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SPM 220, 1-100 amu
Sputtering process gas analysis in the range of
1-100 amu
Measurement & Analysis / Analysis Equipment / Gas Analysis / Gas analysis in the pressure range of up to 10 hPa
SPM 220, for process pressure up to 10 hPa, orifice flange
(differentially pumped), 115-230 V
SPM 220, Sputtering Process Monitor mass range 1-100 amu, 115-230 V, 50/60 Hz,
for process gas and residual gas analysis at pressure range 10 hPa > p > 1 • 10-4 hPa
consisting of:
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PrismaPlus with quadrupole electronics QME 220, quadrupole analyzer QMA 200 M
with open ion source and two iridium filaments, yttrium oxid coated
Differential pressure stage with flange DN 40 CF and orifice 0.1 mm
System control unit BRU 220 with power supply TPS 311 and remote connector for
external access
Turbomolecular pumping station with SplitFlow 80 and backing pump MVP 020-3 DC
Total pressure gauge PKR 251
Set of cables, 3 meter
Quadera software for Windows 7, XP Professional (32bit) for parameterisation of
PrismaPlus system and for storage and showing measurement data, includes SPM
software add-in for Quadera
Dimensions
B
C
D
www.pfeiffer-vacuum.com
290 mm
380 mm
395 mm
Page 2
Measurement & Analysis / Analysis Equipment / Gas Analysis / Gas analysis in the pressure range of up to 10 hPa
Technical Data
SPM 220, for process pressure up to 10 hPa,
orifice flange (differentially pumped), 115230 V
Analyzer with SPM ion source
Backing pump
Cable length
Detection limit (in argon): Carbon dioxide
Detection limit (in argon): Hydrogen
Detection limit (in argon): Nitrogen
Detection limit (in argon): Oxygen
Detection limit (in argon): Water vapor
Detector
Flange (in)
Mass range
Process pressure to
Quadrupole controller
Rod system: Diameter
Rod system: Length
Rod system: Material
Software
SPM system controller
Supply
Turbopump
Weight: Analyzer incl. Turbo
QMA 220
MVP 020-3
3m
< 100 ppb
< 3000 ppb
< 100 ppb
< 100 ppb
< 500 ppb
C-SEM/Faraday
DN 40 CF-F
1-100 amu
10 hPa | 7.5 Torr | 10 mbar
QME 220
6 mm | 0.24 inch
100 mm | 3.94 inch
Stainless steel
QuaderaTM
BRU 220
115-230 V
SplitFlow 80 mit TC 110 RS
13 kg | 28.66 lb
Order number
SPM 220, 1-100 amu
PT M51 380
Accessories
Accessory for ActiveLine gauges and
controllers
Sensor cable, 3 m
Control and display units
DCU 002, Display control unit
RS-485
USB converter to RS-485 interface
Sealing gas
Sealing gas valve, shielded for HiPace 60/80
with TC 110
www.pfeiffer-vacuum.com
PT 448 250 -T
PM 061 348 -T
PM 061 207 -T
PM Z01 310
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All data subject to change without prior notice. (03/07/2015)
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