Inauguration December 18, 2014 9:00 – 10:00 hrs Prof. Carlo Monetemagno

TENTATIVE PROGRAM
December 18, 2014
9:00 – 10:00 hrs.
Inauguration
Venue: ICSR Auditorium
Keynote address by
Prof. Carlo Monetemagno
U. of Alberta, Canada
10.00 –10.45 hrs.
HIGH TEA
10:45 to 13:00 Hrs.
Plenary Session - 1
P1.1
Martin Gijs
EPFL, Switzerland
P1.2
Microfluidics for sensitive biomarker analysis and accurate cancer diagnosis
Amit Lal
Cornell University, USA
P1.3
Piezoelectric MEMS for Micropower, Communications, and Actuators
Allyson Hartzell
Qualcomm Inc, USA
MEMS reliability
LUNCH 13:00 TO 14:00 (IC & SR)
Invited talks & Oral Presentations
14:00 – 16:00 hrs.
Venue – 1 (IC&SR)
Sensors & Actuators - 1
SA.I.1
Venue – 2 (IC&SR)
Optical MEMS
OM.I.1
Navakanta Bhat
High Performance
Nanostructured Gas Sensor
SA.I.2
MEMS Laser Scanners and
Emerging Display Applications
OM.I.2
Qing-An Huang
A micromachined wind
sensor: from an idea to
commercialization
SA.I.3
Sushanta Kumar Mitra
Can micro/nanofabrication
coupled with fundamental
science and engineering
revolutionize sensor
technology?
SA.O.1
P. Gowda et. al.
Chia Ming Yang
Real-time 2D chemical image for
multi-ion detection
OM.I.3
Muthukumaran Packirisamy
Photonic integrated microsystems for
biodetection
OM.O.1 Malar et. al.
Single Layer Graphene Based IR
Detector
SA.O.2
Hakan Urey
S. Chakraboty et. al.
Electrostatically Actuated Micromirrors For
Fourier Transform Spectroscopy
OM.O.2 Naga Korivi et. al.
Vanadium Dioxide Nanostructures
For Methane Gas Sensing
Nano-textured Surfaces For Portable Surface
Enhanced Raman Scattering Based Sensors
TEA 16:00 TO 16:30 (IC & SR)
Special Session for Sponsors: 16:30 to 17:15
Poster Session-1: 17:15 – 18:45
Cultural Programme: 19:00 – 20:00
DINNER: 20:00
December 19, 2014
Venue: ICSR Auditorium
9:00 – 10:30 hrs.
Plenary Session 2
P2.1
Dimitrios Peroulis
Purdue University, USA
Transfer-function-adaptive RF electronics
P2.2
Soumya Mukherjee
IIT Bombay
Optical Sensors exploiting evanescent waves
TEA 10:30 TO 11:00 (IC & SR)
Invited talks & Oral Presentations
11:00 – 13:00 hrs.
Venue-1 (IC&SR)
Sensors and Actuators - 2
SA.I.1
Jugdutt (Jack) Singh
Venue–2 (IC&SR)
Microfluidics
MF.I.1
Wireless Smart Sensors
SA.I.2
Tarun Kanti
Bhattacharyya
Nanoengineered Sensors and
Actuators
SA.I.3
Dhananjaya Dendukuri
Experiences in developing and
commercializing a microfluidicsbased technology for POC
diagnostics
MF.I.2
Peter Hesketh
Magnetic bead based sampling for
bacteria in fluidic system and ultra
low power MEMS sensors
Goksen Yaralioglu
MF.O.1 Saptak Rarotra et.al.
Micromachined Ultrasonic
Tansducers (MUTs) and
Their Applications
MF.O.2 Karthik Shankar et.al.
Field Induced Conversion Of Co2 And Sea
Water Into Organic Products Inside A Microfluidic Reactor
The Wetting Of Self-assembled Monolayercoated TiO2 Nanotube And Nanorod Arrays
SA.O.1
A. Roychowdhury et. al.
A Low Voltage Field Emission
Tunneling Microtransducer For
Displacement Sensing
SA.O.2
A. Shenoy et. al.
Sensing Performance Of EGFET pH
Sensors With Zinc Oxide (ZnO)
Nanowires
MF.O.3 Sneha Maria M et.al.
Microfluidic Device For Blood Plasma
Separation
MF.O.4 Seim Timung et.al.
Field Induced Flow Behaviors Of Oil-water
Flow Inside Microfluidic Channels
LUNCH 13:00 TO 14:00 (IC & SR)
Invited talks & Oral Presentations
14:00 – 16:00 hrs.
Venue-1 (IC&SR)
BioMEMS/Biosensors
BM.I.1
BM.I.2
Venue–2 (IC&SR)
Processing & Fabrication
PF.I.1
V. Sahadevan
Tools for Micro Assembly
Sangmin Jeon
Chee Yee Kwok
Instant detection of pathogenic
bacteria using a 3D
immunomagnetic flow assay
PF.I.2
Chirasree RoyChaudhuri
BM.1.3
Noise Spectroscopy Based
Computational Analysis for SubFemtomolar Toxin Detection In
Complex Sample Matrices Using
Nanoporous Silicon Oxide
BM.O.1 Priyanka Bhadra et. al
BM.O.2
Stephanus Büttgenbach
MEMS based low cost
microbeam cancer treatment and
research
Formation of low stress and low
thermal budget thick silicon films
for MEMS: an alternative means
Prasanna Gandhi
PF.1.3
Novel Microstereolithography
(MSL) and Bulk Lithography (BL)
technologies for polymer/ceramic
MEMS
PF .O.1 V. Pramitha et.al.
Surface Engineering In BioMEMS:
Effect Of Self Assembled Monolayer
(SAM) Chain Length For Antigen
Detection
Focused Ion Beam Fabrication Of Forkshaped Gratings
Debasis Mondal et. al.
Rajul S Patkar et.al.
Efficacy Of Coplanar Waveguide Sensor
For Electrical Profiling Of Keratinocytes
Under Varied Biomatrix
PF .O.2
Fabrication of a Piezoelectric MEMS
Switch Using a Novel Single Level
Lithography Process
TEA 16:00 TO 16:30 (IC & SR)
Plenary Session 3
Venue: ICSR Auditorium
16:30 -17:15
Kieran Nunan
Micromachined Product Division, Analog Devices Inc., USA
P3.1
MEMS Processes at ADI
Poster Session-2: 17:15 – 18:45
CONFERENCE BANQUET: 19.30
December 20, 2014
Venue: ICSR Auditorium
9:00 - 10:30 hrs.
Plenary Session 4
P4.1
Srinivas Tadigadapa
Pennsylvania State University, USA
Quartz MEMS – Only a matter of Time!
P4.2
Ashwin A. Seshia
University of Cambridge, UK
Engineering non-linearity in MEMS oscillators
TEA 10:30 TO 11:00 (IC&SR)
Invited talks & Oral Presentations
11:00 – 13:00 hrs.
EA.I.1
Venue-1 (IC&SR)
Emerging Areas
Harish Bhaskaran
DM.I.1
Manufacturable roomtemperature NEMS with
zeptogram sensitivity
Nonlinear Dynamics of Shallow
Arched Micro and Nanostructures
Mandar Deshmukh
EA .I.2
EA .1.3
Venue–2 (IC&SR)
Design, Modelling & Simulation
Mohammed Younis
G. K. Ananthasuresh
Probing phase transitions
in nanoscale systems using
NEMS devices
DM .I.2
Non-dimensional Nonlinear
Kinetoelastic Maps for
Micromechanical Suspensions
Marc Madou
DM.O.1 Manish M. Joglekar et.al.
Nano- and MicroPatterning of Carbon:
Carbon Nanowires
DM.O.2 N Bhuvana et.al.
Modeling And Experimental Characterization
Of The Resonant Behavior Of Electrostatically
Actuated Tapered Microcantilevers
Design And Modeling Of Piezo MEMS
Flapping Wing For Nano Air Vehicles
EA .O.1
Srijeet Tripathy et.al.
High Sensitivity Displacement
Sensing Based On Single Wall
Carbon Nanotube Junctions
Noel Prashant
EA .O.2
Size- And Charge- Selective
Transport Of ZnO nanoparticles
through Silicon nanoporous
membrane
DM.O.3 Pankaj Shivhare et.al.
Sensitivity Improvement Of A Silicon Nitride
Beam Resonant Pressure Sensor
DM.O.4 Anish Roychowdhury et.al.
A coupled hybrid FEM scheme to model
Squeeze Film Effects with structural
interactions in vibratory MEMS devices
LUNCH 13:00 TO 14:00 (IC & SR)
Plenary Session 5
14:00 – 14:45 hrs.
P5.1
Suman Chakraborty
IIT Kharagpur
Microfluidics for Healthcare Engineering
Invited talks & Oral Presentations
15:00 – 17:00 hrs.
Venue – 1 (IC&SR)
RF MEMS
RF.I.1
Muhammad Ashraful Alam
TR.I.1
In Search of a Better MEMSSwitch: An Elementary theory of
how nanostructured dielectrics may
soften landing, increase travel
range, and decrease energy
dissipation
RF.I.2
Joshua Lee
MEMS Packaging for harsh
environment
TR.I.2
High quality factor silicon MEMS
resonators
RF.O.1
Karthik Shankar et. al.
Microstrip-coupled Open Loop Microwave
Resonators Integrated With 1-D
Semiconductor Nanostructures For
Sensing
RF.O.2
Venue- 2 (IC&SR)
Testing, Packaging &
Reliability
Manjunatha M Nayak
Girish Phatak
LTCC for MEMS
TR.I.3
Shanthi Pavan
Circuit Design for sensor
interfaces
Sukomal Dey et. al.
Linearity, Power Handling And Reliability
Of Electrostatic RF MEMS Metal-contact
Switch For Broadband Applications
RF.O.3
S. Shekhar et. al.
Reliability Analysis Of Low Actuation
Voltage Shunt-capacitive RF MEMS
Switches
RF.O.4
Udit Rawat et. al.
Design Of Low-loss Phononic Crystal
Tethering For RF MEMS Resonator
Applications
TR.O.1 Banibrata Mukherjee et.al.
A Simple And Cost-effective
Experimental Method For Dynamic
Characterization Of Planar Resonant
Microstructures
TR.O.2 Santanu Talukder et.al.
Tailoring electromigration in liquid and
solid states for fabricating highly reliable
piezoresistive sensors
Valedictory Session & Prize Distribution
17:00 TO 17:30 hrs.
HIGH TEA 17:30 TO 18:00 (IC & SR)
Poster Session - 1
18th December: 17:15 – 18:45
Paper No.
Authors
Paper Title
DMS 1035 M. Hadj Said et al.
Numerical Magnetic Analysis For A Monolithic
Micromachined Electrodynamic Microphone
DMS 1053 R. R. Trivedi et al.
Design Of Electrostatically Driven Cantilever
Microbeams For Enhanced Static Travel Range By
Paricle Swarm Optimization
DMS 1016 S. Trivedi et al.
ZnO Nanorod based 36°-YX LiTaO3Love Wave
Resonator for DNA Detection
Generalized Expressions For Capacitance Of
DMS 1055 P. N.Kambali et al. MEMS/NEMS Devices Under Direct And Fringing
Electrostatic Fields
DMS 1029 S. Kavitha et al.
A Novel MEMS Capacitive Accelerometer
structure for Structural Health Monitoring (SHM)
and Seismic Applications
DMS 1069 B L. Reddy et al.
Design and Simulation of SiC BDETF MEMS
Resonant Strain Sensor for Harsh Environment
Applications
DMS 1077 S. Bose et al.
Study of variation in the tunneling current due to
the variation in the number of tips in tunneling
accelerometers
DMS 1079 R. Dhami et al.
Design Analysis Of Diaphragm Actuation For
Micro-compressor
DMS 1015 A. Chandnani
Design And Analysis Of Piezoresistive Polyimide
Nanocantilevers For Surface Stress Sensing
Applications
DMS 1072 O. Supekar et al.
Polymer MEMS based Piezoelectric Energy
Harvester for Low Frequency Vibrations
EMTNN
1004
Surface and Nonlocal effects on Resonance
Frequencies of Nanobeams
Nikhil V S et al.
DMS 1081 S. Aggarwal et al.
Design of efficient Piezoelectric Actuator for
MEMS devices
DMS 1017 D. N. Prasad et al.
A Solution to Trap DNA Molecules Under
Electrokinetic Effects in Fluids with Different
Electrode Geometries
DMS 1007 V. Belwanshi et al.
Design Optimization Of Piezoresistive Pressure
Sensors For Nuclear Reactor Applications
A Bossed Diaphragm Pressure Sensor Using Wet
DMS 1023 R. Nambisan et al. Bulk Micromachining For Barometric Applications:
Design Aspects
DMS 1028 S. Makireddi et al.
Effective Properties of PVDF/ZnO Nanocomposite
Sensor for Structural Health Monitoring
DMS 1047 Pandiyan P et al.
Design and simulation of chevron type MEMS
Digital-to-Analog converters
DMS 1048 S. K. Tiwari et al.
CMUT as Mass Sensor
M. Chattopadhyay
DMS 1067
et al.
Design and Performance Evaluation of MEMS
Capacitive Pressure Sensor for Continuous
Monitoring of Blood Pressure
DMS 1082 G. Govindarajan
A computer simulation model for smart compliant
mechanism for bio-mimetic fish.
SA 1017
T. F. Mohammad et Static and dynamic analysis of MEMS arches
al.
actuated by electrostatic fringing fields
DMS 1008
M. K. Patankar et
al.
FEM Simulation of Thin SiC Diaphragm for
Piezoresistive MEMS Pressure Sensor
DMS 1020 K. Soni et al.
Analysis Of Linear And Non-linear V-shaped
Microcantilever For Sensing Applications
ORT 1008 A. Chatterjee et al.
A comparative study on bending profiles of polymer
based Quad beam type MEMS sensor towards
uniaxial loads
APOM
1004
M. Bala Krishnan et Dielectric Elastomer Actuator driven Tunable
al.
Optical Grating
APOM
1003
P. K. Pattnaik et al.
Temperature Insensitive Optical MEMS Pressure
Sensor
DMS 1070
V. S. Kantamneni
et al.
Configurability Of The Double Pole Wheel For
Speed Sensing
SA 1025
S. Ghosh et al.
Ca, Ba and Sr -IncorporatedSnO2 Sensors for
Detection of Sub-10 ppm Carbon Monoxide
SA 1031
P. Biji et al.
Development Of Functionalized Multi-walled
Carbon Nanotubes based NH3 Gas Sensors for
Breath Analyzer Applications
SA 1026
M. Rajavelu et al.
High Sensitivity MEMS Piezoresistive
Piezoresistive Pressure Sensor using Perforated
Diaphragms and Dual Bridges
PROFAB
1015
R. Sharma et al.
Silicon Nitride-based Ion-Sensitive Field-Effect
Transistor
SA1033
K.Sivasundari et al.
MEMS pressure sensor based on PWM technique
for low pressure application
SA1010
S. Kundu et al.
Synthesis, characterization and ethanol vapour
sensing behavior of sol-gel derived nanostructured
samarium(III) doped tin oxide sensor
SA1054
A. Mukherjee et al.
Ammonia detection using graphene-carbon
nanotube hybrid network
SA1029
L.Sujatha et al.
Design, Optimization and Analysis of Proof Mass
Actuation for MEMS Accelerometer
SA1034
B. M. Rao et al.
Room Temperature Methane Sensors based on TiO2
Nanotube Arrays
DMS 1058 Kathirvelan et al.
Fabrication of silver interdigitated electrodes on
kapton substrate coated with multiwalled carbon
nanotubes as sensor element for gas sensing
SA1019
T. Golani et al.
Design and Development of a Magnetic Fluxgate
Current Sensor and Frequency Domain Extraction of
Current Information
SA1023
P.K. Mahato et al.
Synthesis and Characterization of PZT-PVDF
Piezo-composites for Voltage Generation
EMTNN
1003
S. Bokade eta al.
Fabrication of Gold nanostructure Arrays using
Modified Nanosphere Lithography
Poster Session - 2
19th December: 17:15 – 18:45
Paper No.
APRFM
1001
APRFM
1011
Authors
Paper Title
M. S. Giridhar et
al.
Packaging of an ohmic contact RF MEMS switch for
DC-6 GHz applications
L. K. Bhaleraw
et al.
Film Bulk Acoustic Resonator (FBAR) Using Dry
Etching Process: Design, Fabrication, Packaging and
Testing
APRFM
1020
Design and Simulation of a Novel ElectroA. K. Ilkhechi et
Thermally Actuated Three State RF MEMS Latching
al.
Switch
APRFM
1030
Mr. P. Kumar et High Isolation RF MEMS Switch for DC-40 GHz
al.
Application
APRFM
1017
J. Dutta et al.
Design and Simulation of a Film Bulk Acoustic
Resonator based RF filter for Broadband PCS
system
APRFM
1031
Sarath G. et al.
Stress Relief Membranes for RF MEMS Capacitive
Switches
APRFM
1002
N. Kumar et al.
Bandpass To Bandstop Switchable And Tunable
Filter
APRFM
1012
J. Rajmohan et
al.
Reconfigurable Micromachined Square Patch
Antenna using RF MEMS Switches
APRFM
1033
V. V. Pasula et
al.
Fabrication And Characterization of Coplanar
Waveguide Piezoresistive MEMS Resonators
APRFM
1032
DMS 1083
Improved Design of RF-MEMS Series-Shunt
M. Angira et al. Switch for Reconfigurable RF Front End
Applications
T. Singh et al.
Design and Modeling of Robust Low Voltage RF
MEMS Switch for K-band Operation
APRFM
1016
E. S. Shajahan et Fabrication and Characterization of RFMEMS
al
Capacitive Switches
PROFAB
1016
C. J. Robin et al.
Optimization of Fabrication Process for the SU-8
Structural Layer used in MEMS Devices
PROFAB
1020
G. M. Sridharan
et al.
Fabrication of diffractive optical elements on glass
by dry etching
PROFAB
1006
Shaveta et al.
Development of comb and crab type microaccelerometer using common unified fabrication
process
PROFAB
1018
T. Islam et al.
Local Morphology Changes and Micro Fractal
Structure Formation in a Lifted Hele Shaw Cell
PROFAB
1025
B. Borah et al.
Development of a SiC Based Process Technology
for High Temperature MEMS Applications
B. Kantha et al.
Influence of Pd-Ag contact and Al contact on Pdmodified WO3 thin film sensor for detection of
hydrogen gas
PROFAB
1013
R. Mohanty et al.
Area Effective Silicon Micro Structure Only Using
Front End Bulk Micro Machining
PROFAB
1007
S. Dutta et al.
Estimation of Residual Stress due to Deep Boron
Diffusion by wafer curvature technique
PROFAB
1017
TRP 1014
S. M. Satheesh et Estimating failure probability of polysilicon
al.
cantilevers
TRP 1016
Veerapandi. N et MEMS based High Pressure Transducer Packaging
al.
Techniques and Performance Studies
TRP 1002
Packaging techniques for EGFET devices for
D.K. Kharbanda
developing pH-sensing platform using thick film
et al.
alumina and LTCC technology
APBIMBIS B Ramakrishna
et al
1011
LSPR based U-bent fiber optic biosensor using gold
nanoparticle as labels
APBIMBIS S.
Effect of Pluronic Additive on Lipase for Integrated
Gangopadhyay et
1017
EISCAP-DMF
al.
APBIMBIS
G. Kathel et al.
1021
Improved mass estimation from multiple resonant
peaks of microcantilever
APBIMBIS
S. De et al.
1001
Immobilization of glucose oxidase on functionalized
chitosan based cerium oxide nanocomposite film for
glucose biosensor
APBIMBIS
S. Hore et al.
1002
Development of Electronic Tongue for Food Grain
Analysis
APBIMBIS A. Manoharan et The effects of processing conditions of zinc oxide
al.
1015
nanorods for biosensor application
PROFAB
1004
B. C. Gulab et al.
Development Of MOS Sensor For Renal Disease
Detection
APBIMBIS
N. Das et al.
1003
Graphene Coated Nanoporous Silicon
Immunosensor For Food Toxin Detection
APMF
1013
Simulation of an Artificial Micro Swimmer Motion
in a Viscous Fluid using Lattice Boltzmann Method
Combined with Smoothed Profile Method
S. Alapati et al.
DMS 1056 D. A. Perumal et Simulation Of Double-sided Micro-cavity Flows
al.
using Lattice Boltzmann Method
APMF
1004
Nagesh Ch et al.
Design of an Electro-osmotic Pump for Controlled
Drug Delivery
APMF
1009
R. Gupta et al.
A numerical study of methane-air premixed flame in
a micro-channel
APMF
1006
A. Raj et al.
A study of pressure driven flow through flexible
PDMS microchannels
APMF
1008
L. Sujatha et al.
Performance of a Digital Microfluidic Device using
Low Temperature Co-fired Ceramic Process Flow
APMF
1002
P. Sajeesh et al.
Sorting of droplets in a microchannel
APMF
1003
R. Saxena et al.
Silicon Microchannel Based System for Heat Sink
Application
APMF
1007
N. Kumar et al.
Development of a solenoid actuated Planar
Valveless PDMS Micropump
APMF
1013
V. P. Gaikwad
Thermal and Flow Characteristics of Microchannels
Having Leaf Venation Patterns