney Telemark, Battle Ground, WA
10:40 a.m. – 11:00 a.m. - Break
Thursday . April 30
11:00 a.m. IA-11 Complex Optical Coatings for Sensor Applications and on
Zeonex Substrates for Light Weight Mobile Applications
Symposium on Coating Technologies for the Interconnected Age
2:00 p.m. T-20 The Effect of Growth Conditions on the Surface Energy,
Optical Properties and Saline Corrosion Resistance of Amorphous
Chromium Oxide Thin Films Prepared by Reactive Magnetron Sputtering
11:40 a.m. O-11 Deposition of Complex Optical Interference Filters on
Polymer Substrates by Magnetron Sputtering and PECVD Processes
J. Kavanagh1, A.M. Oje2, A.A. Ogwu2
1
Department of Materials Science and Engineering, Sheffield University, Sheffield, United Kingdom
2
Thin Film Centre, School of Engineering, University of the West of Scotland, Paisely, United Kingdom
T. Neubert1, M. Vergöhl1, K. Rohwer2, A. Simon2
1
Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany
2
INFITEC GmbH, Ulm, Germany
2:20 p.m. T-21 PVD Chromium Coatings Replacing Decorative Chromium
Electroplated Coatings on Plastics
Invited Talk T. Geldhauser Optics Balzers AG, Balzers, Principality of Liechtenstein
12:00 p.m. O-12 Optical Coatings by High Speed Rotary Spatial ALD
E.R. Dickey1, W.A. Barrow1, B. Aitchison2
1
Lotus Applied Technology, Hillsboro, OR
2
MLD Technologies, Eugene, OR
Thursday PM . April 30
Special Presentation with SVC Sponsored Lunch
12:40 p.m. Grand Ballroom E
Pick up Lunch beginning at 12:20 p.m. inside Grand Ballroom E
Moderator: Chris Stoessel, Eastman Chemical Company
Enabling a New Generation of Mobile Devices
through Wafer-Level Integration of Optical Filters
and Electronics
Fred Van Milligen, JDSU, Santa Rosa, CA
The rapid growth in optical sensors in automobiles,
cell phones, gaming, and wearable devices has
driven the convergence of optics and electronics, and specifically
optical coatings and semiconductor processes. This convergence has
created an opportunity for the optical coating supplier to think in the
terms of consumer electronics: high volumes, high yields, low cost,
and rapid turnaround. Often, these coatings are directly deposited
on customer-defined areas of active semiconductor devices. This
demands that the processes be compatible with semiconductor
protocols for temperature, cleanliness, material selection, etc. In such a
case, the processing of the optical coating cannot impact the electrical
performance or reliability of the underlying sensors. In this talk we will
discuss the challenges that must be met, discuss potential approaches
and highlight some of the many products that are pushing the
technical envelope.
Protective, Tribological and Decorative Coatings
Grand Ballroom F
Moderators: Jose Daniel Biasoli de Mello, Universidade Federal de Uberlandia and Universidade
Federal de Santa Catarina, Brazil and Papken Hovsepian, Sheffield Hallam University, United
Kingdom
1:20 p.m. T-18 Mechanical, Tribological and Corrosion Properties of
Aluminium-Toughened PVD Nitrogen-Doped Chromium Coatings
J. Kavanagh, C. Iamvasant, A. Leyland, A. Matthews
Department of Materials Science and Engineering, University of Sheffield, Sheffield,
United Kingdom
G. Vergason1, M. Fitch1, R. Smith1, T. Jochum2
1
Vergason Technology, Inc., Van Etten, NY
2
jobaTEC GmbH, Sankt Wendel, Germany
2:40 p.m. T-23 Tribological Properties of Titanium Doped Tungsten
Disulphide/Titanium Multilayers Applied as Superficial Protection during
Limit Layer Lubrication
Sponsored Student Presentation J.M. González1, C. Ortega1, H. Mohseni2, T.W. Scharf2
F. Sequeda1
1
Universidad del Valle, Laboratorio de Recubrimientos Duros y Aplicaciones Industriales RDAI, Cali, Colombia
2
University of North Texas, Laboratory for Moving Mechanical Assemblies LaMMA, Denton, TX
3:00 p.m. T-24 On the Physicochemical Structure of the Silicon-Containing
Adhesion Interlayer in DLC Deposited on AISI 4140
Sponsored Student Presentation E.R. Petry1, F. Cemin1, L.T. Bim1, C.M. Menezes1,
M.E.H. Maia da Costa2, I.J.R. Baumvol3, C. Aguzzoli1, S.S. Tomiello4, and C.A. Figueroa1,4
1
Universidade de Caxias do Sul, Centro de Ciências Exatas e Tecnologia, Caxias do Sul-RS, Brazil
2
PUC-Rio, Departamento de Física, Rio de Janeiro, Brazil
3
Universidade Federal do Rio Grande do Sul, Instituto de Física, Porto Alegre, Brazil
4
Plasmar Tecnologia Ltda., Caxias do Sul, Brazil
WebTech Roll-to-Roll Coatings for High-End Applications
Grand Ballroom G
Moderator: John Fahlteich, Fraunhofer Institute for Electron Beam and Plasma Technology FEP,
Germany
1:20 p.m. IA-10 Roll to Roll Processing of Thin Flexible Energy Devices
Symposium on Coating Technologies for the Interconnected Age
Invited Talk B. Berland, ITN Energy Systems, Inc., Littleton, CO
2:00 p.m. W-7 Tailoring Roll to Roll ALD Barrier Processes for OLED, Thin
Film PV, and Commercial Packaging Applications
W.A. Barrow, B.L. Danforth, E.R. Dickey Lotus Applied Technology, Hillsboro, OR
2:20 p.m. W-8 Nanostructuring of Ethylene Tetrafluoroethylene Films by a
Low Pressure Plasma Treatment Process
Sponsored Student Presentation C. Steiner1,2, J. Fahlteich1, E. Rädlein2
1
Fraunhofer Institute for Electron Beam and Plasma Technology FEP, Dresden, Germany
2
Technische Universität Ilmenau, Ilmenau, Germany
2:40 p.m. W-9 Roll to Roll Sputtered Titanium and TiO2 from a Dual
Rotatable Cathode, using Open and Closed Loop Process Control and
Comparing AC and Square Wave Bipolar Power Delivery
D. Wickens, N. Butcher Bobst Manchester Ltd., Heywood, United Kingdom
3:00 p.m. W-10 Applying Co-Sputtering to Increase DDR during Deposition
of Titanium Oxides and Silicon Oxides
V. Kozlov, J. Kazuss, E. Machevskis SIDRABE Inc., Riga, Latvia
1:40 p.m. T-19 Sliding Wear Behaviour of Graphene against Ti-6Al-4V: A
Comparison with Polycrystalline Diamond and Hydrogenated DiamondLike Carbon Coatings
S. Bhowmick, A. Banerji, M.Z.U. Khan, A.T. Alpas
Mechanical Automotive and Materials Engineering Department, University of Windsor,
Windsor, Canada
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
21
TECHCON 2015
Optical Coatings
Grand Ballroom E
Moderator: Bryant Hichwa, Sonoma State University (retired)
1:20 p.m. O-13 Broadband and Wide-Angle Antireflection Coatings
Containing Plasma-Etched Organic Layers
U. Schulz, F. Rickelt, P. Munzert, H. Ludwig, N. Kaiser
Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena, Germany
Technical Program
Career Opportunities
Service at the TechCon
1:40 p.m. O-14 Antireflection Coating Production Process Without an
EBeam Source and Without Scattering
R.R. Willey1, K. Patel2
1
Willey Optical, Consultants, Charlevoix, MI
2
Luma Optics Pvt Ltd, Mumbai, India
2:00 p.m. O-15 Advanced Deposition Technology for Astronomical and
Space Applications, Part II: Ion-Assisted Filtered Cathodic Arc Deposition
(IFCAD)
M.L. Fulton, R.S. Dummer, M. Zimmerman Surface Optics Corporation, San Diego, CA
2:20 p.m. O-16 Advanced Optical Coating
A. Luca1, R. Müller1, R. Stober1, J. Landrock1, J. Mai1, P. Gawlitza2, S. Braun2, M. Sarstedt1
Roth & Rau AG, Hohenstein-Ernstthal, Germany
2
Fraunhofer for Material and Beam Technology IWS, Dresden, Germany
1
2:40 p.m. O-17 Precision Multilayer Coating for Large High-End Mirrors
A. Luca1, R. Müller1, A. Eibisch1, J. Landrock1, J. Mai1, R. Stober1, P. Gawlitza2, S. Braun2,
M. Sarstedt1
1
Roth & Rau AG, Hohenstein-Ernstthal, Germany
2
Fraunhofer for Material and Beam Technology IWS, Dresden, Germany
SVC Welcomes
new directors
First Term Director (2015-2018)
Jolanta E. Klemberg-Sapieha
Polytechnique Montréal
Montréal, QC, Canada
[email protected]
First Term Director (2015-2018)
Kurt J. Lesker III
Kurt J. Lesker Company
Jefferson Hills, PA
[email protected]
First Term Director (2015-2018)
Karin Scherer
Essilor
Creteil, France
[email protected]
22 Society of Vacuum Coaters
Beginning their Term April 27, 2015
First Term Director (2015-2018)
Gary Doll
University of Akron
Akron , OH
[email protected]
2015 TECHCON Final Program
The SVC TechCon is a prime venue
for both employers and job seekers.
The SVC TechCon is a prime venue for both
employers and job seekers. Take advantage of
the SVC Career Opportunities Service, developed
to connect hiring companies with potential
employees. FREE
Participation is Free!
Employers: Display your job posting at the
TechCon by delivering your job description to
the Information Center during the TechCon
open registration hours.
Job Seekers: Include your resume in the
TechCon Career Opportunities Service
“Resume Catalog” by delivering five copies of
your resume to the Information Center during
the TechCon.
SVC CORPORATE SPONSORS
+ Two Options to Publish Your
Presentation at the TECHCON
Presenters in the SVC Technical Program are asked to submit a manuscript
for publication. SVC is pleased to offer two publication options to meet the
interests of our presenters.
Publish without Peer Review
The Society of Vacuum Coaters Annual Technical
Conference Proceedings recollection of presentations made at the
SVC TECHCON and is published in both a printed and digital format.
Proceedings manuscripts will be available in the SVC Digital Library.
**Last Chance Extended Submission Deadline June 1, 2015
Publish with Peer Review
The SVC will accept a limited number of manuscripts for publication
in a special issue of Elsevier’s, Surface and Coatings Technology.
Manuscripts subjected to the peer review process, and are accepted,
may require modification before publication in Surface and Coatings
Technology. All manuscripts submitted for peer review consideration
will be published in the SVC Conference Proceedings in its original
version (without modification).
Peer Review Manuscript Submission Window: April 20 - July 15, 2015
Visit: www.svc.org/Manuscript
Digital Library
The SVC Digital Library contains the complete collection of
papers published in the Society of Vacuum Coaters Annual
Technical Conference Proceedings from 2000–Present.
SEARCH with intuitive features
TAG favorite titles
SHARE abstracts via email
DOWNLOAD manuscripts
FREE for members
www.svc.org/DigitalLibrary
3M Company
Advanced Energy Industries, Inc.
Agilent Technologies, Vacuum Products Division
Angstrom Sciences, Inc.
ARi Industries, Inc.*
BOBST Manchester
Brooks Automation, Inc.
Darly Custom Technology, Inc.
Denton Vacuum, LLC
DynaVac
Eastman Chemical Company
Ebara Technologies, Inc.*
Edwards
Ferrotec (USA) Corporation
Fil-Tech, Inc.
General Plasma, Inc.
Gfe Metalle und Materialien GmbH
Goodfellow Corporation
Hauzer Techno Coating - IHI Group
Heraeus Materials Technology
Hiden Analytical, Inc.
Indium Corporation
INFICON
Intellivation, LLC
Intlvac Thin Film*
IonBond LLC - IHI Group
Izovac Ltd.*
JDSU Advanced Optical Technologies Group
Kurt J. Lesker Company
Leybold Optics USA, Inc.
LHI Metals
Materials Science, Inc.
Materials Science International, Inc.
Materion Corporation
MDC Vacuum Products LLC
Midwest Tungsten Service , Inc.
MKS Instruments, Inc.
Mustang Vacuum System LLC
Nor-Cal Products, Inc.
Oerlikon Leybold Vacuum
Optiforms*
Oxford Instruments Austin
Oxford Instruments Plasma Technology
Pfeiffer Vacuum, Inc.
Plasmaterials, Inc.
Process Materials, Inc.
Providence Metallizing Company, Inc.
PVT, Plasma and Vacuum Technologies LLC
R.D. Mathis Company
Reliable Silver Corporation*
RF VII Inc.*
Solayer GmbH*
Soleras Advanced Coatings
Sputtering Components, Inc.
Sumitomo (SHI) Cryogenics of America
TEL Mechantronics AG*
Telemark
Thermionics Vacuum Products
Thin Film Center, Inc.
Toray Plastics (America), Inc.
TRUMPF Huettinger*
UC Components, Inc.
ULVAC Technologies, Inc.
Umicore Thin Film Products
VacuCoat Technologies, Inc.
Vacuum Engineering & Materials (VEM)
Vacuum Process Technology LLC
Vacuum Technology & Coating*
VAT, Inc.
Vergason Technology, Inc.
VON ARDENNE
Yeagle Technology, Inc.
Bold indicates Charter Corporate Sponsor
* indicates new 2013/2014/2015 Corporate Sponsors
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
23
TECHCON 2015
Webinar Tutorial Program
Upcoming Live Webinars
SVC on LinkedIn
http://bit.ly/SVCLinkedIn
W-208 Sputter Deposition
Presented by David Glocker,
Isoflux Incorporated
Date: June 11, 2015
W-337 Introduction to Transparent Conductive
Oxides (TCO)
Presented by Clark I. Bright
Bright Thin Film Solutions (3M retired)
Date: July 9, 2015
Cost: 3-Hour Live On-Line Webinar + Webinar Notes
Member $325 | Non-member $400 | Full-Time Student $200
On-Demand (Recorded) Webinars
Follow the SVC Company page and join
the SVC Networking Group to foster and
expand your professional Network.
W-105 Evaporation for Thin Film Deposition
W-110 Advanced Social Media for B2B Strategies and Success
W-204
Basics of Vacuum Web Coating
http://bit.ly/SVCSolutions
W-207 Production Vacuum Systems: Operation and SVC Solutions
W-208 Sputter Deposition
The Society of Vacuum Coaters has launched
its LinkedIn Networking Group, SVC Solutions.
Join the Group and start a discusion!
Maintenance
W-212 Troubleshooting for Thin Film Deposition Processes
W-218 Optical Thin Film Monitoring and Control
W-219 Optical Thin Film Materials and Process Know-How
W-309 Cathodic Arc Deposition
W-314 Practical Aspects of Plasma Modification of
Polymer Materials and Plasma Web
Treatment
W-317 The Practice of Reactive Sputtering
W-326 Manufacture of Precision Evaporative
Coatings
W-337 Introduction to Transparent Conductive
Oxides (TCO)
Cost: 3-Hour On-Demand Webinar + Webinar Notes
Member $195 | Non-member $270 | Full-time Student $135
For Webinar descriptions and to register go to:
www.svc.org/Education/Webinars.cfm or phone
505-856-7188 for details on Group discounts.
24 Society of Vacuum Coaters
2015 TECHCON Final Program
Follow the SVC Company page and join
the SVC Networking Group to foster and
expand your professional Network.
NOTES
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
25
TECHCON 2015
On-Location Education Program
Improve Skills • Broaden Knowledge • Increase Productivity
SVC—Your Best Resource for On-Location Education on Vacuum Coating Technologies
A strong commitment to education is part of SVC’s Charter. When you decide to bring tutorials to your facility, you
can be assured of high-quality, practical tutorials taught by recognized industry experts. Tutorials are designed for
the novice as well as for the seasoned professional.
Go to www.svc.org/OnLocation for details on each tutorial course.
The SVC On-Location Education Program—
Bring the Experts to Your Facility and Educate Your Team at a Reasonable Cost!
This program provides cost-effective training by eliminating time away from work, travel expenses, and individual
tutorial attendance fees. The SVC offers tutorials to organizations subject to instructor availability and certain
other conditions. Contact SVC for tutorial availability, pricing information and to schedule one or more tutorials at your location. It is a great bargain in this economic climate. Existing
half-day tutorials can often be expanded for a full-day presentation.
SVC On-Location Education Tutorial Roster
C-102:
C-103:
C-203:
C-204:
C-207:
C-208:
C-210:
C-211:
C-212:
C-213:
C-214:
C-304:
Introduction to Evaporation and Sputtering
Introduction to Physical Vapor Deposition (PVD) Processes
Sputter Deposition
Basics of Vacuum Web Coating
Evaporation as a Deposition Process
Sputter Deposition in Manufacturing
Introduction to Plasma Processing Technology
Sputter Deposition onto Flexible Substrates
Troubleshooting for Thin Film Deposition Processes
Introduction to Smart Materials
Pulsed Plasma Processing
ITO and Other Transparent Conductive Coatings:
Fundamentals, Deposition, Properties, and Applications
C-306: Nonconventional Plasma Sources and Methods in
Processing Technology
C-307: Cathodic Arc Plasma Deposition
C-308: Tribological Coatings
C-310: Plasma Immersion Techniques for Surface Engineering
C-311: Thin Film Growth and Microstructure Evolution
C-314: Plasma Modification of Polymer Materials and Plasma Web
Treatment
C-315: Reactive Sputter Deposition
C-316: Introduction to Atomic Layer Deposition (ALD)
C-317: The Practice of Reactive Sputtering
C-318: Nanostructures: Strategies for Self-Organized Growth
C-319: Introduction to Energy Conversion Materials and Technology
C-322: Characterization of Thin Films
C-323: High Power Impulse Magnetron Sputtering
C-324: Atmospheric Plasma Technologies
C-326: Manufacture of Precision Evaporative Coatings
C-328: Properties and Applications of Tribological Coatings
C-330: Introduction to Thin Film Photovoltaic Technologies
C-332: Zinc Oxide-Based and Other TCO Alternatives to ITO:
Materials, Deposition, Properties and Applications
C-333:
C-336:
C-337: V-201:
V-202:
V-203:
V-204:
V-206:
V-207:
V-304:
M-101:
M-102:
Practice and Applications of High Power Impulse
Magnetron Sputtering (HIPIMS)
Transparent Gas Permeation Barriers on Flexible
Substrates
ITO and Alternative TCO: From Fundamentals to Controlling
Properties
High Vacuum System Operation
Vacuum System Gas Analysis
Vacuum Materials and Large System Performance
Vacuum Systems, Materials and Operation
Helium Leak Detection Theory and Technology
Practical Aspects of Vacuum Technology: Operation and
Maintenance of Production Vacuum Systems
Cryogenic High Vacuum Pumps
Basic Principles of Color Measurement
Introduction to Ellipsometry
Tutorial Classification System
The tutorial codes are intended to provide the prospective attendee
with some guidance as to whether the emphasis in the tutorial is
primarily on vacuum technology (V code), or vacuum deposition
coating processes and technology (C code), or other miscellaneous
topics (M code). The tutorial number is intended to indicate the level
of tutorial specialization—the lower numbers refer to tutorials that
are basic or introductory in nature, and the higher numbers refer to
tutorials that offer a more specialized treatment of a specific topic.
For an up-to-date list of tutorial descriptions and instructor
biographical sketches, visit www.svc.org and explore the “Education”
button on the main page.
For technical questions regarding the tutorial content,
contact the SVC Administrative Office at [email protected],
or 505-856-7188.
“Fantastic job! This tutorial very much related to the real world. This class was excellent and gave many ideas to
implement on the plant floor.” — Toma Ljulj, Emrick Plastics (V-207)
“There was a wonderful balance between various industry uses as well as new ideas
which could be used across various process types.” — Kevin Moreau, Elcan Optical Technologies (C-306)
Society of Vacuum Coaters • 505-856-7188 • fax 505-856-6716 • [email protected] • www.svc.org
26 Society of Vacuum Coaters
2015 TECHCON Final Program
Silver - $1,900
› Advanced Energy Industries, Inc.
› Bürkert Fluid Control Systems
› GfE Metalle und Materialien GmbH
› Hauzer Techno Coating - IHI Group
› Heraeus Materials Technology
› Indium Corporation
› SAFINA
› Umicore Thin Film Products
Bronze - $950
› BellowsTech, LLC
› BOBST Manchester Limited
› Dillon Gage Metals
› EBARA Technologies, Inc.
› Fraunhofer USA
› Gencoa Ltd.
› J.A. Woollam Co. Inc.
› MDC Vacuum Products, LLC
Networking Lounge › Materion
Beer Blast › VON ARDENNE
USB Flash Drive › Agilent Technologies
Notepad › Korea Vac Tec
Badge Lanyards › Telemark
Bottled Water › DHF Technical Products
Exhibitor Lounge › Physics Today
Frozen Treats in the Exhibit Hall
› Vacuum Research Corporation
Conference Tote Bags
› Brooks Automation, Inc.
› Denton Vacuum, LLC
› Nordmeccanica Group
› INFICON
› Reliable Silver Corporation
Registration Splash Page
› IonBond - IHI Group
Poolside Networking Mixer
› Intlvac Thin Film
Hotel Splash Page › ZPulser, LLC
Specialty Coffee Station
› PLANSEE
LEVEL SPONSORS
› Vergason Technology, Inc.
Sponsors
Benefits of sponsorship start when you sign up and
last until long after the TechCon!
TechCon sponsors are recognized as key players in
the vacuum coating community, and every sponsor is
acknowledged during their sponsored event with prominent
signage, on the SVC Web Site and in all SVC publications
throughout the year. Participate in our Sponsor Program
to reinforce your name recognition and demonstrate your
commitment to the industry.
for more information
[email protected]
505 . 856 . 7188
www.svc.org
SPECIAL EVENT + SPECIALTY ITEM SPONSORS
Gold - $2,800
› Soleras Advanced Coatings
2015
TECHCON
GENCOA
www.physicst day.org
505-856-7188 » Fax 505-856-6716 » [email protected] » www.svc.org
27
2015
TECHCON
Schedule of Events
All meeting rooms are in the Santa Clara Convention Center (SCCC) unless specified otherwise.
Sunday – Thursday
Conference Registration, Presenter/Manuscript Center, Information Center: SCCC Main Lobby
Corporate Sponsor Meeting Room: Inquire at the SVC Information Center
TAC Breakfast
Meeting Room Locations
in the Hyatt Regency
Wednesday, April 28 7:00 a.m. – 8:15 a.m.
WebTech Roll-to-Roll Coatings – Stevens Creek
Energy Conversion and Related Processes – Camino Real
Protective, Tribological and Decorative Coatings - Cypress
Emerging Technologies - San Tomas
HIPIMS – Central
Optical Coatings - Winchester
Plasma Processing - Lawrence
Large Area Coatings – Lafayette
Biomedical and Environmental Applications – Bayshore West
Sunday, April 26, 2015
7:00 a.m. – 8:00 a.m.
8:15 a.m. – 10:00 a.m. 10:00 a.m. – 3:45 p.m. 11:00 a.m. – 1:30 p.m.
12:00 p.m.
4:15 p.m. – 4:45 p.m. 6:30 p.m. – 7:30 p.m.
7:30 p.m. – 10:00 p.m. SVC Executive Committee Meeting – TusCA Private Dining Room Hyatt
Education Committee Breakfast Meeting – Napa 1 Hyatt
Board of Directors Meeting – Cypress Hyatt
“Grab and Go” Cash Lunches for Sale – Hyatt Foyer
SVC Foundation Golf Tournament – Santa Clara Golf & Tennis Club
Advance Reservations Required
TAC Chair/Moderator AV Training Session – Grand Ballroom E
Awards Ceremony – Grand Ballroom E
Welcome Reception – Mission City Ballroom B5-B4
Monday, April 27, 2015
7:00 a.m. – 8:15 a.m.
8:30 a.m. – 9:00 a.m. 9:00 a.m. – 10:00 a.m.
9:00 a.m. – 9:40 a.m.
11:00 a.m. – 1:30 p.m.
12:50 p.m. – 1:30 p.m.
5:30 p.m. – 6:45 p.m.
7:00 p.m. – 9:00 p.m.
Technology Forum Breakfast – Great America (Lobby, J, KX)
SVC Business Meeting and TechCon Opening Ceremony – Theater
All are welcome.
Companions Orientation Meeting – Central Hyatt
Keynote Presentation – Theater
“Grab and Go” Cash Lunches for Sale – Hyatt Foyer
Donald M. Mattox Tutorial Presentation – Theater
Young Members Group/Mentors Happy Hour – Magnolia Hyatt
Heuréka! Session – Theater
Tuesday, April 28, 2015
5:45 a.m. 7:00 a.m. – 8:15 a.m.
8:30 a.m. – 9:10 a.m.
12:00 p.m. – 6:00 p.m.
12:00 p.m. – 1:30 p.m.
3:30 p.m. – 4:30 p.m.
2:30 p.m. – 3:30 p.m.
3:30 p.m. – 6:00 p.m.
4:45 p.m. – 6:00 p.m.
6:00 p.m.
SVC Foundation 5K Fun Run – Meet in Hyatt Lobby
Technology Forum Breakfast – Great America (Lobby, J, KX)
Keynote Presentation – Theater
Exhibit Open Hours – Exhibit Hall
“Grab and Go” Cash Lunches for Sale – Exhibit Hall Concessions
Meet the Experts Corner – Room 210
Oral Poster Session – Grand Ballroom G
Poster Session – Exhibit Hall
Exhibit Hall Reception – Exhibit Hall
Poolside Networking Mixer – Hyatt Regency Terra Courtyard
All are welcome.
Wednesday, April 29, 2015
7:00 a.m. – 8:15 a.m.
8:30 a.m. – 9:10 a.m.
9:00 a.m. – 10:00 a.m.
10:00 a.m. – 5:00 p.m.
11:20 a.m. – 12:20 p.m.
12:00 p.m. – 1:30 p.m.
12:30 p.m. 1:00 p.m. – 1:40 p.m.
1:50 p.m. – TBD
2:00 p.m. – 3:00 p.m.
3:30 p.m. – 5:00 p.m.
5:30 p.m. – 7:30 p.m. TAC Breakfast Meetings – Hyatt 2nd Floor Meeting Rooms
Keynote Presentation – Theater
Exhibitor Meeting – Grand Ballroom D
Exhibit Open Hours – Exhibit Hall
Vendor Innovators Showcase – Grand Ballroom G
SVC Hosted Lunch – Exhibit Hall
Ticket Provided to Exhibitors and Full Conference Registrants
SVC Foundation 5K and Golf Tournament Prize Presentation
Donald M. Mattox Tutorial Presentation – Theater
Vendor Innovators Showcase – Grand Ballroom G
“Meet the Experts” Corner – Room 210
Beer Blast & Best Poster Award (4:00 p.m.) – Exhibit Hall
Program Committee Meeting – Cypress Hyatt
Thursday, April 30, 2015
7:00 a.m. – 8:20 a.m.
8:30 a.m. – 9:10 a.m.
12:20 p.m. – 12:40 p.m.
12:40 p.m. – 1:20 p.m.
SVC Board Wrap-up Breakfast – Cypress Hyatt
Keynote Presentation – Grand Ballroom E
SVC Hosted Lunch for full conference registrants – Grand Ballroom E
Special Lunchtime Presentation – Grand Ballroom E
Free WIFI in the Exhibit Hall
Courtesy of SVC Gold Sponsors