Layouts ...Or How to Become an Electronic Artist... Anurup Mitra BITS Pilani January 2007 Anurup Mitra Layouts Blackboard Demo Read the Title! Anurup Mitra Layouts Cross-Section Versus Layout Anurup Mitra Layouts A Better Inverter Layout Anurup Mitra Layouts A D–Flip-Flop Layout Anurup Mitra Layouts A Microprocessor Layout Anurup Mitra Layouts DRC DRC is a Design Rule Check. Anurup Mitra Layouts DRC DRC is a Design Rule Check. There are various tolerances involved in each step of processing during the course of fabrication of a chip. Anurup Mitra Layouts DRC DRC is a Design Rule Check. There are various tolerances involved in each step of processing during the course of fabrication of a chip. To avoid catastrophic failures in the layout, a set of rules need to be met. These rules minimise improper device and interconnect fabrication, thus potentially increasing the yield. Anurup Mitra Layouts DRC DRC is a Design Rule Check. There are various tolerances involved in each step of processing during the course of fabrication of a chip. To avoid catastrophic failures in the layout, a set of rules need to be met. These rules minimise improper device and interconnect fabrication, thus potentially increasing the yield. Analog layouts demand many more layout precautions not required by DRC, to minimise factors like noise and mismatch. Anurup Mitra Layouts Categories of Design Rules Most design rules can be classified under one of 4 Minimum Condition categories: Anurup Mitra Layouts Categories of Design Rules Most design rules can be classified under one of 4 Minimum Condition categories: Width A minimum width constraint on geometries is imposed by lithographic and processing capabilities. Anurup Mitra Layouts Categories of Design Rules Most design rules can be classified under one of 4 Minimum Condition categories: Width A minimum width constraint on geometries is imposed by lithographic and processing capabilities. Spacing Two lines too close together might cause an inadvertent short. Anurup Mitra Layouts Categories of Design Rules Most design rules can be classified under one of 4 Minimum Condition categories: Width A minimum width constraint on geometries is imposed by lithographic and processing capabilities. Spacing Two lines too close together might cause an inadvertent short. Enclosure To ensure that contacts remain within the layers they are joining, or that an n-well or n+/p+ implant completely surrounds a device. Anurup Mitra Layouts Categories of Design Rules Most design rules can be classified under one of 4 Minimum Condition categories: Width A minimum width constraint on geometries is imposed by lithographic and processing capabilities. Spacing Two lines too close together might cause an inadvertent short. Enclosure To ensure that contacts remain within the layers they are joining, or that an n-well or n+/p+ implant completely surrounds a device. Extension Some geometries need to extend beyond the edge of others to provide margin for error, e.g. poly overhang of diffusion/active. Anurup Mitra Layouts Device Capacitances Blackboard Digression again! Anurup Mitra Layouts Summary of Gate Device Caps Capacitance Cgb Cgs Cgd Cg Cutoff Cox WL 0 0 Cox WL Linear 0 1 2 Cox WL 1 2 Cox WL Cox WL Anurup Mitra Saturation 0 2 3 Cox WL 0 2 3 Cox WL Layouts Summary of Device Junction Caps φ0 = VT ln NAnN2 D i −mj Cj = Cj0 1 + Vφxb0 −mjsw Cjsw = Cjsw 0 1 + Vφxb0 mj and mjsw are called junction grading coefficients and are in the range 0.33 and 0.5 depending upon the junction profile. Also note that Vxb can refer to either the source-bulk or drain-bulk junction. Anurup Mitra Layouts Summary of Device Junction Caps φ0 = VT ln NAnN2 D i −mj Cj = Cj0 1 + Vφxb0 −mjsw Cjsw = Cjsw 0 1 + Vφxb0 mj and mjsw are called junction grading coefficients and are in the range 0.33 and 0.5 depending upon the junction profile. Also note that Vxb can refer to either the source-bulk or drain-bulk junction. The total junction capacitance for each active pocket is thus given by: Cjunction = AX .Cj + PX .Cjsw where Cj has units of capacitance/area and Cjsw has that of capacitance/length. Anurup Mitra Layouts LVS LVS stands for Layout versus Schematic Anurup Mitra Layouts LVS LVS stands for Layout versus Schematic The layout editor aids the drawing of multicoloured polygons. These remain merely geometric patterns unless specifically translated into an equivalent circuit. Anurup Mitra Layouts LVS LVS stands for Layout versus Schematic The layout editor aids the drawing of multicoloured polygons. These remain merely geometric patterns unless specifically translated into an equivalent circuit. A CAD tool can convert these geometric patterns into the electrical devices that they signify. This process is known as extraction. Anurup Mitra Layouts LVS LVS stands for Layout versus Schematic The layout editor aids the drawing of multicoloured polygons. These remain merely geometric patterns unless specifically translated into an equivalent circuit. A CAD tool can convert these geometric patterns into the electrical devices that they signify. This process is known as extraction. Along with device extraction, the tool also extracts parasitic capacitances and resistances due to interconnects and device geometries. This also implies that in general a circuit becomes slower on layout, and a correction for this needs to be made at the schematic design stage. Anurup Mitra Layouts LVS LVS stands for Layout versus Schematic The layout editor aids the drawing of multicoloured polygons. These remain merely geometric patterns unless specifically translated into an equivalent circuit. A CAD tool can convert these geometric patterns into the electrical devices that they signify. This process is known as extraction. Along with device extraction, the tool also extracts parasitic capacitances and resistances due to interconnects and device geometries. This also implies that in general a circuit becomes slower on layout, and a correction for this needs to be made at the schematic design stage. Once the CAD tool has extracted the electrical equivalent of the polygons, it compares the circuits got from schematic and layout to check that they are electrically equivalent. This is known as LVS. Anurup Mitra Layouts Analog Layout Requirements Multifingered transistors reduce the parasitic capacitance of the device with the substrate. This can be a critical issue when speed (read bandwidth) is a crucial parameter in the design. Anurup Mitra Layouts Analog Layout Requirements Multifingered transistors reduce the parasitic capacitance of the device with the substrate. This can be a critical issue when speed (read bandwidth) is a crucial parameter in the design. Common Centroid Geometry is important to reduce mismatch in circuits resulting out of process variations. Anurup Mitra Layouts Analog Layout Requirements Multifingered transistors reduce the parasitic capacitance of the device with the substrate. This can be a critical issue when speed (read bandwidth) is a crucial parameter in the design. Common Centroid Geometry is important to reduce mismatch in circuits resulting out of process variations. Adequate vias and substrate contacts need to be used to ensure good connectivity and reduce resistance and junctions of different layers. Anurup Mitra Layouts Analog Layout Requirements Multifingered transistors reduce the parasitic capacitance of the device with the substrate. This can be a critical issue when speed (read bandwidth) is a crucial parameter in the design. Common Centroid Geometry is important to reduce mismatch in circuits resulting out of process variations. Adequate vias and substrate contacts need to be used to ensure good connectivity and reduce resistance and junctions of different layers. Supply and ground rails should be made to run parallel as far as possible. Anurup Mitra Layouts Analog Layout Requirements Multifingered transistors reduce the parasitic capacitance of the device with the substrate. This can be a critical issue when speed (read bandwidth) is a crucial parameter in the design. Common Centroid Geometry is important to reduce mismatch in circuits resulting out of process variations. Adequate vias and substrate contacts need to be used to ensure good connectivity and reduce resistance and junctions of different layers. Supply and ground rails should be made to run parallel as far as possible. Sensitive signal nodes have to be shielded against interference. Anurup Mitra Layouts Analog Layout Requirements Multifingered transistors reduce the parasitic capacitance of the device with the substrate. This can be a critical issue when speed (read bandwidth) is a crucial parameter in the design. Common Centroid Geometry is important to reduce mismatch in circuits resulting out of process variations. Adequate vias and substrate contacts need to be used to ensure good connectivity and reduce resistance and junctions of different layers. Supply and ground rails should be made to run parallel as far as possible. Sensitive signal nodes have to be shielded against interference. Sensitive circuitry needs to be shielded with guard rings consisting of substrate ties and n-well. Anurup Mitra Layouts Multifingered Transistors Given above are examples where a single transistor is broken up into multiple fingers. This provides a convenient aspect ratio and saves area. Anurup Mitra Layouts Multifingered Transistors Given above are examples where a single transistor is broken up into multiple fingers. This provides a convenient aspect ratio and saves area. Most importantly however, this form of layout reduces junction capacitance by upto 50%. Calculate the junction caps for each of the above configurations and compare. Anurup Mitra Layouts Even Number of Digits As a general rule, the drain cap has more effect on circuit performance than does the source cap. So an effort should be made to reduce the former. Anurup Mitra Layouts Common Centroid Geometry Similar environments have to be created for matched transistors to prevent mismatch between them. Common centroid geometry is used to do this. Anurup Mitra Layouts Common Centroid Geometry Similar environments have to be created for matched transistors to prevent mismatch between them. Common centroid geometry is used to do this. Process gradients during fabrication can occur in any direction or orientation. Matched transistors should be laid out in a manner such that both transistors are affected equally by any process gradient. Anurup Mitra Layouts Passives in CMOS Technology The implementation of passive devices poses a challenge because modern CMOS technology is almost exclusively tailored to improve digital processing. Anurup Mitra Layouts Passives in CMOS Technology The implementation of passive devices poses a challenge because modern CMOS technology is almost exclusively tailored to improve digital processing. It takes approximately two years for a process to mature enough to be able to build high quality passives. Anurup Mitra Layouts Passives in CMOS Technology The implementation of passive devices poses a challenge because modern CMOS technology is almost exclusively tailored to improve digital processing. It takes approximately two years for a process to mature enough to be able to build high quality passives. This is significant because by that time Moore’s Law ushers in the next generation of digital process! Anurup Mitra Layouts Resistors The resistance of any conductor is given by L R = ρ Wt Anurup Mitra Layouts Resistors The resistance of any conductor is given by L R = ρ Wt Since the thickness of the conductor for a given process is not under the designer’s control, it is absorbed into the resistivity and a new standard factor called sheet resistance is used to define the intrinsic resistance of conductor. Anurup Mitra Layouts Resistors The resistance of any conductor is given by L R = ρ Wt Since the thickness of the conductor for a given process is not under the designer’s control, it is absorbed into the resistivity and a new standard factor called sheet resistance is used to define the intrinsic resistance of conductor. L R = RS W where RS = ρ t Anurup Mitra Layouts Resistors The resistance of any conductor is given by L R = ρ Wt Since the thickness of the conductor for a given process is not under the designer’s control, it is absorbed into the resistivity and a new standard factor called sheet resistance is used to define the intrinsic resistance of conductor. L R = RS W where RS = ρ t Although L/W is dimensionless, it is given the fictitous unit of squares, denoted by . Anurup Mitra Layouts Resistors The resistance of any conductor is given by L R = ρ Wt Since the thickness of the conductor for a given process is not under the designer’s control, it is absorbed into the resistivity and a new standard factor called sheet resistance is used to define the intrinsic resistance of conductor. L R = RS W where RS = ρ t Although L/W is dimensionless, it is given the fictitous unit of squares, denoted by . Thus sheet resistance has the unit of ohms/square or Ω/. Anurup Mitra Layouts Resistors The resistance of any conductor is given by L R = ρ Wt Since the thickness of the conductor for a given process is not under the designer’s control, it is absorbed into the resistivity and a new standard factor called sheet resistance is used to define the intrinsic resistance of conductor. L R = RS W where RS = ρ t Although L/W is dimensionless, it is given the fictitous unit of squares, denoted by . Thus sheet resistance has the unit of ohms/square or Ω/. Due to photolithographic and etching imperfections, lateral diffusions and variations in film thickness, integrated resistors show as much as ±20% tolerance. Anurup Mitra Layouts Capacitors Capacitors are even more real-estate intensive than resistors and it is not possible to fabricate more than a few hundred picofarads on chip. Anurup Mitra Layouts Capacitors Capacitors are even more real-estate intensive than resistors and it is not possible to fabricate more than a few hundred picofarads on chip. A few of the ways in which caps can be made are: Using a MOS device (with careful biasing!) Anurup Mitra Layouts Capacitors Capacitors are even more real-estate intensive than resistors and it is not possible to fabricate more than a few hundred picofarads on chip. A few of the ways in which caps can be made are: Using a MOS device (with careful biasing!) Spreading thinox over heavily doped diffusion (with ONO as the dielectric) Anurup Mitra Layouts Capacitors Capacitors are even more real-estate intensive than resistors and it is not possible to fabricate more than a few hundred picofarads on chip. A few of the ways in which caps can be made are: Using a MOS device (with careful biasing!) Spreading thinox over heavily doped diffusion (with ONO as the dielectric) Employing a poly-poly sandwich Anurup Mitra Layouts Latchup CMOS circuits are subject to a phenomenon called latchup. Anurup Mitra Layouts Latchup CMOS circuits are subject to a phenomenon called latchup. A parasitic bipolar circuit is formed as shown in the figure above. Note that the base of each transistor is tied to the collector of the other. Anurup Mitra Layouts Latchup CMOS circuits are subject to a phenomenon called latchup. A parasitic bipolar circuit is formed as shown in the figure above. Note that the base of each transistor is tied to the collector of the other. R1 and R2 are the resistances associated with the n-well and substrate. Anurup Mitra Layouts Latchup CMOS circuits are subject to a phenomenon called latchup. A parasitic bipolar circuit is formed as shown in the figure above. Note that the base of each transistor is tied to the collector of the other. R1 and R2 are the resistances associated with the n-well and substrate. This is a positive feedback circuit. At latchup this circuit will draw a tremendous amount of current from VDD on account of both transistors being on. Anurup Mitra Layouts Latchup CMOS circuits are subject to a phenomenon called latchup. A parasitic bipolar circuit is formed as shown in the figure above. Note that the base of each transistor is tied to the collector of the other. R1 and R2 are the resistances associated with the n-well and substrate. This is a positive feedback circuit. At latchup this circuit will draw a tremendous amount of current from VDD on account of both transistors being on. Both circuit designers and process engineers need to take care to see that the loop gain if this circuit stays below unity. Anurup Mitra Layouts
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