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SECTION 1.0
INTRODUCTION
1.1 HOW TO USE THIS MANUAL
Read Section 1.0 for general information regarding the Model 6000 Series Test Station. For unpacking
and setup information, and equipment familiarization, read Section 2.0. For information regarding how
to operate this equipment, and instructions that will serve to introduce several equipment familiarization
procedures, read Section 3.0. Section 4.0 provides maintenance and repair methods and
recommended spare parts.
1.2 INTRODUCTION
The Model 6000 Series Test Station (Ref. Fig. 1-1) provides probing capabilities for failure analysis,
research and development design analysis and device characterization analysis It is also compatible
with all of The MICROMANIPULATOR Co. extensive line of probes and accessories, making it
an excellent foundation on which to build a complete probing system.
The optional probe card holder and high resolution magnetic or vacuum based manipulators allow
probe cards and high resolution diagnostic probes to be simultaneously used. The vacuum chuck can
be easily lifted off and replaced with the socket chuck for probing packaged devices, or the hot\cold
chuck fro specialized testing applications. Replacement of the vacuum chuck is just as simple, with no
tedious re-planarization by the user.
The 6000 Series Test Station features the MicroZoom ® or FS-60 microscopes which combine high
magnification of very small geometries and long working distance objectives for ease of probing.
Stability is very important at high magnifications, and the 6000 Series Test Station post provides the
rigidity, X-Y translation (1" x 1"), and planar movement required for the microscope.
For rapid wafer scanning, the high resolution manual stage can be supplemented with the optional
motorized stage drive.
1.3 GENERAL DESCRIPTION
If the test station has not been unpacked (Ref. Fig. 1-1), read the instructions for unpacking in Section
2.0. If the test station has been unpacked and is ready for assembly, read the Setup instructions in
Section 2.0. If the test station has been setup and is ready to run and you have options to add, refer to
the instructions in Section 3.0.
LIFT DELAY ADJUSTMENT
X-TRANSLATION
HEIGHT STOP
ANGULAR STOP PLATE
PLATEN QUICK LIFT HANDLE
1
. 5
Y-TRANSLATION
x
SCOPE COARSE/FINE
QUICK LIFT
FOCUS
RELEASE BUTTON
STAGE VACUUM
SWITCH
UP
BNC STRAIN RELIEF
SYSTEM VACUUM MANIFOLD
FIGURE 1-1. MODEL 6000 TEST STATION
Those responsible for the care and up keep of the test station should become familiar with its various
parts as illustrated in figure 1-1 and accompanying descriptions.
1.3.1 Stage Translation
The 6000 Test Station wafer chuck stage is manually operated utilizing X and Y direction control
knobs. Each of these control knobs have two knobs consisting of one small knob within a larger knob
that are used for coarse and fine adjustment. As you are facing the instrument, the X adjustment is on
the right and Y adjustment is on the left.
To setup and view a Device Under Test (DUT), first manually position the probe in the general area to
be probed, then position the microscope over the probe. Once the area has been established, position
the stage (wafer chuck) with the coarse X and Y adjustment then fine tune with the fine adjustment.
1.3.2 Platen
Up to eight (8) or more manipulators can be flexibly positioned on the platen. The highly polished
magnetic stainless surface accepts vacuum or magnetic base manipulators. High resolution, excellent
stability and true planar vertical motion combined to make this probe platform exceptionally useful. It
can be raised or lowered in submicron increments or quickly raised more than 1 inch in a second.
1.3.3 Microscope
Powerful microscope optics are well supported on a massive microscope post affording full 1" x 1" x 2"
X-Y-Z translation. Scanning of a DUT is facilitated by stage and optic movements which are
permanently planarized at the factory.
1.3.4 Chuck
The vacuum chuck is easily replaced within seconds by the optional socket device holder which allows
packaged devices to be conveniently powered and probed. It can the be easily replaced within
seconds since chuck planarity is permanently set at the factory. Probe cards can be used along with
individually positioned probes by using the optional probe card holder.
1.3.5 BNC Connectors
Ten isolated BNC feed throughs are provided to interface the DUT to the test equipment, five on the
left side of the platform and five on the right. They are to provide isolation and strain relief between any
probe cables and external test equipment. These connectors are mounted in delrin in order to isolate
them from the chassis. Each BNC is tested to ensure better than 5 teraohms isolation between each
conductor and its outer shell. Also each BNC has greater than 5 teraohms isolation between itself and
any other BNC connector as well as test station.
1.4 SPECIFICATIONS
1.4.1 Platen
Accepts 8 or more magnetic or vacuum base manipulators
10 BNC strain relief's
1 in. (25.4 mm) thick honeycomb construction for maximum stability.
Top surface electrically grounded to white terminal at rear of baseplate
Fine Lift Control
True planar vertical motion, convenient knob control
Resolution: 0.3 micron per degree revolution
Range: 0.5 in. (12.7 mm)
Quick Lift Control
Raises platen and microscope with adjustable microscope lift delay
Range: 1.35 in. (34.3 mm)
Resolution: 10:1 reduction (handle:platen)
1.4.2 X-Y Stage
Range of motion 4 in. x 4 in. (101.6 mm x 101.6 mm)
Movement permanently set a factory
Theta rotation control full 360o with conveniently located locking knob
Control knobs coaxial X-Y for single hand operation from either side, located center front
Resolution of X-Y movement: 1.8 microns per degree revolution
Optional two-speed motorized stage drive for rapid wafer scanning
1.4.3 Chuck
Standard 4 in. (101.6 mm) diameter with dual tweezer slots
Gold plated brass for low contact resistance
Flatness + .0005 in. (+ 12 microns)
Electrical isolation exceeds 5000 megohms at 500VDC
Electrically connected to black terminal at rear of baseplate
1.4.4 Optional Socket Stage
Conversion time chuck to socket and back to chuck less than 60 seconds
Accepts P.C., cards with ZIF sockets for probing packaged devices while operating
Locking handle for theta rotation control
1.4.5 Microscope and Post
Vertical positioning + 1.4 in. (+ 36 mm) by moving pin support
Vertical motion 0 - 1.36 in (34.3 mm) by platen Quick Lift handle or fine control with or
fine control knob with adjustable delay
X-Y translation: 1 in. x 1 in. (25.4 mm x 25.4 mm) with convenient knob control
Factory planarized X-Y translation
Coarse/fine focus control
1.4.6 Dimensions and Finish
Size
20 in. (51 cm) wide x 18 in. (46 cm) deep x 24 in. (61 cm) high with optics
Finish
Grained black anodized aluminum for long life
Weight
85 lbs. (38.5 kg)
1.4.7 Shipping Information
Double wall carton with 4 in. foam between inner and outer box
Carton
Inner box = 32 1/2 x 29 x 22
Outer box = 38 x 38 x 32
1.4.8 Facility Requirements
Power
117/60Hz standard, 220/50Hz optional
Vacuum
20 in. mercury recommended for vacuum chuck
Table
Special vibration isolation tables usually not required due to excellent system stability
(SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE)
NOTES
ii
TABLE OF CONTENTS
SECTION
TITLE
PAGE
1.O
1.2
1.3
1.3.1
1.3.2
1.3.3
1.3.4
1.3.5
1.4
1.4.1
1.4.2
1.4.3
1.4.4
1.4.5
1.4.6
1.4.7
1.4.8
HOW TO USE THIS MANUAL............................................................... 1-1
INTRODUCTION...................................................................................... 1-1
GENERAL DESCRIPTION...................................................................... 1-1
Stage Translation........................................................................................... 1-3
Platen............................................................................................................. 1-3
Microscope..................................................................................................... 1-3
Chuck............................................................................................................. 1-3
BNC Connector.............................................................................................. 1-3
SPECIFICATIONS..................................................................................... 1-4
Platen............................................................................................................. 1-4
X-Y Stage...................................................................................................... 1-4
Chuck............................................................................................................. 1-4
Optional Socket Stage.................................................................................... 1-5
Microscope and Post...................................................................................... 1-5
Dimensions and Finish................................................................................... 1-5
Shipping Information..................................................................................... 1-5
Facility Requirements.................................................................................... 1-5
2.0
2.1
2.1.1
2.1.2
2.1.3
2.2
INSTALLATION AND SETUP PROCEDURES....................................
PRE-INSTALLATION PROCEDURES..................................................
Shipping Carton Inspection..........................................................................
Test Station Removal.....................................................................................
Test Station Inspection..................................................................................
INSTALLATION AND SETUP................................................................
2-1
2-1
2-1
2-1
2-1
2-2
2.3
2.3.1
2.3.2
2.3.3
2.3.4
2.3.5
SYSTEM FAMILIARIZATION...............................................................
Microscope Controls.....................................................................................
Platen............................................................................................................
Chuck............................................................................................................
BNC Connectors...........................................................................................
Stage..............................................................................................................
2-3
2-4
2-4
2-7
2-8
2-8
3.0
3.1
3.2
3.3
ACCESSORY INSTALLATION..............................................................
INTRODUCTION......................................................................................
AMBIENT AND THERMAL CHUCK REMOVAL..............................
MANIPULATORS......................................................................................
3-1
3-1
3-1
3-3
iii
SECTION
TITLE
PAGE
3.4
3.4.1
3.4.2
3.5
PROBE CARD HOLDER INSTALLATION..........................................
Probe Card Holder Installation Procedure.....................................................
Probing the Interior of the Probe Card...........................................................
MICROSCOPE LIFT LOCK MECHANISM.........................................
4.0
4.1
4-1
4.2
4.2.1
4.2.2
4.3
4.4
4.5
4.5.1
4.5.2
4.6
MAINTENANCE AND SPARE PARTS.................................................. 4-1
INTRODUCTION.........................................................................................
CLEANING.................................................................................................
Cleaning the Test Station..............................................................................
Cleaning the Microscope Eyepieces..............................................................
JACKSCREW REPLACEMENT.............................................................
BELT REPLACEMENT............................................................................
LUBRICATION..........................................................................................
Microscope Lubrication................................................................................
Stage Lubrication..........................................................................................
RECOMMENDED SPARE PARTS.........................................................
3-5
3-6
3-6
3-7
4-1
4-2
4-2
4-3
4-4
4-4
4-5
4-5
4-7
SECTION 3.0
ACCESSORY INSTALLATION
3.1 INTRODUCTION
This section will instruct you on how to install the following types of accessories:
THERMAL CHUCK
PROBE CARD HOLDER
MANUAL MANIPULATOR
3.2 AMBIENT AND THERMAL CHUCK REMOVAL AND REPLACEMENT
There are two types of CHUCKS that may be mounted in the probe station. These CHUCKS are
AMBIENT and THERMAL. The ambient chuck is equipped with only vacuum to hold the wafer to its
surface while under test; however the thermal chuck is equipped with plumbing for coolant and vacuum
so that the wafer can be tested at temperature.
The THERMAL chuck typically comes with a CONTROLLER with a manual provided for installation
of the chuck with plumbing and electrical connections (Ref. Fig. 3-1)
CHUCK
HEATER
WIRES
COOLING
RINGS
THERMOCOUPLE
AND SIGNAL
WIRES
TO ISOLATION BOX
FIGURE 3-1. THERMAL CHUCK
CHUCK REPLACEMENT PROCEDURE
STEP 1.
Although rigidly positioned, the ambient chuck may easily be removed by lifting it off its
post.. First raise the microscope by means of the quick lift handle or microscope lift.
Swing the low powered microscope objective into position to provide the most space
for chuck removal. Disconnect the chuck potential wire. Remove the ambient chuck.
STEP 2.
Place the THERMAL chuck gently on its post and rotate and lower it until you feel the
index pin drop into its slot and the chuck rest on the theta gear surface.
CHUCK INDEXING SLOT
FIGURE 3-2. CHUCK PIN INDEXING SLOT
STEP 3.
Using the HSM CONTROLLER manual, make the proper plumbing and electrical
connections.
3.3 MANIPULATORS
Manipulators are devices designed to position probes to be placed on pads or other features of the
specimen to be tested. Various electrical connections can be made to the probe, probe holders and
probe tips which also vary in construction. Reference Probe Guide (P/N A1009784) for details for
your particular application. Manipulators are placed around the periphery of the platen, surrounding the
wafer or specimen, in proximity of the location to be probed. Stable position is maintained by magnets
or vacuum ports in the base of the manipulators.
Fine positioning of the manual manipulator is controlled by three knobs which position the probe holder
as a fulcrum or rectilinearly depending on the model. Precision of positioning also varies by model.
PROBE HOLDER SHANK
COLLET
CLOSURE NUT
FIGURE 3-3. COLLET AND CLOSURE NUT
To save time when gross positioning, position the microscope over the area to be probed. Switch the
illuminator on and position the probe point under the cone of the light. Be sure the Z setting is high
enough to clear the specimen with the manipulator base in full contact with the platen surface and
vacuum engaged. Fine positioning can now be accomplished with increasing magnification and adjusting
the manipulator controls.
3.4 PROBE CARD HOLDER INSTALLATION (OPTION 6000-FPC-FR4)
The standard probe card is 4 1/2 inches wide. The PROBE CARD HOLDER (Ref. Fig. 3-4) must
suspend it over the wafer or device with provisions for making the plane of the probes parallel to the
plane of the device being probed. In addition, the connector at the edge of the probe card must be
firmly anchored so that motion of the connecting cable does not disturb the position of the probes.
REAR MOUNTING SCREWS
REAR HEIGHT ADJUSTMENT
HEIGHT ADJUSTMENT SCREWS
(BOTH SIDES)
FRONT MOUNTING SCREWS
WITH HEIGHT ADJUSTMENT SLOT
FIGURE 3-4. PROBE CARD HOLDER INSTALLATION
3.4.1 Probe Card Holder Installation Procedure
The holder is easily mounted on the platen of the probe station by means of four screws. At both the
front and rear are provisions for adjusting the height of the probe card at each corner. To install the
probe card holder, perform the following steps:
STEP 1.
Place a piece of thin plastic or clean paper on the chuck surface (to protect the surface)
and apply vacuum.
STEP 2.
STEP 3.
Mount the probe card holder to the station platen.
Mount the probe card edge connector to the holder and secure it in place.
STEP 4.
Gently lower the empty holder onto the chuck by means of the fine platen lift.
STEP 5.
STEP 6.
With the holder lying flat on the chuck, tighten the four mounting screws. This will set
the probe plane roughly parallel to the device plane.
Raise the platen before proceeding.
STEP 7.
Release the vacuum and remove protective paper or plastic from the chuck.
STEP 8.
Load the probe card in the holder by sliding it between the holding brackets and holder
rails into its edge connector. Tighten brackets.
3.4.2 Probing the Interior of the Probe Card
The power of an analytical probe station is its capability to probe any point in the integrated circuit.
While the probe card provides connection to the PADS, one or more independent probes can probe
interior points (Ref. Fig. 3-5). As shown in the illustration, the probe and its holder are designed to
extend over the probe card holder and under the microscope objective. A specific probe or probe
holder designed for use with probe cards should be used. The probe holder shown in the illustration
holds the convenient disposable probes which may be cut or bent to clear the microscope objective.
Swing-Path Of
Probe End Cut
Highest Power
Close To Holder
Objective
FPC-Type Probe Holder
Probe Card
FIGURE 3-5. PROBING WITH A PROBE CARD
3.5 MICROSCOPE LIFT LOCK MECHANISM
The MICROSCOPE LIFT LOCK MECHANISM (MLLM) was designed to lift the microscope
independent of the platen lift. The locking pin is spring loaded on the pinion hub so it is disengaged
when not in use. With one hand the user can engage the pinion, lift the microscope, and engage the
locking pin (Ref. Fig. 3-6). By raising the lift handle slightly, the locking pin will release automatically.
Locking Pin
Upwards To Lift
Lift Handle
FIGURE 3-6. LIFT LOCK MECHANISM
LIFT LOCK OPERATION:
STEP 1.
TO ENGAGE: press the lift handle to the left side of the probe station.
STEP 2.
TO LIFT: operate lift handle .
STEP 3.
TO LOCK POSITION: press locking pin inward.
STEP 4.
TO DISENGAGE: operate lift handle upward until the locking pin disengages. The
microscope can now be positioned up or down. Once the lift handle is released, the
pinion will also disengage provided the microscope is not applying a load.
NOTES
SECTION 4.0
MAINTENANCE AND SPARE PARTS
4.1 INTRODUCTION
Maintenance of the 6000 Test Station consists primarily of proper lubrication of the moving parts and a
continuing effort to keep the equipment free from dust and other contaminants, such as wafer fragments
or other particles.
The time period between lubrications is dependent upon the location and usage levels of the test
station. If it is located in an open area subject to dust or other contaminants, the station should be
cleaned and lubricated more frequently than directed in this section. However, if the station is located in
a clean area where the environment is more closely monitored, then less maintenance is required. In the
event the test station is located in a corrosive atmosphere, it must be cleaned frequently to remove
corrosive materials.
At frequent intervals, all work surfaces should be wiped down with clean, lint free cloths or wipers,
moistened with alcohol to aid in this process. Also, periodically clean the lenses on the microscope with
a lens brush, followed by a nonabrasive wiper moistened with alcohol. View the eyepieces while
rotating them to reveal particles that should be removed.
The MICROMANIPULATOR Co.'s probing station products are designed to give the user many
years of specified performance if proper care, handling and maintenance practices are observed.
Calibration of manual and programmable probers or accessories may be required if the instrument in
question has experienced any degradation due to excessive wear caused by improper maintenance,
impact, tampering or unauthorized adjustment to any of the pertinent positioning system components
such as leadscrews, nuts, bearing ways or support hardware. Further, if the operator notices any
degradation in performance or inability to hit targets dimensionally within the specified positioning
performance of the product, calibration may be required. It should be noted that lack of lubrication,
excess dirt or grime about the positioning system components as well as improper setup may result in
inaccurate positioning. The user should consult the operations manual or contact the factory
(1-800-654-5659) with any questions or concerns arising with the use of these instruments.
4.2 CLEANING
The probe station should be protected from dust by covering it when it is not in use for a prolonged
time. Dust from laboratory remodeling and similar work can damage precision surfaces and fittings.
Dust inside the microscope is costly to remove and will subtly degrade the view and strain the
operator's eyes.
The MICROMANIPULATOR Co. offers custom dust covers
(P/N7000-DPCTV) which may be purchased at a nominal charge.
4.2.1 Cleaning the Probe Station
Remove dust with a soft cloth or soft brush (do not blow dust and air in bearing ways). A strong air
blast is the only way to get the dust out of crevices. For more vigorous cleaning, wipe with a light
solvent or alcohol.
---------------------------------------------------------------------------------------CAUTION: DO NOT use soap, caustic materials, or other water based
cleaning agents.
---------------------------------------------------------------------------------------A laboratory solvent or alcohol can be used to remove stains from the platen by rubbing with a soft
cloth. DO NOT use abrasives.
4.2.2 Cleaning the Microscope Eyepieces
Microscope eyepieces frequently need cleaning. The user will have a better view of the viewing area if
the eyepieces are regularly checked and a few minutes are taken to clean them when needed.
With the light on and the microscope out of focus (raise the microscope with the platen QUICK LIFT
handle), rotate each eyepiece while looking through the microscope. Dirt and oil stains on the lens will
be obvious by their rotation. If there is obvious dirt, there probably is also an oily film obscuring the
view.
To clean the lens, perform the following steps:
STEP 1.
Blow off loose dust with light air pressure. This will minimize abrasion of the lens when
cleaning.
STEP 2.
With a cotton swab or camera grade lens tissue, wash the lens with a lens cleaning fluid.
A commercial fluid or ethyl alcohol (with no denaturant other than methyl alcohol) are
satisfactory.
STEP 3.
With a circular motion, start in the center of the lens and work outward, also rotating
the swab.
STEP 4.
Use additional cotton swabs or lens tissue to remove all fluid. Four swabs may be
needed to complete the cleaning of one lens, but the task will take only a few minutes
and is worth the effort.
STEP 5.
Replace the lens and rotate it to inspect for remaining spots or films.
4.3 JACKSCREW REPLACEMENT
Operator over enthusiasm, in the use of the FINE LIFT knob, may occasionally cause failure of the
jackscrew (Ref. Fig. 4-1) that lifts the platen. Failure to properly adjust the LIFT DELAY forces the
FINE LIFT mechanism to lift the microscope. The extra load may, over a long period of such
adjustment, wear out the jackscrew. The jackscrew is easily replaced by performing the following
steps:
JACKSCREW
IDLER
FIGURE 4-1. JACKSCREW REMOVAL
STEP 1.
Clear lose objects and parts, raise the front of the probe station until the microscope
post rest on a 3" to 4" stack of books placed behind the station.
STEP 2.
Loosen the screw (it is not necessary to remove the screw) that secures the idler (Ref.
Fig. 4-1) and then remove belt between the large sprocket and small sprocket.
Remove the sprocket located at the bottom center as you now see the underside of the
station. It is secured by four small flat head screws.
STEP 3.
Remove the JACKSCREW (a 2" black cylinder). It is attached to the baseplate of the
station by three socket head screws and can quickly be removed.
STEP 4.
If needed, lubricate the threads of the new JACKSCREW with the lubricant supplied
with the station: G.E. Versilube, G322-L, Silicone Lubrication Grease.
STEP 5.
The 1/4" - thick anchor plate must slide freely, but be prevented from turning by the two
guide screws that have the casual appearance of set screws. They are factory set,
locked by second screws, and rarely, if ever need adjustment.
STEP 6.
Replace the JACKSCREW and appropriate belts, taking care to firmly tighten the
mounting screws.
4.5 BELT REPLACEMENT
The following illustration (Ref. Fig. 4-2) identifies the belts (with their appropriate part number) that may
have to be replaced due to normal wear or breakage:
(AS VIEWED FROM THE UNDERSIDE)
P/N 6000-1-32
P/N 6000-1-36
P/N 6000-0559
(2 EA)
FIGURE. 4-2. BELT IDENTIFICATION AND PART NUMBER
4.5 LUBRICATION
If kept clean, the probe station requires little care. Once every 12 months the station should be cleaned
and lubricated. Since all rotary bearings are sealed and do not need lubrication, the only parts that need
lubricating are the STAGE, LEADSCREWS and the MICROSCOPE DRIVE.
4.5.1 Microscope Lubrication
The microscope X-axis and Y-axis slides must be lubricated every 100 hours of use using the specific
lubricant supplied (P/N 13128357). To lubricate, move the X-axis to the left side of its travel and
lubricate the top and front of the brass slide (Ref. Fig. 4-3). Then move the X-axis to the right and
lubricate the slide on top and front. To lubricate the Y-axis, move the scope toward the front of the
station and lubricate the sides and top of the brass slide. Move the scope forward, backward and from
side to side. Do this until all excess lubricant has pushed to the sides. The excess lubricant can now be
wiped off with a lint free cloth.
To lubricate the RACK and PINION assembly, you must first loosen the locking screw on the
underside of the assembly so that the slide can be moved to expose most the RACK. Place a thin film
of lubricant on the RACK portion of the assembly. Enough of the lubricant will be transferred to the
PINION during normal operation. Return the slide and tighten the locking screw. If this assembly is
over lubricated, a resistance to movement will occur.
E
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E
IS
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C
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F
E
L
C
L
O
C
K
W
IS
O
E
U
T
PINNION
APPLY LUBRICANT
RACK
(UNDER SLIDE)
LOCKING
SCREW
(UNDER SLIDE)
X-AXIS SLIDE
Y-AXIS SLIDE
FIGURE 4-3. MICROSCOPE LUBRICATION
4.5.2 Stage Lubrication
The X and Y axis bearings (Ref. Fig. 4-4) should be lubricated with G.E. Versilube lubricant (P/N
12138354). This cleans and protects the bearings from rust and dirt buildup. This should be
performed every 100 hours.
While you are facing the station move the X-axis to the extreme right and apply lubricant on both sets of
bearings (on either side of the slide) then move the X-axis to the extreme left and apply lubricant. Move
the X-axis slide to the extreme left and right several times to ensure that the lubricant has covered all
bearings. With a lint free cloth, wipe excess lubricant from exposed parts.
While you are still facing the station, move (with knobs) the Y-axis slide away from you as far as it will
go. Apply lubricant to the bearings. Now move the Y-axis slide towards you as far as it will go.
Apply lubricant to the rear bearings. Work the slide to its extreme positions until the lubricant has
covered all bearings. With a lint free cloth, wipe off any excess lubricant that appears on exposed
parts.
(AS VIEWED FROM THE UNDERSIDE)
LP
LP
LP
LP
LP
LP
LP
LP
LP = LUBRICATION POINTS
FIGURE 4-4. STAGE LUBRICATION POINTS
4.7 RECOMMENDED PARTS LIST
The following small parts are occasionally lost or are subject to breakage or replacement due to wear:.
RECOMMENDED
PART NUMBER
DESCRIPTION
QUANTITY
6000-1
Model 1 pins for probe leads (set of 6)
1 set
6000-0226
Button for Quick Lift handle
1
12600039
Chuck Ground Wire
1
Model 2 Collets
4
Model 5 Collets
4
Model 6 Collet Closer
1
6200-B
Set of Belts (4)
1 set
2801-0073
Red Vacuum Hose
25 feet
6000-0146
Tubing, quarter inch, Clear Tygon
10 feet
16307006
O-ring (vacuum based manipulator)
4
Model 48 pin jack to BNC adapter
2
29065014
Jackscrew assembly (platen fine lift)
1
6000-0141
Vacuum switch, wafer hold down
1
13128357
Lubricant
1
12138354
GL Versilube
1
BELTS
6000-0136
Fine platen lift,
1st, at knob
6000-0132
2nd, between idlers
6000-559
X-Y stage movement
2
NOTES
APPENDIX A
ASSEMBLY DRAWINGS
AND
BILLS OF MATERIALS
6000 SERIES
TEST STATION
USER'S MANUAL
1555 Forrest Way
Carson City, Nevada 89706
Tel: 775/882-2400
Fax: 775/882-7694
E-mail: [email protected]
© Copyright 1996 by
The Micromanipulator Company, Inc.
Now Micromanipulator
1555 Forrest Way
Carson City, NV 89706
REVISION 2.1
26JULY00
Printed in the USA
Customer Order: P/N A1010555
Internal: P/N 10412009
FS 60 is a registered trademark of Mitutoyo Corporation
MIRCOZOOM II is a registered trademark of Leica, Inc.
Copyright © The MICROMANIPULATOR Co., Inc. Now MICROMANIPULATOR
All rights reserved.
MICROMANIPULATOR products are covered by U.S. and foreign patents, issued and
pending. Information in this publication supersedes that in all previously published
material, specifications and price change privileges reserved.
MICROMANIPULATOR, 1555 Forrest Way, Carson City, NV 89706
6000 SERIES
TEST STATION
USER'S MANUAL
THE
MICROMANIPULATOR
CO., INC.
1555 Forrest Way
Carson City, Nevada 89706
Tel: 702 / 882-2400
Fax: 702 / 882-7694
[email protected]
© Copyright 1996 by
The Micromanipulator Company, Inc.
1555 Forrest Way
Carson City, NV 89706
REVISION 2.0
11 March 1996
Printed in the USA
P/N 10412009
FS 60 is a registered trademark of Mitutoyo Corporation
MIRCOZOOM II is a registered trademark of Leica, Inc.
Copyright © The MICROMANIPULATOR Co., Inc. All rights reserved.
The MICROMANIPULATOR Co., Inc.'s products are covered by U.S. and foreign patents,
issued and pending. Information in this publication supersedes that in all previously published material,
specifications and price change privileges reserved.
The MICROMANIPULATOR Co., Inc., 1555 Forrest Way, Carson City, NV 89706