슬라이드 1 - iumrs

Abstract Submission Deadline – June 30, 2015
www.iumrs-icam2015.org
International Conference on Advanced Materials
Oct. 25~29, 2015 l ICC Jeju
Program X. Plasma-Materials Interaction
The scope in this symposium includes a variety of plasma processing technologies related to
semiconductor, display, and energy conversion devices. Many of the subjects would include
newly-developed materials, processes, and integration technologies developed through the
plasma-materials interaction. For application of the materials and processing technologies to
those important devices in rapid development today, development of basic and new plasma
technologies for low-temperature and low-cost processing are required and these topics will be
included in this symposium, too.
Topics of interest include (but are not limited to):
 Plasmas for light production: laser media, glows, arcs, flat panels and novel sources
 Plasma etching
 Plasma deposition
 Plasma ion implantation
 Green plasma technologies: environmental and energy applications
 Plasma processing for photovoltaic applications
 Biological/medical applications of plasmas
 Plasmas for nanotechnologies, flexible electronics and other emerging applications
Invited speakers (tentative) include:
Dr. Ankur Agarwal, Applied Materials
Dr. Steven Kim, CPRI (Cheorwon Plasma Research Institute)
Symposium Organizers
Geun Young Yeom
Sungkyunkwan University,
School of Materials Science and Engineering, Jangan-Gu Chunchun-Dong 300, Suwon,
Korea
T. 82-31-299-6560, F. 82-31-299-6565, [email protected]
IUMRS-ICAM2015 Secretariat Office
Euihak Build. 2nd floor, Seogyo-dong, Mapo-gu, Seoul, Korea [121-841]
Tel: +82-2-6925-0510 | E-mail:[email protected]