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MICROENVIRONMENTS
200 MM RETICLE SMIF POD
USER MANUAL
200 MM RETICLE SMIF POD SPECIFICATIONS
Table of Contents
Introduction . . ......................................... 2
Reference Documents –
Reticle Compliance Requirements ............ 2
General Specifications ............................. 3
Part Numbers ........................................... 3
Standard Option ..................................... 3
Serialization ............................................. 3
Documentation .. ........................................ 3
Materials of Construction ......................... 3
Material Properties ................................. 4
UV Light Protection ................................... 4
ESD Protection ......................................... 4
Inspection Criteria .................................. 4
Visual ...................................................... 4
Mechanical Interface Dimensions ............... 4
Control Dimensions . . .................................. 4
Testing . . ................................................
Cycle .......................................................
Functionality Test .................................
Performance Test ..................................
Flammability Test .....................................
RSP Cleanliness and Cleaning .. ..................
Dry Criteria ..............................................
Temperatures ...........................................
Matching Door to Dome . . ............................
Cleaning Compatibility ...............................
5
5
5
5
5
5
5
5
5
5
Configurable Info Pads . . ........................... 6
World-class Manufacturing Program ........... 6
Entegris Product
Documentation/Specification ................... 6
Recommended Periodic Maintenance .. ......... 6
Service Options . . ..................................... 6
For More Information .............................. 6
Terms and Conditions .. ............................. 6
Product Warranties ................................. 6
ENTEGRIS, INC.
1
200 MM RETICLE SMIF POD SPECIFICATIONS
Introduction
The 200 mm Reticle SMIF Pod (RSP) provides mask
shops and reticle users with a standard mechanical
interface (SMIF) to the safe handling, storage and
transport of 150 mm reticles with or without pellicles. The product is based on provisional SEMI®
Standards. The 200 mm RSP interfaces with SEMI
Standard SMIF equipment. The RSP provides both
static protection and ultraviolet light protection for
masks and reticles. The RSP has inert gas purge
capability via an inlet valve and outlet valve located
in the door. In addition, the RSP has info pads that
provide protection to users with respect to improper
placement on incorrect process equipment.
Optional stacking features are available.
Reference Documents – Reticle Compliance Requirements
SEMI E100-0302 Specification for a Reticle SMIF
Pod (RSP) used to transport and store 6 inch.
2
ENTEGRIS, INC.
200 MM RETICLE SMIF POD SPECIFICATIONS
General Specifications
Specification
Metric
Capacity:
One (1) 150mm Reticle
UV transmissivity
(all colors):
~0 % @ ≤ 470 nm
ESD performance:
< 2 seconds
Weight:
1.38kg
Reliability:
> 50K MCBF @ 90% c.l.
Washability:
No disassembly required
Serialization:
Permanent unique
serialization labels
Door flatness:
0.5 mm
Part Numbers
Please contact your Entegris representative to
determine part numbers and configurations.
Standard Option
Serialization
Standard products include a unique serial number
label located on the underside of each RSP door.
Documentation
Entegris provides a complete set of “Developer Kit”
drawings outlining SEMI Standard interface
dimensions. Revision level and manufacture date
will be maintained in one database.
Materials of Construction
RSP Component
Material
Shell:
Inherently static-dissipative
ABS, or inherently staticdissipative proprietary polymer
Door/cover:
Polycarbonate/polycarbonate
with carbon filler
Reticle retainer:
PEEK with carbon filler
PTFE
Item
Options
Breather filter:
Transparent dome:
Amber UV protection
Breather body:
Polycarbonate
Lock-out:
FEOL / BEOL
Latch plates:
Anodized aluminum
Lot tracking:
RF Micro-Tag
Door seal:
Fluoroelastomer or
thermoplastic elastomer
A paperwork pouch for carrying traveler documents
with the pod is available from Sunrise Packaging, Inc.
(www.sunpack.com).
ENTEGRIS, INC.
3
200 MM RETICLE SMIF POD SPECIFICATIONS
Material Properties
UV Light Protection
The transparent dome has a color additive to
minimize ultraviolet light transmission to protect
photo sensitive materials used in photolithography
applications. The transmissibility curve outlines
the percentage of light transmission at various
wavelengths. Entegris’ specification is zero light
transmission at <470 nm wavelength. The curve
below represents typical light transmittance
performance.
Light Transmittance Analysis
100
Differential Pressure (bar)
90
RSP-200 dome in new proprietary
violet/amber material
80
70
60
50
40
30
20
10
0
325 350 375 400 425 450 475 500 525 550 575 600 625 650 675 700
Wavelength (nm)
Inspection Criteria
ESD Protection
The RSP provides an electrical path to ground
from all the reticle contact points and from all
manual or automated pick-up points, including
the manual handles.
Visual
Each sub-component and finished RSP assembly
is inspected based on plastics industry standards,
Entegris capability and semiconductor wafer
carrier standards.
To achieve this requirement, the plastic resins
are filled with a conductive additive (i.e., carbon
or stainless steel fibers). The conductive additives
provide the electrical conductivity measured in
surface resistivity (Ohms/Sq) and/or static decay
time (seconds).
Mechanical Interface
Dimensions
Raw resin certification includes conductive
fiber loading and random sampling on molded
components.
RSP is inspected and checked against select SEMI
mechanical interface dimensions defined as control
dimensions.
SURFACE RESISTIVITY
RSP Component
Door
Surface Resistivity (Ohms / Sq)
<10^6
Entegris’ plan of record is to measure control
dimensions using both dial height indicators
gauging and surface plates in Class 1000 or
better environment.
STATIC DECAY
RSP Conductive Path
Automation handle to
dome to door
Static Decay Time (5K Volts
to 500 Volts in Seconds)
<2 seconds
4
ENTEGRIS, INC.
200 MM RETICLE SMIF POD SPECIFICATIONS
Testing
Cycle
Upon completion of an RSP assembly, it will cycle
test the RSP on a 200 mm Indexer in a Class 10
cleanroom to ensure proper functionality.
FUNCTIONALITY TEST
RSP
Component
Number
of Cycles
RSP
assembly
10
Operation
Placement on KC pins,
RSP clamping, RSP docking
to FIMS, smooth door
open/close and placement
PERFORMANCE TEST
Reliability
Number
of Cycles
PreMeasurement
PostMeasurement
Visible Wear
On-going
>50K
SEMI
compliant
SEMI
compliant
Limited — C AM only with
no effect on functionality
Flammability Test
RSP material of construction does not comply with
4910 approved materials outlined by Factory Mutual
(FM) flammability requirements.
RSP Cleanliness and Cleaning
Entegris 200 mm reticle SMIF Pod is designed for
cleanability — minimal water or moisture traps in
either door or shell.
No disassembly is required, including gaskets and
breather filters. We recommend cleaning the RSP
as a dome assembly and door assembly. We recommend no disassembly of components. Purge valves
(if used) are also designed to be effectively cleaned
and dried without any disassembly. A special tool is
required to insert /remove filters.
Dry Criteria
Matching Door to Dome
We recommend cleaning the door and the dome at
the same time and in the same cleaning process to
minimize cross contamination and simplify mating
the two components with matching serialization,
post cleaning.
Cleaning Compatibility
We recommend cleaning and drying with commercially available RSP cleaners. D.I. water systems are
acceptable, with or without surfactants.
No visible water droplets or visible moisture on any
RSP component.
Temperatures
We recommend cleaning and drying temperatures
not to exceed 60˚C.
ENTEGRIS, INC.
5
200 MM RETICLE SMIF POD SPECIFICATIONS
Configurable Info Pads
The door bottom is designed to the 200 mm RSP
SEMI standards and has info pads to provide the
user with lock-out capability on process tool loadports. Four info pads are identified as A, B, C & D
per SEMI standards and are designed to be userconfigurable. Info pad “plugs” snap into the desired
info pad hole to configure the pod for lock-out on
process tools.
Standard product has A & B open and C & D closed
(plugged).
World-class
Manufacturing Program
Service Options
Entegris Product Documentation/Specification
Entegris adheres to the strictest manufacturing
standards and is ISO compliant to the latest
industry requirements.
Entegris will consider working with users to provide
on-site service support utilizing the users cleaning
equipment and facilities, with Entegris providing
the people resources to maintain the RSPs.
Recommended Periodic
Maintenance
For More Information
Entegris recommends routine replacement of the
following components on the RSP every 12 months:
Replacement
Item
Part
Number
Qty per
RSP
Qty per
Kit
Door seal
9700-4246-03
1
20
Breather filters
(inlet & outlet)
9790-0017-01
2
100
Please call your Regional Customer Service
Center today to learn what Entegris can do
for you. Visit www.entegris.com and select the
Customer Service link for the center nearest you.
Terms and Conditions of Sale
NOTE: The door seal and wafer locks are sold in
kits of 20 pieces and the breather filter is sold in
kits of 100.
All purchases are subject to Entegris’ Terms
and Conditions of Sale. To view and print
this information, visit www.entegris.com and
select the Legal Notices link from the footer.
Product Warranties
For Product Warranties, visit www.entegris.com
and select the Legal Notices link from the footer.
Entegris®, the Entegris Rings Design® and Creating a Material Advantage® are registered trademarks of Entegris, Inc.
SEMI® is a trademark of Semiconductor Equipment and Materials International Corporation
ENTEGRIS, INC.
Corporate Headquarters | 129 Concord Road | Billerica, MA 01821 USA
Customer Service Tel. +1 952 556 4181 | Customer Service Fax +1 952 556 8022
In North America 800 394 4083 | www.entegris.com
©2013-2014 Entegris, Inc.
All rights reserved
Printed in USA
1250-7390ENT-0614