Process Equipment for Polysilicon Facilities
Multistep Power
Cabinet (MPC)
Equipment
Process
Solutions
The SiTec Multistep Power Cabinet (MPC) is an important part of
polysilicon deposition and STC-TCS (silicon tetrachloride – trichlorosilane)
conversion. The MPC is used to control the current (alternative:
temperature or power) in the silicon rods in the CVD reactor or the graphite
rods in the STC-TCS converter. The Multistep Power Cabinet ensures the
defined current flow during the complete deposition or conversion process.
Due to its modular system our MPC is suitable for all sizes of CVD reactors
and STC-TCS converters. Thanks to the integrated controller in each
module of the MPC, the SiTec Multistep Power Cabinet has a much lower
space demand than the traditional power supply systems.
The integrated controller can be programmed in the following modes:
current, temperature or power. For integration of the MPC in the automation
system the following bus connections are available: Profibus, Ethernet and
USB.
Together with SiTec CVD reactors and STC-TCS converters the MPC is
fully integrated within the plant automation system.
Process Equipment for Polysilicon Facilities
Multistep Power
Cabinet (MPC)
2,402 mm
Dimensions
Technical
Data
Features
and
Benefits
Multistep Power Cabinet for CVD Reactor and Converter
Dimensions
width
depth
height
2,416 mm
1,210 mm
2,402 mm
Weight
2,600 kg
Voltage ranges
CVD reactor
converter
300 − 2,500 V
500 V ± 10 %
SiTec GmbH is a leading company
providing an Integrated Engineering
and Technology Package along the
value chain from producing polysilicon
to ingots and wafers.
Our reliable, innovative and low energy
consuming production technology
Current ranges
CVD reactor
converter
80 − 3,400 A
3,300 A
guarantees competitive manufacturing
Frequency
50 / 60 Hz
grade silicon.
•
cost for semiconductor grade and solar
High flexibility due to modular and scalable design for any size of
CVD reactor or converter
• Integrated control system for power control
•
•
Flexible selection of parameters for process optimization
Operator friendly interface
•
Fully automated process
• Equipment Made in Germany
Errors and omissions excepted. Changes possible at any time and without notice.
SiTec GmbH 03/2015
SiTec GmbH
Gewerbepark Lindach A12
84489 Burghausen
Germany
T +49 8677 8734 7600
F +49 8677 8734 7610
[email protected]
www.centrotherm-sitec.de