A PASSION FOR PERFECTION
SPM 220, 1-200 amu
Sputtering process gas analysis in the range of
1-200 amu
Measurement & Analysis / Analysis Equipment / Gas Analysis / Gas analysis in the pressure range of up to 10 hPa
SPM 220, for process pressure up to 0,01 hPa, with safety
valve SVV 040, 115-230 V
SPM 220, Sputtering Process Monitor mass range 1-200 amu, 115-230 V, 50/60 Hz,
for process gas and residual gas analysis at pressure range 0,01 hPa > p > 1 • 10-7
hPa consisting of:
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PrismaPlus with quadrupole electronics QME 220, quadrupole analyzer QMA 200 M
with open ion source and two iridium filaments, yttrium oxid coated
With safety valve SVV 040 PM, electro pneumatically operated connection flange DN
40 CF for automatically shut-off of SPM 220
Valve control unit VCU 220
System control unit BRU 220 with power supply TPS 311 and remote connector for
external access
Turbomolecular pumping station with HiPace 80 and backing pump MVP 020-3 DC
Total pressure gauge PKR 251
Set of cables, 3 meter
Quadera-Software for Windows 7, XP Professional (32bit) for parameterisation of
PrismaPlus system and for storage and showing measurement data, includes SPM
software add-in for Quadera.
Dimensions
A
B
C
D
www.pfeiffer-vacuum.com
350 mm
290 mm
380 mm
416 mm
Page 2
Measurement & Analysis / Analysis Equipment / Gas Analysis / Gas analysis in the pressure range of up to 10 hPa
Technical Data
SPM 220, for process pressure up to 0,01
hPa, with safety valve SVV 040, 115-230 V
Analyzer with SPM ion source
Backing pump
Cable length
Detection limit (in argon): Carbon dioxide
Detection limit (in argon): Hydrogen
Detection limit (in argon): Nitrogen
Detection limit (in argon): Oxygen
Detection limit (in argon): Water vapor
Detector
Flange (in)
Mass range
Process pressure to
Quadrupole controller
Rod system: Diameter
Rod system: Length
Rod system: Material
Software
SPM system controller
Supply
Turbopump
Weight: Analyzer incl. Turbo
QMA 220
MVP 020-3
3m
< 100 ppb
< 6000 ppb
< 100 ppb
< 100 ppb
< 500 ppb
C-SEM/Faraday
DN 40 CF-F
1-200 amu
0.01 hPa | 7.5 · 10-3 Torr | 0.01 mbar
QME 220
6 mm | 0.24 inch
100 mm | 3.94 inch
Stainless steel
QuaderaTM
BRU 220
115-230 V
HiPace 80 mit TC 110 RS
13 kg | 28.66 lb
Order number
SPM 220, 1-200 amu
PT M52 370
Accessories
ActiveLine sensor cables
Sensor cable, 3 m
Control and display units
DCU 002, Display control unit
RS-485
USB converter to RS-485 interface
Sealing gas
Sealing gas valve, shielded for HiPace 60/80
with TC 110
UHV gate valve, electropneumatic, with PI,
with PV, DN 40 to 250 CF
SVV 040 PM, UHV gate valve,
electropneumatic, with PI, with PV, 24 V, 50 Hz
www.pfeiffer-vacuum.com
PT 448 250 -T
PM 061 348 -T
PM 061 207 -T
PM Z01 310
PF F58 131
Page 3
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T +49 6441 802-0
[email protected]
www.pfeiffer-vacuum.com
All data subject to change without prior notice. (12/22/2014)
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