AMEC SEES GROWING DEMAND FOR ITS MOCVD
TECHNOLOGY IN CHINA AND TAIWAN
SHANGHAI, China and TAIPEI, Taiwan – March 16, 2015—Just two years after its market
debut, Advanced Micro-Fabrication Equipment Inc.’s (AMEC) Metal Organic Chemical Vapor
Deposition (MOCVD) platform, the Prismo D-Blue®, is gaining widespread acceptance by leading
manufacturers of Light Emitting Diodes (LEDs). The fully automated four-chamber cluster tool is
also being evaluated as a formidable mass-production system for power electronics devices, with
advantages that match customers’ performance expectations for state-of-the-art MOCVD
systems. Five companies in China and Taiwan are collaborating with AMEC on their LED
production equipment needs. One customer is already using the Prismo D-Blue in volume
production, reporting superior performance and productivity, as well as cost-of-ownership
benefits. Others are evaluating the system for 2- and- 4-inch wafer processing. The momentum
reinforces AMEC’s lead as China’s top provider of advanced production-worthy MOCVD tools,
and demonstrates the competitiveness of the Prismo D-Blue in the global LED marketplace.
AMEC’s MOCVD technologists will share a technology update at LED Taiwan, Mar. 25-28. They
will be present at Booth No. N0208.
Growing interest in the Prismo D-Blue reflects today’s buoyant market for MOCVD tools
following a challenging industry downturn. AMEC used the downturn to execute on a practical
product-positioning strategy and deepen customer engagements. Now, the company intends to
exploit the market trajectory which is expected to last through 2016, says research firm, Yole
Developpement *. Yole expects the equipment market to peak at $580 million in 2015, with
MOCVD reactors commanding more than 80 percent of the total. The highest demand is in China
and Taiwan where manufacturers are buying new MOCVD reactors as they switch to 4-inch
systems.
Dr. Zhiyou Du, Senior Vice President, COO and General Manager of AMEC’s MOCVD Product
Business Division called the product-positioning progress very encouraging. He noted, “We’re
pleased to be working so closely with customers in China and Taiwan, which, of course, is the
center of gravity for LED production. We’re confident that the Prismo D-Blue can help them meet
their aggressive production targets without sacrificing margins.”
To schedule an appointment with an AMEC MOCVD technologist at LED Taiwan, please contact
Winnie Xiong at [email protected].
About the Prismo D-Blue MOCVD Platform
The Prismo D-Blue MOCVD platform enables high-volume manufacturing of sophisticated GaN,
InGaN and AlGaN ultrathin layered structures required for high-brightness LEDs. With precise
parameter control, full automation and an unusually compact design, it’s a new-generation
MOCVD tool built for today’s LED manufacturing must-haves: high productivity, high yields and
lowest possible cost-of-ownership.
The patented architecture can accommodate up to four reactors. Each reactor can be controlled
independently—an inventive design that enables exceptional manufacturing flexibility. It is the
only tool of its kind with this capability. This means it can process in parallel or sequential mode,
which reduces cross-contamination and ensures the high crystalline quality required for
advanced LED applications.
The tool’s footprint efficiency is unmatched—nearly 30 percent
smaller than competitive single-reactor systems—making the Prismo a smarter fit for today’s LED
fabs.
The Prismo platform can simultaneously process up to 232 2-inch wafers or 56 4-inch wafers. The
processing capability will extend to 6 and 8-inch wafer production. Beyond the multi-reactor
architecture configured for maximum process flexibility, the Prismo excels in every key
performance category. With very little recipe adjustments throughout the entire epitaxial
process, the tool consistently delivers breakthrough repeatability and excellent within-wafer and
wafer-to-wafer uniformity. For a process with extreme sensitivity to chamber surface conditions,
chemical environments, temperature shifts, and other variables, the repeatability performance is
in a class of its own.
Ultra-high reliability is also a key strength. Such reliability is enabled by in-situ, real-time
monitoring of growth process parameters. It is also thanks to sophisticated software, advanced
transfer modules, and process automation and control technologies– the same field-proven
technologies that distinguish AMEC’s semiconductor front-end processing tools.
Finally, the Prismo is optimized for easy maintenance - imperative in a fast-moving,
cost-conscious LED production fab. Exceptional process performance and uptime extends the
interval between services, while novel design features make servicing easier. Also, automated
and programmable maintenance routines make reactor open/close operations safer, faster,
predictable and less prone to error.
Special innovations embodied in the Prismo D-Blue MOCVD platform are protected by a portfolio
of more than 100 patents (granted and pending). In addition, the tool follows semiconductor
manufacturing disciplines and complies fully with SEMI standards.
*Yole Developpement, LED front-end equipment market report, April 2014
Prismo D-Blue is a registered trademark of AMEC.
About Advanced Micro-Fabrication Equipment Inc. (AMEC)
AMEC is China’s leading provider of advanced process technology to global semiconductor
manufacturers and others in adjacent energy-related sectors. The company is an entrenched
supplier of dielectric and TSV Etch tools, helping tier-one customers build devices at process
nodes as low as 10nm.
Today the company has positioned more than 350 Etch stations at 30
leading-edge fabs across Asia.
volume production in China.
AMEC’s MOCVD tools have also been put into production for LED
To learn more about AMEC, please visit www.amec-inc.com.